Developing three-dimensional measurement method for nano- and atomistic structures using focal series of aberration-corrected transmission electron microscopy images

2017 Fiscal Year Final Research Report

• Project/Area Number: 16K13688
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Osaka University
• Principal Investigator: Yamasaki Jun 大阪大学, 超高圧電子顕微鏡センター, 准教授 (40335071)
• Co-Investigator(Kenkyū-buntansha): 田中 信夫 名古屋大学, 未来材料・システム研究所, 研究員 (40126876)
• Co-Investigator(Renkei-kenkyūsha): SAITOH KOH 名古屋大学, 未来材料・システム研究所, 教授 (50292280) ; GOHARA KAZUTOSHI 北海道大学, 工学研究院, 教授 (40153746) ; HIRATA AKIHIKO 東北大学, 原子分子材料科学高等研究機構, 准教授 (90350488) ; KOBAYASHI KEITA 大阪大学, 超高圧電子顕微鏡センター, 助教 (40556908)
• Project Period (FY): 2016-04-01 – 2018-03-31
• Keywords: 収差補正電子顕微鏡 / 正焦点 / 格子縞コントラスト / 金属ナノ粒子 / 三次元分布 / 非整合エピタキシャル界面

Outline of Final Research Achievements

One of the imaging features in aberration-corrected transmission electron microscopy (AC-TEM) is that lattice fringe contrast is minimized at the in-focus condition. By utilizing the feature, we developed a new method to observe three-dimensional dispersion of metallic nano particles from a focal series of AC-TEM images. In the process, we developed a filtering procedure to display magnitude of lattice fringe contrast quantitatively. By using the filtering procedure, we also succeeded in developing a method to measure roughness at mismatch epitaxial interfaces between semiconducting materials.

Free Research Field

電子顕微鏡学