2016 Fiscal Year Final Research Report
Development of pizoelectric micromachined ultrasonic transducer array using epitaxila PZT thin films on Si substrates
| Project/Area Number |
15K18050
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Toyohashi University of Technology |
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Principal Investigator |
Akai Daisuke 豊橋技術科学大学, エレクトロニクス先端融合研究所, 助教 (50378246)
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| Project Period (FY) |
2015-04-01 – 2017-03-31
|
| Keywords | 超音波トランスデューサ / pMUTアレイ / 超音波ビーム / 圧電薄膜 |
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| Outline of Final Research Achievements |
We have proposed piezoelectric micromachined ultrasonic transducers (pMUTs) annular array using γ-Al2O3 thin films as an epitaxial buffer layer on Si substrates for obtaining epitaxial Pb(Zr,Ti)O3 (PZT) thin films. Ultrasonic pressure and -6dB beamwidth at 5 mm of the 4 channel pMUT annular array were exhibited 10 times larger and sharper than the single pMUT. These experimental results good agree with analysis results. It will be applied to design miniature 2-D pMUTs array ultrasonic probe.
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| Free Research Field |
半導体デバイス
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