A Scalable Time-Domain Sensor Integrated Circuit for High-Resolution Bioimaging

2017 Fiscal Year Annual Research Report

• Project/Area Number: 16H06088
• Research Institution: Nagoya University
• Principal Investigator: 新津 葵一 名古屋大学, 工学研究科, 講師 (40584785)
• Project Period (FY): 2016-04-01 – 2020-03-31
• Keywords: 電子デバイス・機器 / バイオイメージング / 集積回路 / バイオデバイス / デバイス設計・製造プロセス / IoT / 回路設計 / スマートセンサ

Outline of Annual Research Achievements

本年度の研究においては、半導体集積回路製造プロセスの微細化に伴って空間・数値解像度向上が可能（スケーラブル）なバイオセンサ集積回路を実現するための手法の改良ならびに実証を行った。昨年度の結果を踏まえて更なる性能向上ならびにその実デバイス上での実証を目指して研究を行った。半導体集積回路製造プロセスを用いたバイオセンサ集積回路の空間・数値解像度向上を実現することで、生命科学の発展や医療技術の向上への貢献が見込まれるため、更なる性能向上により、より顕著な貢献が期待できる。
スケーラブルなバイオセンサ集積回路のアーキテクチャとしてログドメインの時間デジタル変換回路技術を昨年度において着想し、実デバイス上での実証に成功したが、さらなる性能向上を目指してセンサフロントエンドならびに電極部分との融合を実施した。昨年度は入力信号は電気信号であったが、今年度においては溶液を介してのバイオ信号での入力が可能となる電極部分を含めた技術の検証を行い、より実用に近いデバイスの作成を行った。
センサフロントエンドとして、空間分解能の向上を目指してキャパシタのない電流モード型アナログ・時間変換回路を新たに提案して、空間分解能向上においてボトルネックとなっていたキャパシタの面積削減に成功した。キャパシタのような受動素子は微細化によって性能向上が見込めない（スケーラブルでない）要素回路であるため、キャパシタの無い回路構成を実現したことでセンサフロントエンド回路部分のスケーラビリティが飛躍的に向上した。
初めに計算機上での回路シミュレーションで性能向上を確認した。回路動作を確認後に、実際の半導体集積回路製造プロセスで実デバイス集積回路の試作を行い、評価を行った。昨年度と同様、社会実装を見据えて広く普及している半導体集積回路製造プロセスを選定した。評価を行ったところ、信号出力が確認できた。

Current Status of Research Progress

1: Research has progressed more than it was originally planned.

