Revolutionary heat phonon engineering based on advanced graphene NEMS technology

2017 Fiscal Year Final Research Report

• Project/Area Number: 16K13650
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Nano/Microsystems
• Research Institution: Japan Advanced Institute of Science and Technology
• Principal Investigator: MIZUTA HIROSHI 北陸先端科学技術大学院大学, 先端科学技術研究科, 教授 (90372458)
• Co-Investigator(Renkei-kenkyūsha): MURUGANATHAN Manoharan 北陸先端科学技術大学院大学, 先端科学技術研究科, 講師 (20639322)
• Research Collaborator: SCHMIDT Edward Marek 北陸先端科学技術大学院大学, 先端科学技術研究科, 博士研究員 ; HAQUE Mayeesha Masrura 北陸先端科学技術大学院大学, 先端科学技術研究科
• Project Period (FY): 2016-04-01 – 2018-03-31
• Keywords: グラフェン / NEMS / フォノン / フォノニック結晶 / 超微細加工 / ヘリウムイオンビーム

Outline of Final Research Achievements

By combining graphene-based NEMS (Nano-Electro-Mechanical-System) technology and single-nanometer patterning technology using focused He+ ion beam of ～0.3 nm in diameter, we succeeded to fabricatie two-dimensional array of nanopores of 3 - 4 nm in diameter (graphene phononic crystal: GPnC) devices on doubly-clamped graphene beams of length and width ranging from 100 nm up to 1 micron. We also studied phonic bandgap formation by using large-scale finite element simulation and atom-scale phonon calculations.

Free Research Field

ナノエレクトロニクス、NEMS