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2007 Fiscal Year Annual Research Report

異種原子位置交換型水平原子操作の制御条件と機構の解明

Research Project

Project/Area Number 17101003
Research InstitutionOsaka University

Principal Investigator

森田 清三  Osaka University, 大学院・工学研究科, 教授 (50091757)

Co-Investigator(Kenkyū-buntansha) 阿部 真之  大阪大学, 大学院・工学研究科, 准教授 (00362666)
Keywords原子間力顕微鏡 / 水平原子操作 / 交換型原子操作 / フォース・スペクトロスコピー / フォース・マッピング / 原子識別 / 国際研究者交流 / スペイン:ドイツ
Research Abstract

1.アトム・トラッキングによるフィード・フォーワード技術を用いて室温における熱ドリフトを補償することによって、原子間力顕微鏡(AFM)を用いた周波数シフト・マッピングによる元素同定法を開発した。それにより、(Pb, Sn)/Si(111)-(√3×√3)表面の3元素を同定できることを示した。
2.(Pb, Sn)/Si(111)-(√3×√3)の3元素混在表面で、非接触原子間力顕微鏡(NC-AFM)による原子凹凸や、個々の原子の周波数シフト・カーブ測定による共有結合力について周辺原子種効果(化学配位効果)を測定して、原子凹凸への周辺原子種効果は非常に強くまた元素依存性があるが、共有結合力への周辺原子種効果は弱くその元素依存性も弱いことを明らかにした。
3.Si(111)-(7×7)表面でのSiアドアトムの空孔への水平原子操作を探針高さ一定モードで行うことによって、室温における原子操作が確率的に起こることを実証した。また、探針を試料に近づけることによって100%まで確率を増やせることを確認した。
4.Si(111)-(7×7)表面上で周波数シフト・マッピングを行うことによって探針先端の異方性を評価する手法を開発した。Siアドアトム上でのフォース・カーブの最大引力値を与える距離よりも探針を試料に近づけると、表面の対称性を破るマッピングが得られ探針先端の異方性を評価できる。この探針先端の異方性は(交換型)水平原子操作に影響を与えると考えられる。

  • Research Products

    (72 results)

All 2008 2007 Other

All Journal Article (13 results) (of which Peer Reviewed: 13 results) Presentation (54 results) Remarks (1 results) Patent(Industrial Property Rights) (4 results) (of which Overseas: 4 results)

  • [Journal Article] Chemical Coordination Effect Observed in Non-Contact AFM Topography of Pb/Si(111)-(√3×√3)Mosaic Phase2008

    • Author(s)
      Akihiro Ohiso
    • Journal Title

      e-Journal of Surface Science and Nanotechnology Vol.6

      Pages: 79-83

    • Peer Reviewed
  • [Journal Article] How to Move an Atom2008

    • Author(s)
      Oscar Custance
    • Journal Title

      Science Vol.319

      Pages: 1051-1052

    • Peer Reviewed
  • [Journal Article] 原子間力顕微鏡-超高分解能イメージングから原子操作,原子識別のツールー2008

    • Author(s)
      阿部真之
    • Journal Title

      未来材料 Vol.8No.2

      Pages: 6-9

    • Peer Reviewed
  • [Journal Article] ナノ計測・加工・評価技術と原子間力顕微鏡2008

    • Author(s)
      森田清三
    • Journal Title

      東レリサーチセンターThe TRCNEWS No.102

      Pages: 1-13

    • Peer Reviewed
  • [Journal Article] Growth dynamics of insulating SrF_2 films on Si(111)2007

    • Author(s)
      Yoshihide Seino
    • Journal Title

      J. Phys. Condensed Matter Vol.19

      Pages: 445001-45001-9

    • Peer Reviewed
  • [Journal Article] Tip-induced Local Reconstruction on the Pb/Ge(111)Surface Using Frequency Modulation Atomic Force Microscopy2007

    • Author(s)
      Akihiro Ohiso
    • Journal Title

      Japanese Journal of Applied Physics Vol.46

      Pages: 5582-5585

    • Peer Reviewed
  • [Journal Article] Dynamic force spectroscopy using cantilever higher flexural modes2007