Reason

当初においては、回路構成においてキャパシタの無いものは計画できていなかったが、新たな着想を得て新規の回路構成を実現できたため。

Strategy for Future Research Activity

更なる性能向上を進めるとともに、学術的な貢献も目指して集積回路設計理論の体系としてまとめてゆきたい。

Research Products

• [Journal Article] A 40 GHz fully integrated circuit with a vector network analyzer and a coplanar-line-based detection area for circulating tumor cell analysis using 65 nm CMOS technology (2018)
  • Author(s): Taiki Nakanishi, Maya Matsunaga, Atsuki Kobayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: Japanese Journal of Applied Physics Volume: 57 Pages: 03EC01～03EC01
  • DOI: 10.7567/JJAP.57.03EC01
• [Journal Article] Design trade-off between spatial resolution and power consumption in CMOS biosensor circuit based on millimeter-wave LC oscillator array (2018)
  • Author(s): Maya Matsunaga, Atsuki Kobayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: Japanese Journal of Applied Physics Volume: 57 Pages: 03EC02～03EC02
  • DOI: 10.7567/JJAP.57.03EC02
  • Peer Reviewed
• [Journal Article] Wafer-scale development and experimental verification of 0.36 mm2 228 mV open-circuit-voltage solid-state CMOS-compatible glucose fuel cell (2018)
  • Author(s): Shigeki Arata, Kenya Hayashi, Yuya Nishio, Atsuki Kobayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: Japanese Journal of Applied Physics Volume: 57 Pages: 04FM04～04FM04
  • DOI: 10.7567/JJAP.57.04FM04
  • Peer Reviewed
• [Journal Article] A Self-Powered Supply-Sensing Biosensor Platform Using Bio Fuel Cell and Low-Voltage, Low-Cost CMOS Supply-Controlled Ring Oscillator With Inductive-Coupling Transmitter for Healthcare IoT (2018)
  • Author(s): Kiichi Niitsu, Atsuki Kobayashi, Kenya Hayashi, Yuya Nishio, Kei Ikeda, Takashi Ando, Yudai Ogawa, Hiroyuki Kai, Matsuhiko Nishizawa, and Kazuo Nakazato
  • Journal Title: IEEE Transactions on Circuits and Systems I: Regular Papers Volume: 65 Pages: 1-13
  • DOI: 10.1109/TCSI.2018.2791516
  • Peer Reviewed / Open Access
• [Journal Article] Sub-1-V CMOS-Based Electrophoresis Using Electroless Gold Plating for Small-Form-Factor Biomolecule Manipulation (2017)
  • Author(s): Yuuki Yamaji, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: IEICE Transactions on Electronics Volume: E100.C Pages: 592～596
  • DOI: 10.1587/transele.E100.C.592
  • Peer Reviewed
• [Journal Article] Design and Analysis of Scalability in Current-Mode Analog-to-Time Converter for an Energy-Efficient and High-Resolution CMOS Biosensor Array (2017)
  • Author(s): Kei Ikeda, Atsuki Kobayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: IEICE Transactions on Electronics Volume: E100.C Pages: 597～601
  • DOI: 10.1587/transele.E100.C.597
  • Peer Reviewed
• [Journal Article] A Current-Integration-Based CMOS Amperometric Sensor with 1024 × 1024 Bacteria-Sized Microelectrode Array for High-Sensitivity Bacteria Counting (2017)
  • Author(s): Kohei Gamo, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: IEICE Transactions on Electronics Volume: E100.C Pages: 602～606
  • DOI: 10.1587/transele.E100.C.602
  • Peer Reviewed
• [Journal Article] Design and electrochemical measurement of a current-mode analog-to-time converter with short-pulse output capability using local intra-cell activation for high-speed time-domain biosensor array (2017)
  • Author(s): Kei Ikeda, Atsuki Kobayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: Analog Integrated Circuits and Signal Processing Volume: 92 Pages: 403～413
  • DOI: 10.1007/s10470-017-1003-6
  • Peer Reviewed
