Development of three dimensional fine fabrication in liquid using multi-aperture nanopipette probe

2017 Fiscal Year Final Research Report

• Project/Area Number: 16K14131
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: Shizuoka University
• Principal Investigator: Iwata Futoshi 静岡大学, 電子工学研究所, 教授 (30262794)
• Co-Investigator(Renkei-kenkyūsha): NAKAO Hidenobu 国立研究開発法人物質・材料研究機構, 主任研究員 (80421395)
• Project Period (FY): 2016-04-01 – 2018-03-31
• Keywords: 走査型イオン伝導顕微鏡 / ナノピペット / ナノ加工 / 電気泳動堆積 / ナノ微粒子

Outline of Final Research Achievements

In this research, nanoscale particles are three-dimensionally formed on a substrate by using a nanopipette probe (a capillary glass tube having a fine aperture of submicron or less at the tip) of a scanning ion conductance microscope (SICM). The SICM can be operated in a liquid environment to develop a novel micro stereolithography method for depositing on the surface. By using the nanopipette with multiple apertures, stereolithography by electrophoretic deposition of colloidal nanoparticles filled in the pipette was realized while controlling the positioning and distance between the pipette tip and the substrate by ion current detection. By operating in the liquid environment, it was possible to perform highly reproducible processing without drying or clogging at the tip apertures of the pipette.

Free Research Field

精密工学