Fabrication of Lithium Niobate waveguides using ultra-precision ductile-mode cutting method

2016 Fiscal Year Final Research Report

• Project/Area Number: 15K18055
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Electron device/Electronic equipment
• Research Institution: Kyushu University
• Principal Investigator: Takigawa Ryo 九州大学, システム情報科学研究院, 助教 (80706846)
• Project Period (FY): 2015-04-01 – 2017-03-31
• Keywords: 低損失光導波路 / ナノ・マイクロ加工 / 大気中異種材料低温接合 / 切削加工

Outline of Final Research Achievements

Lithium Niobate (LiNbO3, LN)) crystal is a promising photonic material because of its excellent electro-optical and nonlinear optical effects. In this study, we introduces the application of ultra-precision ductile-mode cutting method to the fabrication of strongly confined LN ridged waveguides. As the result, ridged waveguides with ultra-smooth sidewalls (RMS: < 5 nm) were obtained in LN crystals. In addition, we demonstrated preparation of bonded LN thin films on Si substrates by transfer bonding in air for LN/Si hybrid photonic devices.

Free Research Field

光マイクロマシン, 異種材料低温接合, 光集積デバイス