Development o fusion measurement method of acoustic-emission by scanning probe microscope

2017 Fiscal Year Final Research Report

• Project/Area Number: 16K14123
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Materials/Mechanics of materials
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: FUJISAWA Satoru 国立研究開発法人産業技術総合研究所, 製造技術研究部門, 主任研究員 (20357908)
• Co-Investigator(Kenkyū-buntansha): 間野 大樹 国立研究開発法人産業技術総合研究所, 製造技術研究部門, 主任研究員 (40344212) ; 三宅 晃司 国立研究開発法人産業技術総合研究所, 製造技術研究部門, 研究グループ長 (30302392)
• Research Collaborator: MIYAKE Koji
• Project Period (FY): 2016-04-01 – 2018-03-31
• Keywords: 走査型プローブ顕微鏡 (SPM) / スキャナ圧電体 / 重畳信号 / アコースティックエミッション (AE) / Cu (銅) 配線 / 電気的・機械的破壊

Outline of Final Research Achievements

By using the superimposing signal of acoustic emission (AE) A scanning probe microscope (SPM), the fracture by the nano-scale contact should be investigated to understand the mechanism of the mechanical processing. Using a combination of the scanning probe microscope (SPM), the AE signal might be detected with receiving the AE wave by the piezoelectric scanner of the SPM, by using with the piezoelectric effect the electric signal due to the AE wave is superimposed on the scan signal. Based on that, in this study, a novel method to detect AE signal from the scan signal is developed. By eliminating the scan signal that is in the signal, by using the electric filter the AE signal can be detected, where the detection is simultaneously with the detection the force of SPM. Expecting the need for the higher sensitivity for the AE detection of hard processing material, the evaluation of the sensitivity for AE and the improvement of the sensitivity, and the new detection method is challenged.

Free Research Field

走査型プローブ顕微鏡 (SPM)