Nano Hand-Eye System for Simultaneous Imaging and Characterization of Nano Objects

2008 Fiscal Year Final Research Report

• Project/Area Number: 16101004
• Research Category: Grant-in-Aid for Scientific Research (S)
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: The University of Tokyo
• Principal Investigator: FUJITA Hiroyuki The University of Tokyo, 生産技術研究所, 教授 (90134642)
• Co-Investigator(Kenkyū-buntansha): HASHIGUCHI Gen 静岡大学, 電子工学研究所, 教授 (70314903)
• Co-Investigator(Renkei-kenkyūsha): ATAKA Manabu 東京大学, 生産技術研究所, 助手 (80302628) ; YOKOKAWA Ryuji 立命館大学, 理工学部, 講師 (10411216)
• Project Period (FY): 2004 – 2008
• Keywords: マイクロマシン / ナノ加工 / ナノワイヤ / 透過電子顕微鏡 / ナノマニピュレーション / 生体分子モータ

Research Abstract

現在大きな注目を浴びているナノテクノロジーに関して、電子顕微鏡でナノサイズの物体を観察しながら、マイクロマシンの超微細ピンセットなどを用いて物体を機械的に操作することに成功した。電気的特性や機械的な強度、変形などを測り、ナノサイズ特有の現象を数多く発見した。例えば、シリコンはマクロサイズでは極めて脆い材料だが、それで作ったナノワイヤを引っ張ると元の長さの20 倍まで伸びる超塑性を示した。

Research Products

• [Journal Article] Real-time transmission electron microscope observation of gold nanoclusters diffusing into silicon at room temperature (2009)
  • Author(s): Tadashi I sh ida, Yuuki Naka jima, Jun ji Endo
  • Journal Title: Dominique Collard and Hiroyuki Fujita, Nanotechnology Vol.20, No.6 Pages: 65705.1-6
  • Peer Reviewed
• [Journal Article] HAREM : High Aspect Ratio Etching and Metallization for microsystems fabrication (2008)
  • Author(s): E. Sarajlic, C.Yamahata, M. Cordero, D. Collard and H. Fujita
  • Journal Title: Journal of Micromechanics and Microengineering Vol.18, No.7 Pages: 075008 (8)
  • Peer Reviewed
• [Journal Article] Silicon Nanotweezers With Subnano meter Resolution for the Micromanipulation of Biomol eculesChr istophe Yamahata, Dominique Collard, Bernard Legrand, Tetsuya Takekawa (2008)
  • Author(s): Momoko Kumemura, Gen Hashiguchi, Hiroyuki Fujita
  • Journal Title: Journal of Microelectromechanical Systems Vol.17, No.3 Pages: 623-631
  • Peer Reviewed
• [Journal Article] Mechanically Controlled Quantum Contact With On-Chip MEMS Actuator (2007)
  • Author(s): Murat Gel, Tadashi Ishida, Tetsuo Akasaka, Akinori Umeno,Koji Araki,Kaz Hirakawa, Hiroyuki Fujita
  • Journal Title: IEEE Journalof Microelectromechanical Systems Vol.16, No.1 Pages: 1-6
  • Peer Reviewed
• [Journal Article] In situ Visualization of Degradation of Silicon Field Emitter Tips (2007)
  • Author(s): Naoyuki Nozawa, Kuniyuki Kakushima, Gen Hashiguchi, Hiroyuki Fujita
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Vol.2, No.3 Pages: 284-288
  • Peer Reviewed
• [Journal Article] MEMS方向探針による金ナノコンタクト接近-衝突-引張-破断実験のHRTEM観察と電流測定 (2006)
  • Author(s): 石田忠, 角嶋邦之, 藤田博之
  • Journal Title: 電気学会論文誌E, センサ・マイクロマシン準部門誌 Vol.126, No.9 Pages: 504-509
  • Peer Reviewed
• [Journal Article] Bulk micromachined tunneling tips integrated with positioning actuators (2005)
  • Author(s): M. Mita, H. Kawara, H. Toshiyoshi, J. Endo, H. Fujita
  • Journal Title: Journal of Microelectromechanical Systems Vol.14 Pages: 23-28
  • Peer Reviewed
• [Journal Article] パラレルAFMリソグラフィー用カンチレバーの製作 (2004)
  • Author(s): 角嶋邦之, 渡邉稔之, 島本浩司, 合田拓史.安宅学, 三村秀典, 磯野吉正, 橋原口, 三原豊, 藤田博之
  • Journal Title: 電気学会論文誌E, センサ・マイクロマシン準部門誌 Vol.124.No.7 Pages: 248-254
  • Peer Reviewed
• [Journal Article] Atomic Force Microscope Cantilever Array for Par allel Lithography of Quantum Devices (2004)
  • Author(s): Kuniyuki Kakushima, Toshiyuki Watanabe, Kouji Shimamoto, Takushi Gouda, Manabu Ataka, Hidenori Mimura, Yoshimasa Isono, GenHashiguchi, Yutaka Mihara, Hiroyuki Fujita
  • Journal Title: Japanese Journal of Applied Physics Vol.43, No.6B Pages: 4041-4044
  • Peer Reviewed
• [Presentation] Trapping and characterization of gelatin with nanotweezers (2008)
  • Author(s): M. Kumemura, D. Collard, C. Yamahata, M. Hosogi, G. Hashiguchi, and H. Fujita
  • Organizer: IUMRS International Conference in Asia
  • Place of Presentation: Nagoya, Japan
  • Year and Date: 20081200
• [Presentation] In - Situ TEMObservation Of Crystal-Facet-Dependent Self-Rearranging Gold Atoms Under Tensile Stress Controlled By MEMS Nsnoprobe Positioner (2007)
  • Author(s): Tadashi Ishida, Kuniyuki Kakushima, Makoto Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita
  • Organizer: the 14th International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers '07)
  • Place of Presentation: Lyon, France
  • Year and Date: 20070600
• [Patent(Industrial Property Rights)] 表面特性解析装置、表面特性解析方法およびプローブユニット (2006)
  • Inventor(s): 藤田博之, 橋口原
  • Industrial Property Rights Holder: 国立大学法人香川大学、国立大学法人東京大学
  • Industrial Property Number: 特願2006-270618
  • Filing Date: 2006-10-02