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2018 Fiscal Year Final Research Report

Creation of electron beam irradiated solution plasma and its application to surface modification process

Research Project

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Project/Area Number 16H04506
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Composite materials/Surface and interface engineering
Research InstitutionThe University of Tokyo

Principal Investigator

Terashima Kazuo  東京大学, 大学院新領域創成科学研究科, 教授 (30176911)

Project Period (FY) 2016-04-01 – 2019-03-31
Keywordsプラズマ / ソリューションプラズマ / 電子線励起プラズマ / 電子線励起ソリューションプラズマ / 表面処理プロセス / 微粒子 / 材料プロセス
Outline of Final Research Achievements

In this study, we created an electron beam simulated solution plasma and applied it to the surface treatment process. With regard to the former, generation of new field emission dielectric barrier discharge in high density media such as high pressure, liquid and supercritical fluid, voltage / current characteristics, and spectroscopic measurement were conducted to clarify its characteristics. In addition, the calculation simulation revealed the likelihood of qualitative behavior regarding the dependence of the firing voltage on the media generation of the discharge. In addition, by using carbon nanotubes as electrodes, we succeeded in generating stable plasma in a high density environment including supercritical and liquid. In addition, as an application of this plasma process, we succeeded in handling and deposition of fine particles.

Free Research Field

プラズマ材料科学

Academic Significance and Societal Importance of the Research Achievements

本研究の成果は近年注目を浴びている、液中をはじめとする高圧、超臨界流体中での放電、放電プラズマの新しいモードの学理の構築の第一歩の基礎研究として、また、それらを用いたプラズマ表面処理技術への応用展開の第一歩として意義の深いものである。今後、これらの基礎科学の進展とともに、液中をはじめとする高圧、超臨界流体などの高密度環境中での放電、放電プラズマの利用が飛躍的に容易になるとともに医療、環境、材料、エネルギー、燃焼といtった滝の分野に渡るプラズマ応用範囲の広がりを大いに期待させる研究となっている。

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Published: 2020-03-30  

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