2017 Fiscal Year Final Research Report
Discovery of large electro caloric effect using HfO2-based ferroelectric ultra thin films
| Project/Area Number |
16K14380
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
山田 智明 名古屋大学, 工学研究科, 准教授 (80509349)
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| Project Period (FY) |
2016-04-01 – 2018-03-31
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| Keywords | 電気熱量効果 / 酸化ハフニウム強誘電性 |
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| Outline of Final Research Achievements |
0.07YO1.5-0.93HfO2(7YHO) films prepared at room temperature and the following heat treatment show ferroelectricity almost compatible with those directly crystallized by high temperature deposition in case of PLD deposited films. Films deposited by sputtering process also show the similar ferroelectricity with that by PLD process when we selected room temperature deposition and the following heat treatment. PUND measurement after the subtraction of the leakage contribution is a best way to exact estimate exact remenent polarization. (111)-oriented epitaxial 7YHO films show the negative electrocaloric effect.
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| Free Research Field |
工学 酸化物機能材料
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