次世代の半導体リソグラフィー露光用極端紫外光源のスペクトル制御と高効率化

2015 Fiscal Year Annual Research Report

• Project/Area Number: 15K18045
• Research Institution: Utsunomiya University
• Principal Investigator: ヂン タンフン 宇都宮大学, オプティクス教育研究センター, 研究員 (20744808)
• Project Period (FY): 2015-04-01 – 2016-03-31
• Keywords: 極端紫外光 / 炭酸ガスレーザー / 重元素 / 多価イオン / リソグラフィー

Outline of Annual Research Achievements

本年度は，重元素多価イオン，特に原子番号が60番から83番までの極端紫外スペクトルのスペクトル構造を解析すると共に，次世代の半導体リソグラフィー露光用極端紫外光源として重要なSnによる13.5 nm光源およびGdによる6.x nm光源について放射特性を詳細に調べた．このため，以下のような研究を進めた．
(1) 短パルス炭酸ガスレーザーシステムを構築し，パルス幅を3 nsから20 nsで可変とした．発振器は，リング型共振器であり，CdTe結晶に適切なバイアスを印加して，Qスイッチ動作させた．このことにより，パルス幅が15-20 nsのパルスが生成される．そのあと，Nd:YAGレーザー駆動Geプラズマミラーにより短パルス化した．このとき，CO2レーザーとNd:YAGレーザーの遅延時間を設けることにより，パルス幅を3-20 nsで可変にした．その後，14パスのマルチパス増幅することにより，最大150 mJ/pulseのパルスエネルギーを得た．
(2) SnおよびGdのプラズマを生成し，炭酸ガスレーザーのパルス幅により，放射スペクトルや変換効率がどのようになるかを調べた．Snプラズマでは，CO2レーザーのパルス幅を変えてもスペクトル構造は変化しなかったが，Gdプラズマでは，CO2レーザーのパルス幅でスペクトル構造が変化し，スペクトル純度も変化した．較正されたエネルギーメータにより，エネルギー変換効率のパルス幅依存性も明らかにした．
(3) 極端紫外スペクトル構造を規定するために，斜入射分光器の回折格子およびX線CCDカメラを放射光 (Photon Factory) で較正した．この結果を用いて，エネルギー変換効率を評価したところ，エネルギーメータで得られる結果とほぼ同等であることを確認した．
これらの結果を，論文としてまとめているところである．

