2017 Fiscal Year Final Research Report
Directed self-assembly for fabrication of organic devices with sub-20 nm resolution
| Project/Area Number |
16K20912
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
Electronic materials/Electric materials
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| Research Institution | Tohoku University |
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Principal Investigator |
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| Project Period (FY) |
2016-04-01 – 2018-03-31
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| Keywords | 有機半導体 / ナノリソグラフィ / グラフォエピタキシ |
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| Outline of Final Research Achievements |
The purpose of this study is to explore the possibility of device application greatly exceeding conventional performance by controlling nano-structuring and orientation of functional organic materials by using nano-lithography. We optimized etching and residual film removal process for fabrication of nanopattern of SiO 2 which is important for nanostructuring. We tried to fabricate nanostructures by graphoepitaxy for fabricationg organic nanostructures.
As a result, we succeeded in fabricating anomalous one-dimensional nanowires (NWs) in thienoacene derivatives (C8 - BTBT). A typical NW had a high aspect ratio of 15 nm in thickness, 100 nm in width, 100 μm in length. We also succeeded in forming an array structure of NWs along the nanostructure of the substrate. It has width controllability from 500 nm to 100 nm, suggesting high device application possibility.
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| Free Research Field |
有機デバイス物性工学
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