    • Author(s)
      Yoshiaki Sugimoto
    • Journal Title

      Applied Physics Letters Vol.91

      Pages: 093120-1-093120-3

    • Peer Reviewed
  • [Journal Article] Evidence of subsurface oxygen vacancy ordering on reduced CeO_2(111)2007

    • Author(s)
      Stefan Torbrugge
    • Journal Title

      Physical Review Letters Vol.99

      Pages: 056101-1-056101-4

    • Peer Reviewed
  • [Journal Article] Drift-compensated data acquisition performed at room temperature with freauency modulation atomic force microscopy2007

    • Author(s)
      Masayuki Abe
    • Journal Title

      Applied Physics Letters Vol.90

      Pages: 203103-1-203103-3

    • Peer Reviewed
  • [Journal Article] AFMによる個々の原子の元素同定2007

    • Author(s)
      杉本宜昭
    • Journal Title

      固体物理 第42巻

      Pages: 775-783

    • Peer Reviewed
  • [Journal Article] 原子分解能を有する原子間力顕微鏡法の新展開-原子種識別や原子操作を行うための新技術-2007

    • Author(s)
      阿部真之
    • Journal Title

      日本物理学会誌 Vol.62

      Pages: 829-837

    • Peer Reviewed
  • [Journal Article] 原子の指紋-原子間力顕微鏡による元素識別-2007

    • Author(s)
      阿部真之
    • Journal Title

      現代化学 No.440

      Pages: 22-26

    • Peer Reviewed
  • [Journal Article] AFMによる原子操作と複素ナノ構造体組立2007

    • Author(s)
      森田清三
    • Journal Title

      顕微鏡 第42巻

      Pages: 100-105

    • Peer Reviewed
  • [Presentation] 多元系ナノ構造構築を目指した原子識別操作技術開発2008

    • Author(s)
      森田清三
    • Organizer
      QE(Quantum Engineering)デザイン研究イニシアティブ研究会
    • Place of Presentation
      銀杏会館,大阪大学
    • Year and Date
      2008-01-28
  • [Presentation] Distinction of individual ionic atom species on (Ca,Sr)F_2/Si (111) surface2007

    • Author(s)
      Yoshihide Seino
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      20071204-05
  • [Presentation] Force spectroscopy using human interface2007

    • Author(s)
      Masuhiro Hiragak
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      20071204-05
  • [Presentation] Non-Contact AFM observation of the "Chemical Coordination Effect" of Pb/Si(111)-(√3×√3) Mosaic Phase2007

    • Author(s)
      Akihiro Ohiso
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      20071204-05
  • [Presentation] Potential mapping using non-contact atomic force microscopy2007

    • Author(s)
      Takashi Namikawa
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      20071204-05
  • [Presentation] Atomic force microscopy using quartz tuning fork in air2007

    • Author(s)
      Yusuke Murai
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      20071204-05
  • [Presentation] Characterization of the electrostatic interaction on substitutional Pb atoms at the Si (111)-(7x7) surface using low temperature dynamic force microscopy2007

    • Author(s)
      Yusaku Yamada
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      20071204-05
  • [Presentation] Atomic force microscopy study of P/Si(001)-(2x1)surface2007

    • Author(s)
      Daisuke Sawada
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      20071204-05
  • [Presentation] Room Temperature Atomic Manipulation Using Dynamic Force Microscopy2007

    • Author(s)
      Yoshiaki Sugimoto
    • Organizer
      The 15th International Colloquium on Scanning Probe Microscopy
    • Place of Presentation
      Atagawa, Japan
    • Year and Date
      2007-12-07
  • [Presentation] Atom Manipulation on the Sn Deposited Si(III)-(7x7)Surface Using Atomic Force Microscopy2007

    • Author(s)
      Koutarou Miki
    • Organizer
      The 15th International Colloquium on Scanning Probe Microscopy
    • Place of Presentation
      Atagawa, Japan
    • Year and Date
      2007-12-07
  • [Presentation] Atom Identification by Dynamic Force Mapping2007

