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2008 Fiscal Year Final Research Report

New Microactuators Using Functional Fluids

Research Project

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Project/Area Number 16078205
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

YOKOTA Shinichi  Tokyo Institute of Technology, 精密工学研究所, 教授 (10092579)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Kazuhiro  東京工業大学, 精密工学研究所, 准教授 (00220632)
KIM Joon-wan  東京工業大学, 精密工学研究所, 助教 (40401517)
Co-Investigator(Renkei-kenkyūsha) TAKEMURA Kenjiro  慶應義塾大学, 理工学部, 講師 (90348821)
Project Period (FY) 2004 – 2008
Keywords機能性流体 / アクチュエータ / マイクロマシン / 流体デバイス
Research Abstract

本研究ではミリメートルサイズでパワー密度が高いマイクロアクチュエータの実現を目的とし, 機能性流体を用いたニューアクチュエータの具現化を行った. (1)高電圧の印加によって活発なジェット流を発生する電界共役流体(ECF)を駆動源としたマイクロアクチュエータ, (2)電圧印加による粘度変化で電気粘性流体(ERF)の流れを制御するフレキシブルERマイクロバルブとシリコーンゴムPDMSの液圧室から成るマイクログリッパ, (3)このERアクチュエータの駆動源として, マルチリードバルブを用いたマイクロポンプを開発した.

  • Research Products

    (45 results)

All 2009 2008 2007 2006 2005 2004

All Journal Article (25 results) (of which Peer Reviewed: 24 results) Presentation (13 results) Book (1 results) Patent(Industrial Property Rights) (6 results)

  • [Journal Article] A liquid rate gyroscope using electro-conjugate fluid2009

    • Author(s)
      Kenjiro Takemura, Shinichi Yokota, Mamoru Suzuki, Kazuya Edamura, Hideo Kumagai and Tsunehiko Imamura
    • Journal Title

      Sensors and Actuators A : Physical 149

      Pages: 173-179

    • Peer Reviewed
  • [Journal Article] 電界共役流体を用いたマイクロ液体レートジャイロの研究2009

    • Author(s)
      横田眞一, 鈴木守, 竹村研治郎, 枝村一弥, 熊谷秀夫, 今村恒彦
    • Journal Title

      日本機械学会論文集. C編 75

      Pages: 496-502

    • Peer Reviewed
  • [Journal Article] Integration of micro artificial muscle cells using electro-conjugate fluid2008

    • Author(s)
      Kenjiro Takemura, Fumiya Yajima, Kazuya Edamura, and Shinichi Yokota
    • Journal Title

      Sensors and Actuators A : Physical 144

      Pages: 348-353

    • Peer Reviewed
  • [Journal Article] Micro actuators by making use of jet flows due to electro-conjugate fluid2008

    • Author(s)
      Shinichi Yokota
    • Journal Title

      Mechanics Based Design of Structures and Machines 36

      Pages: 330-345

    • Peer Reviewed
  • [Journal Article] 電界共役流体(ECF)を応用した強制液冷用薄形平面ポンプ2008

    • Author(s)
      横田眞一, 吉田和弘
    • Journal Title

      日本フルードパワーシステム学会誌 39

      Pages: 277-280

  • [Journal Article] A micromotor using electro-conjugate fluid-Improvement of motor performance by using saw-toothed electrode series2007

    • Author(s)
      Kenjiro Takemura, Hiroto Kozuki, Kazuya Edamura, and Shinichi Yokota
    • Journal Title

      Sensors and Actuators A : Physical 140

      Pages: 131-137

    • Peer Reviewed
  • [Journal Article] Concept of a micro finger using electro-conjugate fluid and fabrication of a large model prototype2007

    • Author(s)
      Ryutaro Abe, Kenjiro Takemura, Kazuya Edamura and Shinichi Yokota
    • Journal Title