• [Journal Article] Theoretical analysis and simulation study of low-power CMOS electrochemical impedance spectroscopy biosensor in 55 nm deeply depleted channel technology for cell-state monitoring (2017)
  • Author(s): Keisuke Itakura, Keisuke Kayano, Kazuo Nakazato and Kiichi Niitsu
  • Journal Title: Japanese Journal of Applied Physics Volume: 57 Pages: 01AG02～01AG02
  • DOI: 10.7567/jjap.57.01ag02
  • Peer Reviewed
• [Journal Article] Design and Experimental Verification of a 0.19 V 53 μW 65 nm CMOS Integrated Supply-Sensing Sensor With a Supply-Insensitive Temperature Sensor and an Inductive-Coupling Transmitter for a Self-Powered Bio-sensing System Using a Biofuel Cell (2017)
  • Author(s): Atsuki Kobayashi, Kei Ikeda, Yudai Ogawa, Hiroyuki Kai, Matsuhiko Nishizawa, Kazuo Nakazato, and Kiichi Niitsu
  • Journal Title: IEEE Transactions on Biomedical Circuits and Systems (TBioCAS) Volume: 11 Pages: 1313～1323
  • DOI: 10.1109/TBCAS.2017.2735447
  • Peer Reviewed / Open Access
• [Journal Article] CMOS技術を用いたバイオセンサ集積回路 (2017)
  • Author(s): 新津葵一、中里和郎
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 137 Pages: 291～295
  • DOI: 10.1541/ieejsmas.137.291
• [Presentation] A 350-mV, Under-200-ppm Allan Deviation Floor Gate-Leakage-Based Timer Using an Amplifier-Less Replica-Bias Switching Technique in 55-nm DDC CMOS (2018)
  • Author(s): Atsuki Kobayashi, Yuya Nishio, Kenya Hayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Organizer: IEEE Custom Integrated Circuit Conference (CICC 2018)
  • Int'l Joint Research
• [Presentation] An AI-Enhanced Blood Glucose Sensing System Using Machine Learning Based on Recurrent Neural Network for Hypoglycemia Prevention (2018)
  • Author(s): Takuyoshi Doike and Kiichi Niitsu
  • Organizer: Proc. 10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nano materials (ISPlasma2018)
  • Int'l Joint Research
• [Presentation] 低消費電力CMOS集積回路システムとバイオ発電素子を用いた電力自立発電センシング一体型集積血糖センサによる糖尿病医療・予防革新～ヘルスケアIoT開発国プロ成果の社会実装に向けて～ (2018)
  • Author(s): 新津葵一
  • Organizer: 電子情報通信学会総合大会
  • Invited
• [Presentation] Study on relationship between inductance and power consumption in bio integrated sensor circuit based on LC-oscillator using millimeter wave (2017)
  • Author(s): Maya Matsunaga, Atsuki Kobayashi, Kazuo Nakazato and Kiichi Niitsu
  • Organizer: International Conf. on Molecular Electronics and Bioelectronics (M&BE9)
  • Int'l Joint Research
• [Presentation] A Fully Integrated CMOS Millimeter Wave Biosensor Circuit with An On-Chip Vector Network Analyzer for Circulating Tumor Cell (CTC) Analysis (2017)
  • Author(s): Taiki Nakanishi, Atsuki Kobayashi, Kazuo Nakazato and Kiichi Niitsu
  • Organizer: International Conf. on Molecular Electronics and Bioelectronics (M&BE9)
  • Int'l Joint Research
• [Presentation] Enhancement of Open Circuit Voltage and Power of Implantable CMOS-Compatible Glucose Fuel Cell by Employing Pt-Supported on Nanographene in Anodic Catalyst (2017)
  • Author(s): Kiichi Niitsu, Takashi Ando, Tomoki Amano, Atsuki Kobayashi, Keigo Takeda, Hiroki Kondo, Masaru Hori, and Kazuo Nakazato
  • Organizer: International Conf. on Molecular Electronics and Bioelectronics (M&BE9)
  • Int'l Joint Research
• [Presentation] Wafer-Scale Development of 0.36 mm^2 228mV Open-Circuit-Voltage Solid-State CMOS-Compatible Glucose Fuel Cell for Healthcare IoT Application (2017)
  • Author(s): Shigeki Arata, Kenya Hayashi, Yuya Nishio, Atsuki Kobayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Organizer: International Conference on Solid State Devices and Materials (SSDM 2017)