    • Author(s)
      Takashi Namikawa
    • Organizer
      The 15th International Colloquium on Scanning Probe Microscopy
    • Place of Presentation
      Atagawa, Japan
    • Year and Date
      2007-12-06
  • [Presentation] NC-AFM Investigation of the Si Cluster on the Si(III)-(7x7)Surface2007

    • Author(s)
      Satoru Iwasaki
    • Organizer
      The 15th International Colloquium on Scanning Probe Microscopy
    • Place of Presentation
      Atagawa, Japan
    • Year and Date
      2007-12-06
  • [Presentation] AFM Observation of P/Si(001)-(2x1) Surface2007

    • Author(s)
      Daisuke Sawada
    • Organizer
      The 15th International Colloquium on Scanning Probe Microscopy
    • Place of Presentation
      Atagawa, Japan
    • Year and Date
      2007-12-06
  • [Presentation] Atom-by-Atom Chemical Identification and Following Atom Manipulation2007

    • Author(s)
      Seizo Morita
    • Organizer
      2nd International Workshop on Materials Science and Nano-Engineering
    • Place of Presentation
      Awaji Yumebutai, Japan
    • Year and Date
      2007-12-05
  • [Presentation] 原子・分子の識別・操作の最新動向と未来2007

    • Author(s)
      森田清三
    • Organizer
      (独)日本学術振興会、ナノプローブテクノロジー第167委員会、第48回研究会
    • Place of Presentation
      ウェルシティ金沢(石川厚生年金会館),石川県
    • Year and Date
      2007-11-19
  • [Presentation] 原子・分子の識別・操作の今後の課題2007

    • Author(s)
      杉本宜昭
    • Organizer
      (独)日本学術振興会、ナノプローブテクノロジー第167委員会、第48回研究会
    • Place of Presentation
      ウェルシティ金沢(石川厚生年金会館),石川県
    • Year and Date
      2007-11-19
  • [Presentation] Atom-by-Atom Chemical Identification and Following Atom Manipulation Toward Cound Nanostructuring2007

    • Author(s)
      Seizo Morita
    • Organizer
      The 9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-9)
    • Place of Presentation
      Komaba Research Campus of The University of Tokyo, Tokyo, Japan
    • Year and Date
      2007-11-12
  • [Presentation] (Ca,Sr)F_2/Si(111)表面における個々のイオン原子識別2007

    • Author(s)
      清野宜秀
    • Organizer
      第27回表面科学講演大会
    • Place of Presentation
      東京大学生産技術研究所(駒場),東京
    • Year and Date
      2007-11-01
  • [Presentation] 高次共振モード原子間力顕微鏡によるフォーススペクトロスコピー2007

    • Author(s)
      杉本宜昭
    • Organizer
      第27回表面科学講演大会
    • Place of Presentation
      東京大学生産技術研究所(駒場),東京
    • Year and Date
      2007-11-01
  • [Presentation] Principles and State of the Art of Atomic Force Microscopy2007

    • Author(s)
      Seizo Morita
    • Organizer
      6th Int. Symp. Atomic Level Characterizations for New Materials and Devices'07 (ALC07)
    • Place of Presentation
      Kanazawa Art Hall, Ishikawa, Japan
    • Year and Date
      2007-10-28
  • [Presentation] 原子間力顕微鏡の高分解能化と原子の識別・操作・組み立てへの応用2007

    • Author(s)
      森田清三
    • Organizer
      日本顕微鏡学会 第51回シンポジウム
    • Place of Presentation
      徳島大学蔵本キャンパス,徳島
    • Year and Date
      2007-10-19
  • [Presentation] Mechanism for room-temperature single-atom lateral manipulations on semiconductors using dynamic force microscopy2007

    • Author(s)
      Yoshiaki Sugimoto
    • Organizer
      Second International Symposium on Atomic Technologies (ISAT-2)
    • Place of Presentation
      Awaji Yumebutai, Hyogo, Japan
    • Year and Date
      2007-10-01
  • [Presentation] Tip-surface interaction potential mapping at room-temperature using non-contact atomic force microscopy2007

