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2005 Fiscal Year Final Research Report Summary

Mesoscopic-scale dynamics of materials fracture and workability of silicon crystals

Research Project

Project/Area Number 16360316
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Physical properties of metals
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

HIGASHIDA Kenji  KYUSHU UNIVERSITY, Faculty of Eng., Dept.Mater.Sci.Eng., Associate Professor, 工学研究院, 助教授 (70156561)

Co-Investigator(Kenkyū-buntansha) NAKASHIMA Hideharu  KYUSHU UNIVERSITY, Interdisciplinary Graduate School of Engineering Science, Dept. of Molecular and Material Science, Professor, 大学院・総合理工学研究院, 教授 (80180280)
NOGUCHI Hiroshi  KYUSHU UNIVERSITY, Faculty of Eng., Dept.of Mechanics, Professor, 大学院・工学研究院, 教授 (80164680)
MORIKAWA Tatsuya  KYUSHU UNIVERSITY, Faculty of Eng., Dept.Mater.Sci.Eng., Research associate, 大学院・工学研究院, 助手 (00274506)
ARAMAKI Masatoshi  KYUSHU UNIVERSITY, Faculty of Eng., Dept.Mater.Sci.Eng., Research associate, 大学院・工学研究院, 助手 (50175973)
Project Period (FY) 2004 – 2005
Keywordscrack / dislocation / brittle-to-ductile transition / materials fracture / semiconductor / fracture toughness / crack-tip shielding / electron microscopy
Research Abstract

Mesoscopic-scale dynamics of materials fracture have been investigated based on the theory of crack-dislocation interaction. Particular attention has been paid on fracture and deformation behaviors in silicon single crystals.
Since silicon single crystals exhibit a sharp transition from brittle-to-ductile behavior in the narrow temperature range, they have attracted much attention as model crystals to understand the dislocation process for toughening crystalline materials. In this research, the nature of crack tip dislocations and their multiplication processes in silicon crystals have been examined by using high-voltage electron microscopy. The crack tip dislocations observed were characterized by matching their images to those simulated, and it was found that they were shielding type which increases fracture toughness of materials. In addition to this, three-point bending tests were made at high temperatures around 1100K in order to introduce dislocations around a crack tip. And crack … More tip stress fields were visualized by infrared photoelastic method in those silicon crystals deformed at high temperatures. By using this method, it was confirmed that the compressive stress field was formed around the crack tip by the introduction of dislocations, and that the compressive stress fields substantially increases the fracture toughness of silicon crystals. Further, the dislocation distribution was simulated by using the program code developed by Dr. Hartmaier, MPI, and the simulated photoelastic images using the calculated dislocation distribution were in good agreement with the observed images.
From the viewpoint of the research on the workability of silicon crystals, the effects of impurity and strain rate on the behavior of brittle-to-ductile transition was investigated. In this study, boron was added, which caused the increase of brittle-to-ductile transition temperature (BDTT). Based on the results of strain rate dependence of BDTT, activation energy for brittle-to-ductile transition was estimated, and the value estimated coincided well with the value of the activation energy of dislocation glide. Those results suggest that the problem of brittle-to-ductile transition and workability of silicon crystals are fundamentally discussed based on the theory of dislocation motion and the interaction between crack and dislocations. Less

  • Research Products

    (17 results)

All 2005 2004

All Journal Article (17 results)

  • [Journal Article] High-voltage electron-microscopical obserbation of crack-tip dislocations in silicon crystals2005

    • Author(s)
      M.Tanaka, K.Higashida
    • Journal Title

      Materials Science and Engineering A400-401

      Pages: 426-430

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] HVEM study of crack tip dislocations in silicon crystals2005

    • Author(s)
      K.Higashida, M.Tanaka, R.Onodera
    • Journal Title

      Materials Science Forum Vols.475-479

      Pages: 4043-4046

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] High-voltage electron-microscopical observation of crack-tip dislocations in silicon crystals2005

    • Author(s)
      M.Tanaka, K.Higashida
    • Journal Title

      Materials Science and Engineering A400-401

      Pages: 426-430

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] HVEM characterization of crack tip dislocations in silicon crystals2004

    • Author(s)
      M.Tanaka, K.Higashida
    • Journal Title

      Journal of Electron Microscopy Vol.53,No.4

      Pages: 353-360

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] HVEM study of crack-tip dislocations in Si crystals prepared by FIB and twin-blade cutting method2004

