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2006 Fiscal Year Final Research Report Summary

Advanced Formation Technique of High Energy Parallel Synchrotron Microbeam with white Spectrum, and its Application to Visualization of Internal Structure of Electronic Devices and Biomaterials

Research Project

Project/Area Number 16360012
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKyushu Institute of Technology

Principal Investigator

CHIKAURA Yoshinori  Kyushu Institute of Technology, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (40016168)

Co-Investigator(Kenkyū-buntansha) SUZUKI Yoshifumi  Kyushu Institute of Technology, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (10206550)
Project Period (FY) 2004 – 2006
KeywordsSynchrotron Radiation / Microbeam / X-Ray Visuzlization / X-Ray Imaging / X-Ray Scattering Topography / X-Ray Topography
Research Abstract

In the third-generation synchrotron light source microbeam techniques are becoming increasingly used in various occasions of research. The present microbeam with microhole has unique characteristics such as being high energy, parallel and with white spectrum in comparison with other popular methods (those by KB mirror or two-dimensional asymmetric crystal-reflection)
In the present research project the microbeam technique has been successfully attained 5 micrometers in diameter and applied to the X-ray imaging of various type of internal structures (micro-imaging of individual defects such dislocation microdefects) in electronic devices. The visualization technique was also applied to imaging Biomedical materials.
For the domain structure observation of strontium titanate by microbeam scanning method, we determined the domain structure from the undistorted images of intensity and energy of X-rays diffracted from (100) plate. We also have obtained the lattice parameters a=0.3791 nm and C=0.3794 nm and the spontaneous strain c/a-1=7.9x10-4 at 30 K from the energy images.
The present microbeam technique was applied to X-ray visualization of lattice orientation distribution in C60-fullerene single crystals and GaN layer on GaAs (001)in plasma-assisted molecular beam epitaxy.
Besides focusing effect has been confirmed 3 μm in beam diameter to enable us to attain 1 μm resolution in the present scanning type micro-imaging of devices which takes advantages of high energy white and parallel micro beam, otherwise impossible.

  • Research Products

    (24 results)

All 2007 2006 2005 2004

All Journal Article (23 results) Book (1 results)

  • [Journal Article] Dislocation Elimination in Czochralski Silicon Crystal Growth Revealed by White X-Ray Topography Conbined wuth Topo-Tomographic Technique2007

    • Author(s)
      S.Kawado, S.Iida, K.Kajiwara, Y.Suzuki, Y.Chikaura
    • Journal Title

      Synchrotron Radiation Instrumentation CB879

      Pages: 1545-1549

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] X-ray reciprocal space maps and x-ray scattering topographic observation of GaN layer on GaAs (001) in plasma-assisted molecular Beam Epitaxy2007

    • Author(s)
      Y.Suzuki, M.Shinbara, H.Kii, Y.Chikaura
    • Journal Title

      J. Appl. Phys. 101・6

      Pages: 063516 1-5

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] X-ray reciprocal space maps and x-ray scattering topographic observation of GaN layer on GaAs (001) in plasma-assisted molecular Beam Epitaxy2007

    • Author(s)
      Y.Suzuki, M.Shinbara, H.Kii, Y.Chikaura
    • Journal Title

      J. Appl. Phys. 101

      Pages: 063516 1-5

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Sharper Image of Breast Cancer Cells and Stroma in Dense Breast Using Thinner Angular Filter under X-Ray Dark-Field Imaging2006

    • Author(s)
      M.Ando, H.Sugiyama, S.Ichihara, T.Endo, H.Bando, K.Yamasaki, Y.Chikaura, H.Esumi, A.Maksimenko, G.Li
    • Journal Title

      Jpn. J. Appl. Phys. 45・28

      Pages: L740-L743

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Sharper Image of Breast Cancer Cells and Stroma in Dense Breast Using Thinner Angular Filter under X-Ray Dark-Field Imaging2006

    • Author(s)
      M.Ando, H.Sugiyama, S.Ichihara, T.Endo, H.Bando, K.Yamasaki, Y.Chikaura, H.Esumi, A.Maksimenko, G.Li
    • Journal Title

      Jpn. J. Appl. Phys. 45

      Pages: L740-L743

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Plane Wave Synchrotron X-ray Topography Observation of Grown-in Microdefects in a Slowly Pulled CZ-Silicon Crystals2005

    • Author(s)
      S.Iida, S.Kawado, T.Maehama, K.Kajiwara, S.Kimura, J.Matsui, Y.Suzuki, Y.Chikaura
    • Journal Title

      J. Phys. D : Appl. Phys. 38

      Pages: A23-A27

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] New Topographic Method of Detecting Microdefects Using Weak-Beam Topography with White X-Rays2005

    • Author(s)
      K.Kajiwara, S.Kimura, Y.Chikaura
    • Journal Title

      Jpn. J. Appl. Phys. 44

      Pages: 4211-4212

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] White Microbeam X-Ray Spectro-Scattering Topography on the Domain Structure of Strontium Titanate2005

    • Author(s)
      K.Kajiwara, T.Ozaki, H.Sakaue, Y.Taketomi, Y.Chikaura
    • Journal Title

      Nucl. Instr. Methods in Physics Research B B238

      Pages: 248-250

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Three-dimensional structure of dislocations in silicon determined by synchrotron white x-ray topography combined with a topo-tomographic technique2005

    • Author(s)
      S.Kawado, T.Taishi, S.Iida, Y.Suzuki, Y.Chikaura, K.Kajiwara
    • Journal Title

      J. Phys. D : Appl.Phys. 38

      Pages: A17-A22

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Design of BL15 at Saga Light Source2005