    • Author(s)
      Takashi Namikawa
    • Organizer
      Second International Symposium on Atomic Technologies (ISAT-2)
    • Place of Presentation
      Awaji Yumebutai, Hyogo, Japan
    • Year and Date
      2007-10-01
  • [Presentation] Characterization of the electrostatic interaction on substitutional Pb atoms at the Si(111)-(7x7)surface using low temperature dynamic force microscopy2007

    • Author(s)
      Yusaku Yamada
    • Organizer
      Second International Symposium on Atomic Technologies (ISAT-2)
    • Place of Presentation
      Awaji Yumebutai, Hyogo, Japan
    • Year and Date
      2007-10-01
  • [Presentation] Non-contact atomic force microscopy investigation of the Pb/Si(111)-(√3×√3) mosaic phase2007

    • Author(s)
      Akihiro Ohiso
    • Organizer
      Second International Symposium on Atomic Technologies (ISAT-2)
    • Place of Presentation
      Awaji Yumebutai, Hyogo, Japan
    • Year and Date
      2007-10-01
  • [Presentation] Distribution of individual ionic atom species on (Ca, Sr) F_2/Si(111) surface2007

    • Author(s)
      Yoshihide Seino
    • Organizer
      Second International Symposium on Atomic Technologies (ISAT-2)
    • Place of Presentation
      Awaji Yumebutai, Hyogo, Japan
    • Year and Date
      2007-10-01
  • [Presentation] Atomic force microscopy using quartz tuning fork in air2007

    • Author(s)
      Yusuke Murai
    • Organizer
      Second International Symposium on Atomic Technologies (ISAT-2)
    • Place of Presentation
      Awaji Yumebutai, Hyogo, Japan
    • Year and Date
      2007-10-01
  • [Presentation] Room temperature lateral atom manipulations on semiconductors using dynamic force microscopy2007

    • Author(s)
      Yoshiaki Sugimoto
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium 2007
    • Place of Presentation
      Sigma Hall, Osaka University, Japan
    • Year and Date
      2007-09-27
  • [Presentation] Characterization of the electrostatic interaction on substitutional Pb atoms at the Si(111)-(7x7) surface using low temperature dynamic force microscopy2007

    • Author(s)
      Yusaku Yamada
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium 2007
    • Place of Presentation
      Sigma Hall, Osaka University, Japan
    • Year and Date
      2007-09-27
  • [Presentation] Distribution of ionic chemical species on the surface of(Ca,Sr)F_2/Si(111)2007

    • Author(s)
      Yoshihide Seino
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium 2007
    • Place of Presentation
      Sigma Hall, Osaka University, Japan
    • Year and Date
      2007-09-27
  • [Presentation] Potential mapping at room-temperature using dynamic force microscopy2007

    • Author(s)
      Takashi Namikawa
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium 2007
    • Place of Presentation
      Sigma Hall, Osaka University, Japan
    • Year and Date
      2007-09-27
  • [Presentation] Surrounding atoms effects on the Pb/Si(111)-(√3×√3) mosaic phase2007

    • Author(s)
      Akihiro Ohiso
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium 2007
    • Place of Presentation
      Sigma Hall, Osaka University, Japan
    • Year and Date
      2007-09-27
  • [Presentation] Atomic force microscopy using quartz tuning fork in air2007

    • Author(s)
      Yusuke Murai
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium 2007
    • Place of Presentation
      Sigma Hall, Osaka University, Japan
    • Year and Date
      2007-09-27
  • [Presentation] AFMによる原子のidentification2007

    • Author(s)
      杉本宜昭
    • Organizer
      日本物理学会 第62回年次大会
    • Place of Presentation
      北海道大学,北海道
    • Year and Date
      2007-09-23
  • [Presentation] Evidence of Subsurface Oxygen Vacancy Ordering on Reduced CeO_2(111)2007

    • Author(s)
      Stefan Torbrugge
    • Organizer
      The 10th International Conference on Non-Contact Atomic Force Microscopy
    • Place of Presentation
      Antalya, Turkey
    • Year and Date
      2007-09-18
  • [Presentation] Characterization of the electrostatic interaction on substitutional Pb atoms at the Si (111)-(7x7) surface using low temperature dynamic force microscopy2007