    • Author(s)
      M.Tanaka, K.Higashida, T.Fukui, t.Yokote
    • Journal Title

      Journal of Electron Microscopy Vol.53,No.5

      Pages: 505-509

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 3D Structures of Crack-Tip Dislocations in Silicon Revealed by HVEM2004

    • Author(s)
      K.Higashida, M.Tanaka
    • Journal Title

      Proceedings of the 25th Risoe International Symposium on Materials Science : Evolotion of Deformation Microstructures in 3D, Editors : C. Gundlach et. al., Risoe National Laboratory, Roskide, Denmar

      Pages: 337-342

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] シリコン結晶における破壊靭性値の方位依存性と表面エネルギー2004

    • Author(s)
      田中将己, 東田賢二, 中島英治, 高木秀有, 藤原雅美
    • Journal Title

      日本金属学会誌 第68巻9号

      Pages: 787-791

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Crack Tip Stress Fields Revealed by Infrared Photoelasticity in Silicon Crystals2004

    • Author(s)
      K.Higashida, M.Tanaka, E.Matsunaga, H.Hayashi
    • Journal Title

      Materials Science and Engineering A387-389

      Pages: 377-380

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Microstructure of plastic zones around crack tips in silicon revealed by HVEM and AFM2004

    • Author(s)
      M.Tanaka, K.Higashida, T.Haraguchi
    • Journal Title

      Materials Science and Engineering A387-389

      Pages: 433-437

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] HVEM/AFM Studies on Crack Tip Plasticity in Si Crystals2004

    • Author(s)
      K.Higashida, M.Tanaka
    • Journal Title

      Solid Mechanics and Its Application Vol.115,Proc. of IUTAM Symposium on Mesoscopic Dynamics on Fracture Process and Materials Strength, Ed. by H. Kitagawa and Y. Shibutani, Kluwer Academic Publ., Dordrecht

      Pages: 153-162

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Crack Tip Stress Fields Revealed by Infrared Photoelasticity in Silicon Crystals2004

    • Author(s)
      K.Higashida, M.Tanaka, E.Matsunaga, H.Hayashi
    • Journal Title

      Materials Science and Engineering A Vol.387-389

      Pages: 377-380

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Microstructure of plastic zones around crack tips in silicon revealed by HVEM and AFM2004

    • Author(s)
      M.Tanaka, K.Higashida, T.Haraguchi
    • Journal Title

      Materials Science and Engineering A Vol.387-389

      Pages: 433-437

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] HVEM characterization of crack tip dislocations in silicon crystals2004

    • Author(s)
      M.Tanaka, K.Higashida
    • Journal Title

      Journal of Electron Microscopy Vol.53, No.4

      Pages: 353-360

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Fracture Toughness Evaluated by Indentation Methods and Its Relation to Surface Energy in Silicon Single Crystals2004

    • Author(s)
      M.Tanaka, K.Higashida, H.Nakashima, H.Takagi, M.Fujiwara
    • Journal Title

      Journal of Japan Institute of Metals 68

      Pages: 787-791

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] HVEM study of crack-tip dislocations in Si crystals prepared by FIB and twin-blade cutting method2004

    • Author(s)
      M.Tanaka, K.Higashida, T.Fukui, T.Yokote
    • Journal Title

      Journal of Electron Microscopy Vol.53, No.4

      Pages: 505-509

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] HVEM/AFM Studies on Crack Tip Plasticity in Si Crystals2004

    • Author(s)
      K.Higashida, M.Tanaka
    • Journal Title

      Solid Mechanics and Its Application (Proc.of IUTAM Symposium on Mesoscopic Dynamics on Fracture Process and Materials Strength) (Ed.by H.Kitagawa and Y.Shibutani) (Kluwer Academic Publ., Dordrecht) Vol.115

      Pages: 153-162

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] 3D Structures of Crack-Tip Dislocations in Silicon Revealed by HVEM2004

    • Author(s)
      K.Higashida, M.Tanaka
    • Journal Title

      Proc.of the 25th Riso International Symposium on Materials Science : Evolution of Deformation Microstructures in 3D (Ed.C.Gundlach et al.) (Riso National Laboratory, Roskide, Denmark)

      Pages: 337-342

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2007-12-13  

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