  • Int'l Joint Research
• [Presentation] Application of Magnetic Arrangement of Microbeads for CMOS Biosensor Array Sensitivity (2017)
  • Author(s): Eizo Ushijima, Satoshi Fujimoto, Kiichi Niitsu, and Kazuo Nakazato
  • Organizer: IEEE Biomedical Circuits and Systems Conference (BioCAS 2017)
  • Int'l Joint Research
• [Presentation] A Fully-Integrated Circulating Tumor Cell Analyzer Using an on-Chip Vector Network Analyzer and a Transmission-Line-Based Detection Window in 65-nm CMOS (2017)
  • Author(s): Taiki Nakanishi, Maya Matsunaga, Atsuki Kobayashi, Kazuo Nakazato and Kiichi Niitsu
  • Organizer: IEEE Biomedical Circuits and Systems Conference (BioCAS 2017)
  • Int'l Joint Research
• [Presentation] Three-Dimensional Millimeter-wave Frequency-shift-based CMOS Biosensor Using Vertically Stacked LC Oscillators (2017)
  • Author(s): Maya Matsunaga, Taiki Nakanishi, Atsuki Kobayashi, Kazuo Nakazato, and Kiichi Niitsu
  • Organizer: IEEE Nordic Circuits and Systems Conference (NorCAS 2017)
  • Int'l Joint Research
• [Presentation] A Scalable Time-Domain Biosensor Array Using a Capacitor-Less CMATC and Logarithmic Cyclic Time-Attenuation-Based TDC with Discharge Acceleration for High-Spatial-Resolution Bio-Imaging (2017)
  • Author(s): Kei Ikeda, Atsuki Kobayashi, and Kiichi Niitsu
  • Organizer: IEEE International Conference on Electronics, Circuits and Systems (ICECS 2017)
  • Int'l Joint Research
• [Presentation] A 28um^2, 0.11Hz, 4.5pW Gate Leakage Timer Using Differential Leakage Technique in 55nm DDC CMOS for Small-Footprint, Low-Frequency and Low-Power Timing Generatio (2017)
  • Author(s): Yuya Nishio, Atsuki Kobayashi, and Kiichi Niitsu
  • Organizer: IEEE International Conference on Electronics, Circuits and Systems (ICECS 2017)
  • Int'l Joint Research
• [Presentation] A HIGH-DENSITY INTEGRATED ODORANT SENSOR ARRAY SYSTEM BASED ON INSECT CELLS EXPRESSING INSECT ODORANT RECEPTORS (2017)
  • Author(s): Sanato Nagata, Norifumi Kameshiro, Daigo Terutsuki, Hidefumi Mitsuno, Takeshi Sakurai, Kiichi Niitsu, Kazuo Nakazato, Ryohei Kanzaki, and Masahiko Ando
  • Organizer: IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018)
  • Int'l Joint Research
• [Presentation] CMOS Bioelectronics for Healthcare and Bio-Analysis IoT (2017)
  • Author(s): Kiichi Niitsu
  • Organizer: Emerging Technologies: Communications, Microsystems, Optoelectronics, Sensors (ET CMOS)
  • Int'l Joint Research / Invited
• [Presentation] CMOS集積回路とプラズマ科学による次世代バイオセンシング (2017)
  • Author(s): 新津 葵一
  • Organizer: 第22回 プラズマ医療 サイエンスの扉
  • Invited
• [Presentation] An Energy-Autonomous, Low-Cost Biosensing Platform Using Supply-Sensing CMOS Integrated Sensor and Bio Fuel Cell for Next-Generation Healthcare IoT (2017)
  • Author(s): Kiichi Niitsu
  • Organizer: Annual World Congress of Nano Science and Technology 2017 (Nano S&T 2017)
  • Int'l Joint Research / Invited
• [Presentation] バイオ発電素子と低消費電力CMOS集積回路を用いた 電力自立・発電センシング一体型集積センサ (2017)
  • Author(s): 新津葵一
  • Organizer: 第34回 センサ・マイクロマシンと応用システム
  • Invited
• [Book] Energy-Autonomous Supply-Sensing Biosensor Platform Using CMOS Electronics and Biofuel Cells (Chapter in Smart Sensors at the IoT Frontier) (2017)
  • Author(s): Kiichi Niitsu
  • Total Pages: 4
  • Publisher: Springer International Publishing
• [Remarks] 研究代表者の研究成果紹介ページ
  • URL: https://www.niitsulab.info
• [Remarks] 研究代表者の研究グループ紹介ページ
  • URL: http://www.nuee.nagoya-u.ac.jp/labs/nakazatolab/