    • Author(s)
      T.Okajima, Y.Chikaura, M.Tabata, H.Hashimoto, Y.Soejima, K.Hara, N.Hiramatsu
    • Journal Title

      Nucl. Instr. Methods in Physics Research B B 238

      Pages: 185-188

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] White beam X-ray topographic measurement of spontaneous strain in strontium titanate.2005

    • Author(s)
      T.Ozaki, K.Kusunose, H.Sakaue, H.Okamoto, K.Kajiwara, Y.Suzuki, Y.Chikaura
    • Journal Title

      Nucl. Instr. Methods in Physics Research B B 238

      Pages: 255-258

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Lattice Orientation Imaging of C_<60>-Fullerene Single Crystal with Microbeam-Scanning-Type X-ray Scattering Topography Using Charged-Coupled Device Detector2005

    • Author(s)
      Y.Suzuki, Y.Chikaura
    • Journal Title

      Jpn. J. Appl. Phys. 44 No. 12

      Pages: 8679-8683

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Three-dimensional structure of dislocations in silicon determined by synchrotron white x-ray topography combined with a topo-tomographic technique2005

    • Author(s)
      S.Kawado, T.Taishi, S.Iida, Y.Suzuki, Y.Chikaura, K.Kajiwara
    • Journal Title

      J. Phys. D : Appl. Phys. 38

      Pages: A17-A22

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Design of BL15 at Saga Light Source2005

    • Author(s)
      T.Okajima, Y.Chikaura, M.Tabata, H.Hashimoto, Y.Soejima, K.Hara, N.Hiramatsu
    • Journal Title

      Nucl. Instr. Methods in Physics Research B B238

      Pages: 185-188

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] White beam X-ray topographic measurement of spontaneous strain in strontium titanate.2005

    • Author(s)
      T.Ozaki, K.Kusunose, H.Sakaue, H.Okamoto, K.Kajiwara, Y.Suzuki, Y.Chikaura
    • Journal Title

      Nucl. Instr. Methods in Physics Research B B238

      Pages: 255-258

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Lattice Orientation Imaging of C60-Fullerene Single Crystal with Microbeam-Scanning-Type X-ray Scattering Topography Using Charged-Coupled Device Detector2005

    • Author(s)
      Y.Suzuki, Y.Chikaura
    • Journal Title

      Jpn. J. Appl. Phys. 44

      Pages: 8679-8683

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Determination of the three-dimensional structure of dislocations in silicon by synchrotron white X-ray topography combined with a topo-tomographic technique2004

    • Author(s)
      S.Kawado, T.Taishi, S.Iida, Y.Suzuki, Y.Chikaura, K.Kajiwara
    • Journal Title

      Journal of Synchrotron Radiation Vol. 11

      Pages: 304-308

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Observation of Silicon Front Surface Topographs of a ULSI-Wafer by Synchrotron X-ray Plane Wave2004

    • Author(s)
      Y.Suzuki, Y.Tsukasaki, K.Kajiwara, S.Kawado, S.Iida, Y.Chikaura
    • Journal Title

      Journal of Applied. Physics Vol.96 No. 12

      Pages: 6259-6261

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] The X-Ray Microscopy Project at SagaLS2004

    • Author(s)
      M.Yasumoto, K.Takemoto, E.Ishiguro, H.Kihara, T.Tomimasu, N.kamijo, Y.chikaura
    • Journal Title

      AIP Proceedings of Portable Synchrotron Light Source and Advanced Applications

      Pages: 152-155

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] White X-ray Topography combined with a Topo-Tomographic Technique for Determining Three-Dimensional Dislocation Structures in Silicon2004

    • Author(s)
      S.Kawado, S.Iida, Y.Chikaura
    • Journal Title

      SPring-8 Research Frontiers 2004

      Pages: 127-128

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Determination of the three-dimensional structure of dislocations in silicon by synchrotron white X-ray topography combined with a topo-tomographic technique2004

    • Author(s)
      S.Kawado, T.Taishi, S.Iida, Y.Suzuki, Y.Chikaura, K.Kajiwara
    • Journal Title

      Journal of Synchrotron Radiation 11

      Pages: 304-308

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Observation of Silicon Front Surface Topographs of a ULSI-Wafer by Synchrotron X-ray Plane Wave2004

    • Author(s)
      Y.Suzuki, Y.Tsukasaki, K.Kajiwara, S.Kawado, S.Iida, Y.Chikaura
    • Journal Title

      Journal of Applied. Physics 96

      Pages: 6259-6261

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] White X-ray Topography combined with a Topo-Tomographic Technique for Determining Three-Dimensional Dislocation Structures in Silicon2004

    • Author(s)
      S.Kawado, S.Iida, Y.Chikaura
    • Journal Title

      SPring-8 Research Frontiers

      Pages: 127-128

    • Description
      「研究成果報告書概要(欧文)」より
  • [Book] Digital Mammography (First Attempt at #D X-Ray Visualization of DCIS due to Refraction Contrast - In Good Relation to Pathological View)2006

    • Author(s)
      M.Ando, T.Akatsuka, H.Bando, Y.Chikaura, T.Endo, E.Hashimoto, K.Hirano, K.Hyodo, S.Ichihara, A.Maksimenko, C.Ohbayashi, H.Sugiyama, E.Ueno, K.Yamasaki, T.Yuasa
    • Total Pages
      8(525-532)
    • Publisher
      Springer-Verlag Berlin, Heiderberg
    • Description
      「研究成果報告書概要(和文)」より

URL: 

Published: 2008-05-27  

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