    • Author(s)
      Yusaku Yamada
    • Organizer
      The 10th International Conference on Non-Contact Atomic Force Microscopy
    • Place of Presentation
      Antalya, Turkey
    • Year and Date
      2007-09-18
  • [Presentation] Investigations of Organic Molecules by Frequency Modulation Atomic Force Microscopy in Air or Liquid2007

    • Author(s)
      Masahiro Ohta
    • Organizer
      The 10th International Conference on Non-Contact Atomic Force Microscopy
    • Place of Presentation
      Antalya, Turkey
    • Year and Date
      2007-09-18
  • [Presentation] Development of Low-thermal Drift FM-AFM Working in Air/Liquid Environments2007

    • Author(s)
      Noriaki Oyabu
    • Organizer
      The 10th International Conference on Non-Contact Atomic Force Microscopy
    • Place of Presentation
      Antalya, Turkey
    • Year and Date
      2007-09-18
  • [Presentation] Chemical identification of individual surface atoms using dynamic force microscopy2007

    • Author(s)
      Oscar Custance
    • Organizer
      Trends in Nanotechnology (TNT 2007) International Conference
    • Place of Presentation
      San Sebastian, Spain
    • Year and Date
      2007-09-04
  • [Presentation] Toward atom-by-atom assembly of complex nanostructures at room temperature based on AFM2007

    • Author(s)
      Seizo Morita
    • Organizer
      The 10th Asia Pacific Physics Conference (APPC10)
    • Place of Presentation
      POSTECH, Pohang, Korea
    • Year and Date
      2007-08-23
  • [Presentation] 原子間力顕微鏡による個々の原子の識別・操作・組立2007

    • Author(s)
      森田清三
    • Organizer
      「汎用走査プローブ顕微鏡シミュレータ」研究会
    • Place of Presentation
      みずほ情報総研,東京
    • Year and Date
      2007-08-06
  • [Presentation] Force spectroscopy and single atom chemical identification2007

    • Author(s)
      Oscar Custance
    • Organizer
      Workshop on atomic/molecular manipulation and spectroscopy using scanning probe techniques
    • Place of Presentation
      Suita Campus, Osaka University, Japan
    • Year and Date
      2007-08-02
  • [Presentation] Atomic manipulation using dynamic force microscopy2007

    • Author(s)
      Yoshiaki Sugimoto
    • Organizer
      Workshop on atomic/molecular manipulation and spectroscopy using scanning probe techniques
    • Place of Presentation
      Suita Campus, Osaka University, Japan
    • Year and Date
      2007-08-01
  • [Presentation] Mechanical Atom Identification and Following Atom Manipulation for Assembling Compound Nanostructure2007

    • Author(s)
      Seizo Morita
    • Organizer
      ICYS-ICMR Summer School on Nanomaterials 2007
    • Place of Presentation
      NIMS Sengen-site, Tsukuba, Japan
    • Year and Date
      2007-07-28
  • [Presentation] Drift-compensated data acquisition performed at room temperature with frequency modulation atomic force microscopy2007

    • Author(s)
      Masayuki Abe
    • Organizer
      17th International Vacuum Conference
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2007-07-02
  • [Presentation] Mechanical Atom Identification and Following Atom Manipulation for Assembling Compound Nanostructure2007

    • Author(s)
      Seizo Morita
    • Organizer
      International Conference on Materials for Advanced Technologies (ICMAT)
    • Place of Presentation
      Singapore
    • Year and Date
      2007-07-02
  • [Presentation] Chemical identification of single atoms and following atom manipulati on for assembling compound nanostructures2007

    • Author(s)
      Seizo Morita
    • Organizer
      the International Nanoscience Symposium
    • Place of Presentation
      Universitaet Hamburg, Hamburg, Germany
    • Year and Date
      2007-05-31
  • [Presentation] 原子間力顕微鏡を用いた原子識別・操作による複素ナノ構造体の組立2007

