Depelopment of Monolithic Fabrication Process of Integrated Light Absorber and Wavelength-Selective Thermal Emitter for Solar Theromphotovoltaic Power Generation

2017 Fiscal Year Final Research Report

• Project/Area Number: 16K14129
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: Tokyo University of Agriculture and Technology
• Principal Investigator: Iwami Kentaro 東京農工大学, 工学(系)研究科(研究院), 准教授 (80514710)
• Co-Investigator(Kenkyū-buntansha): 梅田 倫弘 東京農工大学, 工学(系)研究科(研究院), 教授 (60111803)
• Project Period (FY): 2016-04-01 – 2018-03-31
• Keywords: MEMS / 太陽熱光発電 / マイクロ・ナノシステム / STPV / Ni-W

Outline of Final Research Achievements

A process for the simultaneous fabrication of microcavity structures on both sides of a film was proposed and demonstrated to develop a freestanding-type integrated absorber-emitter for use in solar thermophotovoltaic power generation systems. The absorber-emitter-integrated film comprised a heat-resistant Ni-W alloy deposited by electroplating. A two-step silicon mould was fabricated using deep reactive-ion etching and electron beam lithography. Cavity arrays with different unit sizes were successfully fabricated on both sides of the film; these arrays are suitable for use as a solar spectrum absorber and an infrared-selective emitter. Their emissivity spectra were characterised through UV-vis-NIR and Fourier transform infrared spectroscopy.

Free Research Field

マイクロ・ナノシステム