2018 Fiscal Year Final Research Report
Wide range radical production by atmospheric pressure microwave plasma with molecular gas and applications
| Project/Area Number |
16H03893
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma electronics
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| Research Institution | Nagoya University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
鈴木 陽香 名古屋大学, 工学研究科, 助教 (80779356)
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| Research Collaborator |
Tamura Yuto
Yamamoto Masaki
Inomata Yaoki
Koike Yusuke
Baba Hiroki
Ishikawa Shota
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| Project Period (FY) |
2016-04-01 – 2019-03-31
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| Keywords | 大気圧プラズマ / マイクロ波プラズマ / プラズマ加工 |
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| Outline of Final Research Achievements |
Microwave plasmas have been used in various industrial areas. In this study, meter-length microwave atmospheric pressure plasma inside meter-length slot was studied, especially fosucing on the discharge using molecular gases. Through this study, 50cm pure N2 plasma was successfully produced. This result strongly suggests application of this plasma source for various surface modification in large area.
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| Free Research Field |
プラズマエレクトロニクス
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| Academic Significance and Societal Importance of the Research Achievements |
本研究は、従来より非常に困難であった大面積大気圧プラズマ処理技術を実現するものであり、本研究の成果により、高密度マイクロ波プラズマを用いて分子ガスプラズマ処理の実現を可能とする道筋が描かれた。この成果は今後の様々な電子デバイス製造プロセス分野などでの製造プロセスに革新をもたらす重要な成果と考えている。
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