      Sensors and Actuators A : Physical 136

      Pages: 629-637

    • Peer Reviewed
  • [Journal Article] 均一系ER流体を用いたフレキシブルERマイクロアクチュエータ2007

    • Author(s)
      吉田和弘, 小木曽太郎, 横田眞一
    • Journal Title

      日本機械学会論文集 C 73

      Pages: 2508-2513

    • Peer Reviewed
  • [Journal Article] 電界共役流体により駆動されるミミズ型ぜん動駆動マイクロマシン2007

    • Author(s)
      横田眞一, 洪榮杓, 竹村研治郎, 枝村一弥
    • Journal Title

      日本ロボット学会誌 25

      Pages: 140-145

    • Peer Reviewed
  • [Journal Article] ECFジェット駆動マイクロフィンガの提案とラージモデルの特性評価2007

    • Author(s)
      横田眞一, 阿部竜太郎, 竹村研治郎, 枝村一弥
    • Journal Title

      日本フルードパワーシステム学会論文集 38

      Pages: 65-70

    • Peer Reviewed
  • [Journal Article] Concept of a Micro Finger using Electro-conjugate Fluid and Fabrication of a Large Mode Prototype2007

    • Author(s)
      Ryutaro Abe, Kenjiro Takemura, Kazuya Edamura and Shinichi Yokota
    • Journal Title

      Sensors & Actuators A 136

      Pages: 629-637

    • Peer Reviewed
  • [Journal Article] A High Perfromance Planar Pump Using Electro-Conjugate Fluid with Improved Electrode Patterns2007

    • Author(s)
      W.-S. Seo, K. Yoshida, S. Yokota and K. Edamura
    • Journal Title

      Sensors and Actuators A 134

      Pages: 606-614

    • Peer Reviewed
  • [Journal Article] Development and Control of a Micro Artificial Muscle Cell using Electro-conjugate Fluid2007

    • Author(s)
      Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Journal Title

      Sensors & Actuators A 133

      Pages: 493-499

    • Peer Reviewed
  • [Journal Article] ECFジェットによる発生圧力を応用したチューブ形ECFマイクロアクチュエータ2006

    • Author(s)
      阿部竜太郎, 横田眞一, 竹村研治郎, 枝村一弥
    • Journal Title

      日本フルードパワーシステム学会論文集 37・5

      Pages: 55-60

    • Peer Reviewed
  • [Journal Article] Concept of a Micro Gyroscope using Electro-conjugate Fluid (ECF) and Development of an ECF Micro Gyro-motor2006

    • Author(s)
      Shinichi Yokota, Ryuta Nishizawa, Kenjiro Takemura, Kazuya Edamura
    • Journal Title

      Journal of Robotics and Mechatronics 18・2

      Pages: 114-120

    • Peer Reviewed
  • [Journal Article] 電界共役流体(ECF)を用いたマイクロモータの高出力化2006

    • Author(s)
      横田眞一, 河村清美, 竹村研治郎, 枝村一弥
    • Journal Title

      電気学会論文誌 E 126・4

      Pages: 137-143

    • Peer Reviewed
  • [Journal Article] The Use of Liquid Crystals as Electrorheological Fluids in Microsystems : Model and Measurements2006

    • Author(s)
      M. De Volder, K. Yoshida, S. Yokota and D. Reynaerts
    • Journal Title

      J. of Micromechanics and Microengineering 16・3

      Pages: 612-619

    • Peer Reviewed
  • [Journal Article] フェライト粒子を用いたMR流体を作動流体とした制御弁2006

    • Author(s)
      吉田和弘, 高橋寛如, 朴重濠, 横田眞一, 河内仁, 枝村一弥
    • Journal Title

      日本機械学会論文集(C編) 72・714

      Pages: 457-463

    • Peer Reviewed
  • [Journal Article] A High-integrated Micromotor using Electro-conjugate Fluid (ECF)2005

    • Author(s)
      Shinichi Yokota, Kiyomi Kawamura, Kenjiro Takemura, and Kazuya Edamura
    • Journal Title

      Journal of Robotics and Mechatronics 17・2

      Pages: 142-148

    • Peer Reviewed
  • [Journal Article] Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid2005

    • Author(s)
      Kazuhiro Yoshida, Jung-Ho Park, Hiroshi Yano, Shinichi Yokota and Sonam Yun
    • Journal Title

      Journal of Sensors & Materials 17・3

      Pages: 97-112

    • Peer Reviewed
  • [Journal Article] 電界共役流体に発生するジェット流を用いたマイクロ人工筋アクチュエータ2005

    • Author(s)
      竹村研治郎, 横田眞一, 枝村一弥
    • Journal Title

      日本機械学会論文集(C) 71・708

      Pages: 2571-2577

    • Peer Reviewed
  • [Journal Article] MR流体を作動流体としたマイクロバルブ2005

    • Author(s)
      吉田和弘, 高松 環, 米田裕一, 横田眞一
    • Journal Title

      日本機械学会論文集(C) 71・708

      Pages: 1355-1360

    • Peer Reviewed
  • [Journal Article] A Study on High-Output Rsonance-Driven Piezoelectric Micopumps Using Active Check Valves2004