Research Products

• [Int'l Joint Research] University College Dublin(アイルランド)
  • Country Name: IRELAND
  • Counterpart Institution: University College Dublin
• [Int'l Joint Research] HiLASE Centre(チェコ)
  • Country Name: CZECH
  • Counterpart Institution: HiLASE Centre
• [Journal Article] Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses (2016)
  • Author(s): Tao Wu, Takeshi Higashiguchi, Bowen Li, Goki Arai, Hiroyuki Hara, Yoshiki Kondo, Takanori Miyazaki, Thanh-Hung Dinh, Padraig Dunne, Fergal O’Reilly, Emma Sokell, Gerry O’Sullivan
  • Journal Title: Journal of Physics B Volume: 49 Pages: 035001 (1-10)
  • DOI: http://dx.doi.org/10.1088/0953-4075/49/3/035001
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Analysis of extreme ultraviolet spectra from laser produced rhenium plasmas (2015)
  • Author(s): Tao Wu, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Goki Arai, Thanh-Hung Dinh, Padraig Dunne, Fergal O’Reilly, Emma Sokell, Luning Liu, and Gerry O’Sullivan
  • Journal Title: Journal of Physics B Volume: 48 Pages: 165005 (1-8)
  • DOI: http://dx.doi.org/10.1088/0953-4075/48/16/165005
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Generation of radially polarized high energy mid-infrared optical vortex by use of a passive axially symmetric ZnSe waveplate (2015)
  • Author(s): Toshitaka Wakayama, Hiroki Oikawa, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Thanh-Hung Dinh, Takeshi Higashiguchi, Kazuyuki Sakaue, Masakazu Washio, Taisuke Miura, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Motoki Yonemura, and Yukitoshi Otani
  • Journal Title: Applied Physics Letters Volume: 107 Pages: 081112 (1-5)
  • DOI: http://dx.doi.org/10.1063/1.4929686
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions (2015)
  • Author(s): Thanh-Hung Dinh, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Shinsuke Fujioka, Noboru Hasegawa, Tetsuya Kawachi, Masaharu Nishikino, and Takeshi Higashiguchi
  • Journal Title: Applied Physics Letters Volume: 107 Pages: 121101 (1-5)
  • DOI: http://dx.doi.org/10.1063/1.4931497
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source (2015)
  • Author(s): Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Weihua Jiang, Taisuke Miura, Akira Endo, Takeo Ejima, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Atsushi Sunahara ,and Takeshi Higashiguchi
  • Journal Title: Journal of Applied Physics Volume: 118 Pages: 193301 (1-7)
  • DOI: http://dx.doi.org/10.1063/1.4935817
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Presentation] 短パルスCO2レーザーによるレーザー生成プラズマの高効率化 (2016)
  • Author(s): ヂン タンフン，笹沼 淳史，天野 玲保，荒居 剛己，東口 武史，三浦 泰祐
  • Organizer: 次世代レーザー技術とEUV・軟X線光源に関する研究会
  • Place of Presentation: ZAOセンタープラザ（山形県山形市）
  • Year and Date: 2016-01-24
• [Presentation] レーザー生成多価イオンプラズマ軟X線光源のスペクトル較正 (2016)
  • Author(s): ヂン タンフン，近藤 芳希，田村 賢紀，小野 祐一，荒居 剛己，原 広行，大田 茂，北野 謙，江島 丈雄，羽多野 忠，東口 武史
  • Organizer: 次世代レーザー技術とEUV・軟X線光源に関する研究会
  • Place of Presentation: ZAOセンタープラザ（山形県山形市）
  • Year and Date: 2016-01-24
• [Presentation] Unresolved transition arrays from laser-produced high-Z plasmas for microscopy in the water window soft x-ray region (2015)
  • Author(s): Thanh-Hung Dinh, Yoshiki Kondo, Goki Arai, Taisuke Miura, Akira Endo, Tetsuya Makimura, Padraig Dunne, Gerry O’Sullivan, Tadashi Hatano, Takeio Eijima, and Takeshi Higashiguchi
  • Organizer: The 13th Symposium on X-ray Imaging Optics
  • Place of Presentation: Noyori Conference Hall, Nagoya University (Higashiyama campus), Nagoya, Japan
  • Year and Date: 2015-11-17
  • Int'l Joint Research
• [Presentation] Multiply charged ion plasma sources for compact x-ray microscopy in the water window spectral region (2015)
  • Author(s): T. H. Dinh, Y. Kondo, G. Arai, T. Miura, A. Endo, T. Makimura, P. Dunne, G. O’Sullivan, T. Hatano, T. Ejima, and T. Higashiguchi
  • Organizer: SPIE/OSJ Biophotonics Japan 2015
  • Place of Presentation: Univesity of Tsukuba (Tokyo campus), Tokyo, Japan
  • Year and Date: 2015-10-27
  • Int'l Joint Research
• [Presentation] Development of a 10-Hz short pulse CO2 laser for short wavelength light sources (2015)
  • Author(s): Reiho Amano, Atsushi Sasanuma, Thanh-Hung Dinh, Goki Arai, Yusuke Fujii, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Tetsuya Makimura, Taisuke Miura, Akira Endo, Tomas Mocek, Padraig Dunne, Gerry O’Sullivan, and Takeshi Higashiguchi
  • Organizer: SPIE/OSJ Biophotonics Japan 2015
  • Place of Presentation: Univesity of Tsukuba (Tokyo campus), Tokyo, Japan
  • Year and Date: 2015-10-27
  • Int'l Joint Research
• [Presentation] Spectral and temporal behavior of multiply ionized high-Z plasmas in the water window soft x-ray spectral region (2015)
  • Author(s): T. H. Dinh, Y. Suzuki, G. Arai, M. Nishikino, N. Hasegawa, T. Kawachi, P. Dunne, G. O’Sullivan, and T. Higashiguchi
  • Organizer: 2015 IEEE Photonics Conference, 28th Annual Conference of The IEEE Photonics Society
  • Place of Presentation: Hyatt Regency Reston, Reston, Virginia USA
  • Year and Date: 2015-10-05
  • Int'l Joint Research
• [Presentation] Development of a compact water window soft x-ray source based on multiply charged ion plasmas (2015)
  • Author(s): Thanh-Hung Dinh, Yoshiki Kondo, Goki Arai, Taisuke Miura, Akira Endo, Tetsuya Makimura, Tadashi Hatano, Takeo Ejima, Takeshi Higashiguchi
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場 (愛知県名古屋市)
  • Year and Date: 2015-09-16
• [Presentation] An efficient 6.x nm extreme ultraviolet source produced by a short pulse CO2 laser (2015)
  • Author(s): T. H. Dinh, R. Amano, A. Sasanuma, G. Arai, Y. Fujii, A. Takahashi, D. Nakamura, T. Okada, T. Makimura, T. Miura, A. Endo, T. Mocek, P. Dunne, G. O’Sullivan, and T. Higashiguchi
  • Organizer: The 7th Asian Workshop on Generation and Application of Coherent XUV and X-ray Radiation (7th AWCXR)
  • Place of Presentation: the Center for Relativistic Laser Science of Institute for Basic Science, Gwangju Institute of Science and Technology, Gwangju, Korea
  • Year and Date: 2015-08-31
  • Int'l Joint Research
• [Presentation] Development of Nanosecond Pulse CO2 Laser for Efficient Extreme Ultraviolet Generation (2015)
  • Author(s): Reiho Amano, Thanh Hung Dinh, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Taisuke Miura, Akira Endo, Tomas Mocek, and Takeshi Higashiguchi
  • Organizer: The 4th Advanced Lasers and Photon Sources (ALPS’15)
  • Place of Presentation: Conference Center, PACIFICO Yokohama, Yokohama Japan
  • Year and Date: 2015-04-24
  • Int'l Joint Research
• [Remarks] 宇都宮大学 工学研究科 電気電子システム工学専攻 東口研究室
  • URL: http://photonics.sixcore.jp