Design and arrangement of the sensors for the detection with small volume of multiple types of gases

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K21225
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Electron device/Electronic equipment; Nano/Microsystems
• Research Institution: Kyushu Institute of Technology
• Principal Investigator: Murakami Sunao 九州工業大学, 大学院情報工学研究院, 助教 (90443499)
• Research Collaborator: ITO Takahiro 九州工業大学, 大学院情報工学研究院, 教授 (10367401) ; TOMIYAMA Naoto ; RIKIMARU Shinya
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: 弾性表面波デバイス / 3次元溝構造 / 素子分離 / センサ

Outline of Final Research Achievements

Surface acoustic wave (SAW) device has received much attention as the possible substitute for physical and chemical sensing. The device can be used for gas sensing when the sensitive films which can adsorb target gases are prepared on the surficial regions of the device. We have attempted to develop the sensor chips using the SAW devices with the three-dimensional microgaps as the detection elements for the sensors which can detect multiple types of gases simultaneously.

Free Research Field

マイクロデバイス、微細加工