    • Author(s)
      J.-H. PARK, K. Yoshida, C. Ishikawa, S. Yokota, T. Seto, K. Takagi
    • Journal Title

      Journal of Robotics and Mechatronics 16・2

      Pages: 171-177

    • Peer Reviewed
  • [Journal Article] 管路慣性を応用したマイクロポンプの最適構造2004

    • Author(s)
      吉田和弘、鄭 淵午、瀬戸 毅、高城邦彦、朴 重濠、横田眞一
    • Journal Title

      日本機械学会論文集(C) 70・697

      Pages: 2668-2673

    • Peer Reviewed
  • [Journal Article] 積層DP-RE形ECFマイクロモータの高集積化2004

    • Author(s)
      横田眞一、桑嶋 崇、枝村一弥
    • Journal Title

      日本機械学会論文集 70・693

      Pages: 1463-1469

    • Peer Reviewed
  • [Presentation] A Liquid Rate Gyroscope using Electro-conjugate Fluid-Practical Design and Characterization2009

    • Author(s)
      Shinichi Yokota, Kenjiro Takemura, Mamoru Suzuki, Kazuya Edamura, Hideo Kumagai, Tsunehiko Imamura
    • Organizer
      IEEE/RSJ 2008 International Conference on Intelligent Robots and Systems (IROS 2008)
    • Place of Presentation
      Nice, France
    • Year and Date
      2009-09-25
  • [Presentation] A Liquid Rate Gyroscope Using Electro-Conjugate Fluid, Intelligent Sensors2008

    • Author(s)
      Shinichi Yokota, Tsunehiko Imamura, Kenjiro Takemura, Kazuya Edamura, Hideo Kumagai
    • Organizer
      Sensor Networks and Information Processing (ISSNIP2008)
    • Place of Presentation
      Sydney, Australia
    • Year and Date
      2008-12-17
  • [Presentation] ECF Microactuator with Needle-Ring Electrodes by MEMS Technology2008

    • Author(s)
      Joon-wan Kim, Yoshitsugu Ogawa, Shinichi Yokota, Kazuhiro Yoshida, Kazuya Edamura
    • Organizer
      12th International Conference on Mechatronics Technology (ICMT 2008)
    • Place of Presentation
      Sudbury, Ontario, Canada
    • Year and Date
      2008-10-15
  • [Presentation] A cell integrated ECF-jet driven artificial muscle actuator2008

    • Author(s)
      Fumiya YAJIMA, Kenjiro TAKEMURA, Shinichi YOKOTA, Kazuya EDAMURA
    • Organizer
      12th International Conference on Mechatronics Technology (ICMT 2008)
    • Place of Presentation
      Sudbury, Ontario, Canada
    • Year and Date
      2008-10-15
  • [Presentation] Miniaturized and High‐Powered Micro Pump Using Functional Fluid ECF2008

    • Author(s)
      Yutaka Tanaka, Masafumi Ebisawa, Shinichi Yokota, Kazuya Edamura
    • Organizer
      12th International Conference on Mechatronics Technology (ICMT 2008)
    • Place of Presentation
      Sudbury, Ontario, Canada
    • Year and Date
      2008-10-14
  • [Presentation] Mechatronics Coined by Tetsuro Mori2008

    • Author(s)
      Haruo Kozono, Shinichi Yokota, Tetsuro Mori
    • Organizer
      12th International Conference on Mechatronics Technology (ICMT 2008)
    • Place of Presentation
      Sudbury, Ontario, Canada
    • Year and Date
      2008-10-14
  • [Presentation] Proposition of an ER Microactuator with Inherent Position Feedback Mechanism2008

    • Author(s)
      Kazuhiro YOSHIDA, Kazuhito KAMIYAMA, Joon-wan KIM, Shinichi YOKOTA
    • Organizer
      the Seventh JFPS International Symposium on Fluid Power (ISFP 2008)
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2008-09-17
  • [Presentation] Earthworm type Robot driven by Electro-conjugate Fluid2008

