2017 Fiscal Year Final Research Report
Proof-of-Concept of Novel Three Dimensional Atom Probe without Needle Structured Sample
| Project/Area Number |
16K13685
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kyoto University |
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Principal Investigator |
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| Project Period (FY) |
2016-04-01 – 2018-03-31
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| Keywords | アトムプローブ / 静電拡大投影 / 短焦点距離 / 平坦 / 倍率 |
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| Outline of Final Research Achievements |
A novel method to use flat sample in atom probe tomography where the sample is requested to be formed as a needle structure was examined. It was found that high magnification of the electrostatic projection comparable to the atom probe can be obtained by placing a counter electrode above the flat sample with a very short spacing. The electrodes for this experiment was designed and fabricated, and preliminary experiments were performed.
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| Free Research Field |
真空電子工学
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