    • Author(s)
      森田清三
    • Organizer
      (社)応用物理学会・日本光学会 微小光学研究グループ 第104回微小光学研究会
    • Place of Presentation
      慶応義塾大学日吉キャンパス来往舎
    • Year and Date
      2007-05-29
  • [Presentation] 高分解能・高機能原子間力顕微鏡の進展と今後の展望2007

    • Author(s)
      森田清三
    • Organizer
      日本表面科学会関西支部15周年記念特別講演会
    • Place of Presentation
      神戸大学百年記念会館,兵庫県
    • Year and Date
      2007-05-28
  • [Presentation] AFMを用いた力学的元素識別2007

    • Author(s)
      杉本宜昭
    • Organizer
      日本顕微鏡学会 第63回学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟コンベンションセンター),新潟
    • Year and Date
      2007-05-20
  • [Presentation] 原子間力顕微鏡を用いた「交換型垂直原子操作」2007

    • Author(s)
      杉本宜昭
    • Organizer
      日本顕微鏡学会 第63回学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟コンベンションセンター),新潟
    • Year and Date
      2007-05-20
  • [Presentation] 非接触原子間力顕微鏡によるKC1(100)へき開面上での単欠陥の水平原子操作2007

    • Author(s)
      西竜治
    • Organizer
      日本顕微鏡学会 第63回学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟コンベンションセンター),新潟
    • Year and Date
      2007-05-20
  • [Presentation] 絶縁体薄膜(Ca,Sr)F_2/Si(111)表面上の異種イオン原子識別2007

    • Author(s)
      清野宜秀
    • Organizer
      日本真空協会 関西支部、平成19年度講演会(第2回)・研究会(第1回)
    • Place of Presentation
      大阪大学吹田キャンパス内、材料開発物性記念館
    • Year and Date
      2007-05-10
  • [Presentation] AFMを用いた個々の原子の元素同定2007

    • Author(s)
      杉本宜昭
    • Organizer
      日本真空協会 関西支部、平成19年度講演会(第2回)・研究会(第1回)
    • Place of Presentation
      大阪大学吹田キャンパス内、材料開発物性記念館
    • Year and Date
      2007-05-10
  • [Remarks]

    • URL

      http://www.afm.eei.eng.osaka-u.ac.jp/jp/index.html

  • [Patent(Industrial Property Rights)] 原子間力顕微鏡及びそれを用いた相互作用力測定法2008

    • Inventor(s)
      大田昌弘, 大藪範昭, _阿部真之_, オスカル・クスタンセ, 杉本宜昭, 森田 清三
    • Industrial Property Rights Holder
      株式会社島津製作所および国立大学法人大阪大学
    • Industrial Property Number
      PCT/JP2008/000001
    • Filing Date
      2008-01-07
    • Overseas
  • [Patent(Industrial Property Rights)] Probe position control system and method2007

    • Inventor(s)
      Masayuki Abe, Masahiro Ohta, Yoshiaki Sugimoto, Kenichi Morita, Noriaki Oyabu, Morita Seizo, Oscar Custance
    • Industrial Property Rights Holder
      SHIMADZU CORPORATION and OSAKA UNIVERSITY
    • Industrial Property Number
      11/802624
    • Filing Date
      2007-05-24
    • Overseas
  • [Patent(Industrial Property Rights)] 探針位置制御装置及び方法2007

    • Inventor(s)
      Masayuki Abe, Masahiro Ohta, Yoshiaki Sugimoto, Kenichi Morita, Noriaki Oyabu, Oscar Custance, Seizo Morita
    • Industrial Property Rights Holder
      株式会社島津製作所及び国立大学法人大阪大学
    • Industrial Property Number
      2007年特許出願第0050792号
    • Filing Date
      2007-05-25
    • Overseas
  • [Patent(Industrial Property Rights)] Probe position control system and method2007

    • Inventor(s)
      Masayuki Abe, Masahiro Ohta, Yoshiaki Sugimoto, Kenichi Morita, Noriaki Oyabu, Oscar Custance, Seizo Morita
    • Industrial Property Rights Holder
      Shimazu Corporation and Osaka University
    • Industrial Property Number
      200710138848
    • Filing Date
      2007-05-24
    • Overseas

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Published: 2010-02-04   Modified: 2016-04-21  

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