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2005 Fiscal Year Final Research Report Summary

Research on a Frequency-Change-Type High-Sensitivity MEMS Acceleration Sensor

Research Project

Project/Area Number 16560043
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionIshinomaki Senshu University

Principal Investigator

SUGAWARA Sumio  Ishinomaki Senshu University, Faculty of Science and Technology, Professor, 理工学部, 教授 (00007197)

Co-Investigator(Kenkyū-buntansha) KUDO Subaru  Ishinomaki Senshu University, Department of Science and Technology, Assistant Professor, 理工学部, 助教授 (20214968)
Project Period (FY) 2004 – 2005
Keywordsacceleration sensor / single crystal silicon / MEMS / force sensor / bending vibrator / axial force / finite element analysis / resonance freouency change
Research Abstract

A high-sensitivity MEMS acceleration sensor utilizing the resonance frequency change of a bending vibrator is developed in this research. The sensor element is designed by using the finite element method, and manufactured for trial. The obtained results are summarized as follows.
1.Piezoelectric Bending Vibrator as High Sensitivity Force Sensor
(1)The newly-developed bending vibrator made of single crystal silicon acts as a high-sensitivity force sensor, and the first out-of-plane mode of vibration is driven electrically by using the sandwich structure consisting of Au upper electrode, PZT piezoelectric film and Ag lower electrode on the central arm of the vibrator.
(2)The upper electrode was divided into two parts, and these are used for driving and monitoring respectively
2.Construction and Characteristics of Acceleration Sensor
(1)The sensor element is constructed by combination of the vibrator, mass, support bars and frame for clamping, and is used as a 1-axis sensor for detection of acceleration along the y axis.
(2)The bent-type support bars are used for high-sensitivity because of small support stiffness.
(3)The volume of sensor element is about 4.0 × 4.8 × 0.5 mm^3.
(4)The effect of acceleration along the z axis is about 0.15%, and the value along the x axis is almost 0%.
(5)The resonance frequency of the sensor element was estimated about 23.1825kHz experimentally.
(6)The sensor sensitivity obtained experimentally is about 4,000ppm/G.
(7)The sensor is also applied to an inclination angle sensor around the x axis by use of gravity.
The acceleration sensor can be also realized by piezoelectric single crystals. Therefore good temperature characteristic and high efficient drive will be expected. The sensor structures for detection of multi-axis acceleration and for combination with another sensor may be devised in the future.

  • Research Products

    (16 results)

All 2006 2005 2004

All Journal Article (16 results)

  • [Journal Article] 周波数変化型2軸加速度センサの構成について2006

    • Author(s)
      菅原 澄夫
    • Journal Title

      平成18年度東北地区若手研究者研究発表会論文集 No.YS-4-58

      Pages: 115-116

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 単結晶シリコン加速度センサの新構成 -横振動子の軸力による共振周波数変化を利用したMEMS加速度センサの実現を目指して-2006

    • Author(s)
      菅原 澄夫
    • Journal Title

      超音波TECHNO Vol.18,No.1

      Pages: 20-24

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Structure of Frequency-Change-Type 2-Axis Acceleration Sensor2006

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Proc.2006 Tohoku-Aria Young-Researcher Meet.[in Japanese] No.YS-4-58

      Pages: 115-116

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] New Structure of Single Crystal Silicon Acceleration Sensor - Realization of MEMS Acceleration Sensor Utilizing Resonance Frequency Change of Bending Vibrator by Axial Force -2006

    • Author(s)
      Sumio.Sugawara
    • Journal Title

      Ultrason.Techno[in Japanese] Vol.18, No.1

      Pages: 20-24

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] 単結晶シリコン加速度センサの有限要素法による構造設計2005

    • Author(s)
      菅原 澄夫
    • Journal Title

      第26回超音波エレクトロニクスの基礎と応用に関するシンポジウム講演論文集 No.P1-17,11月

      Pages: 71-72

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 単結晶シリコン加速度センサの有限要素法解析2005

    • Author(s)
      菅原 澄夫
    • Journal Title

      日本音響学会講演論文集(II) No.3P-9,9月

      Pages: 1271-1272

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 軸力による周波数変化を利用した加速度センサの諸特性2005

    • Author(s)
      菅原 澄夫
    • Journal Title

      日本音響学会講演論文集(II) No.3-P-8,9月

      Pages: 1269-1270

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Structure Design of Single Crystal Silicon Acceleration Sensor Using Finite Element Method2005

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Proc.Symp.Ultrason.Electron.[in Japanese] Vol.26 No.P1-17

      Pages: 71-72

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Finite element Analysis of Single Crystal Silicon Acceleration Sensor2005

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Acoust.Soc.Jpn, Proc.Autumn Meet.[in Japanese] No.3-P-9

      Pages: 1271-1272

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Characteristics of Acceleration Sensor Utilizing Frequency Change by Axial Force2005

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Acoust.Soc.Jpn, Proc.Autumn Meet.[in Japanese] No.3-P-8

      Pages: 1269-1270

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] 単結晶シリコン加速度センサの構成2004

    • Author(s)
      菅原 澄夫
    • Journal Title

      第25回超音波エレクトロニクスの基礎と応用に関するシンポジューム講演予稿集 No.P2-14,11月

      Pages: 185-186

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 周波数変化型シリコン加速度センサにおける支持固定法の検討2004

    • Author(s)
      菅原 澄夫
    • Journal Title

      日本音響学会講演論文集(II) No.2-9-12 9月

      Pages: 1201-1202

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Experimental consideration of Acceleration Sensor Utilizing Resonance Frequency Change of Flexural Vibrator2004

    • Author(s)
      Jun Takahashi
    • Journal Title

      Jpn. J. Appl. Phys. Vol.43, Part 1, No.5B

      Pages: 3035-3039

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Construction of Single Crystal Silicon Acceleration Sensor2004

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Proc.Symp.Ultrason.Electron.[in Japanese] Vol.25, No.P2-14

      Pages: 185-186

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Consideration of the Support Method of a Resonance Frequency Shift Type Acceleration Sensor2004

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Acoust.Soc.Jpn, Proc.of Autumn Meet.[in Japanese] No.2-9-12

      Pages: 1201-1202

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Experimental Consideration of Acceleration Sensor Utilizing Resonance Frequency Change of Flexural Vibrator2004

    • Author(s)
      Jun Takahashi
    • Journal Title

      Jpn.J.Appl.Phys. Vol.43, Part 1, No.5B

      Pages: 3035-3039

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2007-12-13  

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