    • Author(s)
      K. Takemura, Y. Hong, K. Edamura, S. Yokota
    • Organizer
      17th CISM-IFToMM Symposium on Robot Design, Dynamics, and Control (RoManSy 2008)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2008-07-06
  • [Presentation] Electrokinetic actuation of low conductivity dielectric liquids2008

    • Author(s)
      Rohan Raghavan, Jiaxing Qin, Leslie Y. Yeo, James R. Friend, Kenjiro Takemura, Shinichi Yokota, Kazuya Edamura
    • Organizer
      Proceedings of the Sixth International ASME Conference on Nanochannels, Microchannels and Minichannels
    • Place of Presentation
      Darmstadt, Germany
    • Year and Date
      2008-06-25
  • [Presentation] Forced Liquid Cooling System Using Thin Planar ECF Pump for High Power Electronic Chips2008

    • Author(s)
      S. Yokota, K. Yoshida, W.-S. Seo, K. Koizumi, J.-W. Kim, K. Edamura
    • Organizer
      ACTUATOR 2008
    • Place of Presentation
      Bremen, Germany
    • Year and Date
      2008-06-09
  • [Presentation] Concept of a liquid rate gyroscope using an electro-conjugate fluid2008

    • Author(s)
      Shinichi Yokota, Mamoru Suzuki, Kenjiro Takemura, Kazuya Edamura, Hideo Kumagai, Tsunehiko Imamura
    • Organizer
      2008 IEEE International Conference on Robotics and Automation (ICRA)
    • Place of Presentation
      Pasadena, Conference Center, Pasadena, CA, USA
    • Year and Date
      2008-05-21
  • [Presentation] New Microactuators Using Functional Fluids2008

    • Author(s)
      S. Yokota, K. Yoshida, and J-W. Kim
    • Organizer
      MEXT Grant-in-Aid for Scientific Research on Priority Areas, The 2nd International Symposium on Next-Generation Actuators Leading Breakthroughs
    • Place of Presentation
      APA Hotel & Resort Tokyo Bay Makuhari, Chiba, Japan
    • Year and Date
      2008-04-17
  • [Presentation] Micro-Actuators By Making Use Of Jet Flows Due To Electro-Conjugate Fluid2008

    • Author(s)
      Shinichi Yokota
    • Organizer
      3rd International Symposium on Multibody Systems and Mechatronics (MUSME 2008)
    • Place of Presentation
      San Juan, Argentine
    • Year and Date
      2008-04-09
  • [Book] アクチュエータ工学2004

    • Author(s)
      アクチュエータシステム技術企画委員会(横田眞一, 吉田和弘, 他)
    • Total Pages
      33-38, 42-51, 131-148, 186-194
    • Publisher
      (株)養賢堂
  • [Patent(Industrial Property Rights)] 流体レートジャイロ2008

    • Inventor(s)
      横田眞一, 他
    • Industrial Property Rights Holder
      東工大, 他
    • Industrial Property Number
      特願2008-132214
    • Filing Date
      2008-05-20
  • [Patent(Industrial Property Rights)] 流体レートジャイロ2008

    • Inventor(s)
      横田眞一, 他
    • Industrial Property Rights Holder
      東工大, 他
    • Industrial Property Number
      特願2008-138134
    • Filing Date
      2008-05-27
  • [Patent(Industrial Property Rights)] 熱拡散装置2008

    • Inventor(s)
      横田眞一, 他
    • Industrial Property Rights Holder
      東工大, 他
    • Industrial Property Number
      特願2008-297890
    • Filing Date
      2008-11-21
  • [Patent(Industrial Property Rights)] 放熱板2008

    • Inventor(s)
      横田眞一, 他
    • Industrial Property Rights Holder
      東工大, 他
    • Industrial Property Number
      特願2008-323661
    • Filing Date
      2008-12-19
  • [Patent(Industrial Property Rights)] 流体レートジャイロ2007

    • Inventor(s)
      横田眞一, 他
    • Industrial Property Rights Holder
      東工大, 他
    • Industrial Property Number
      特願2007-19859
    • Filing Date
      2007-11-21
  • [Patent(Industrial Property Rights)] 電気粘性流体アクチュエータ2007

    • Inventor(s)
      吉田和弘
    • Industrial Property Rights Holder
      東工大
    • Industrial Property Number
      特願2007-19859
    • Filing Date
      2007-07-31

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Published: 2010-06-10   Modified: 2016-04-21  

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