Development of nano-spectroscopy using synchrotron radiation photoemission electron microscopy

2009 Fiscal Year Final Research Report

• Project/Area Number: 17101004
• Research Category: Grant-in-Aid for Scientific Research (S)
• Allocation Type: Single-year Grants
• Research Field: Nanomaterials/Nanobioscience
• Research Institution: The University of Tokyo
• Principal Investigator: OSHIMA Masaharu The University of Tokyo, 大学院・工学系研究科, 教授 (30280928)
• Co-Investigator(Kenkyū-buntansha): KUMIGASHIRA Isao 東京大学, 大学院・工学系研究科, 准教授 (00345092) ; OHKUBO Koji 東京大学, 大学院・工学系研究科, 助教 (20376487) ; HORIBA Kanta 東京大学, 大学院・工学系研究科, 助教 (10415292) ; ONO Kanta 高エネルギー加速器研究機構, 物質構造科学研究所, 准教授 (70282572) ; OKABAYASHI Jun 東京大学, 大学院・工学系研究科, 助手 (70361508)
• Project Period (FY): 2005 – 2009
• Keywords: 放射光X線粒子線 / 電子顕微鏡 / 強相関電子系 / ナノ材料 / 環境材料

Research Abstract

In order to investigate chemical, electronic and magnetic structures in nano-devices, environmental catalysts and other inhomogeneous systems, we have developed nano-spectroscopy using two types of photoelectron microscopy, namely projection type and scanning type, with synchrotron radiation, and have applied them to LSI nanostructures, magnetic nanostructures, resistance RAM and non-Pt catalysts successfully. We have achieved the following eight points.
1. Projection-type PEEM was modified to improve the spatial resolution up to 22 nm by means of anti-vibration setup and image processing software for sample drift correction.
2. Scanning-type 3DnanoESCA was developed with spatial resolution of 92 nm by pin-point angle-resolved photoelectron spectroscopy.
3. Magnetic imaging by XMCD-PEEM was realized for permalloy nanostructures and patterned LSMO nanostructures for non-volatile magnetic memory applications.
4. In situ imaging by PEEM was realized for LSI high-k gate insulators during vacuum annealing.
5. Pin-point in-depth analysis by 3DnanoESCA was realized for LSI high-k gate insulators.
6. PEEM imaging at Cu L edges for CuO and Cu revealed the ReRAM mechanism with reduction/oxidation switching.
7. Micro XAS at Pt and Co absorption edges for tapered-cut anode/electrolyte/cathode of fuel cells revealed the degradation mechanism.
8. Hard X-ray PEEM enabled the visualization of deeply embedded Au nano-patterns.

Research Products

• [Journal Article] Novel magnetic domain structure in iron meteorite induced by the presence of L1_0-FeNi (2010)
  • Author(s): M. Kotsugi, T. Wakita, T. Taniuchi, K. Ono, M. Suzuki, N. Kawamura, M. Takagaki, T. Nakamura, M. Taniguchi, K. Kobayashi, M. Oshima, N. Ishimatsu, H. Maruyama
  • Journal Title: Appl.Phys.Express 3 Pages: 013001
  • Peer Reviewed
• [Journal Article] Photoinduced charge-trapping phenomena in metal/high-k gate stack structures studied by synchrotron radiation photoemission spectroscopy (2010)
  • Author(s): T. Tanimura, S. Toyoda, H. Kamada, H. Kumigashira, M. Oshima, T. Sukegawa, G. L. Liu, Z. Liu
  • Journal Title: Appl.Phys.Lett. 96 Pages: 162902
  • Peer Reviewed
• [Journal Article] X-ray absorption studies of electronic structures in carbon alloy cathode catalysts for PEFC (2009)
  • Author(s): H. Niwa, K. Horiba, Y. Harada, M. Oshima, T. Ikeda, K. Terakura, J. Ozaki, S. Miyata
  • Journal Title: J.Power Sources 187 Pages: 93
  • Peer Reviewed
• [Journal Article] Electronic structure characterization of La_2NiMnO_6 epitaxial thin films using synchrotron-radiation photoelectron spectroscopy (2009)
  • Author(s): M. Kitamura, I. Ohkubo, M. Matsunami, H. Kumigashira, K. Horiba, Y. Matsumoto, H. Koinuma, M. Oshima
  • Journal Title: Appl.Phys.Lett. 94 Pages: 262503
  • Peer Reviewed
• [Journal Article] Co oxidation accompanied with degradation of Pt-Co alloy cathode catalyst in polymer electrolyte fuel cell (2009)
  • Author(s): M. Kobayashi, S. Hidai, H. Niwa, Y. Harada, M. Oshima, Y. Horikawa, T. Tokushima, S, Shin, Y. Nakamori, T. Aoki
  • Journal Title: Phys.Chem.and Chem.Phys. 11 Pages: 8226-8230
  • Peer Reviewed
• [Journal Article] Inhomogeneous chemical states in restance-switching devices with a planar-type Pt/CuO/Pt structure (2009)
  • Author(s): R. Yasuhara, K. Fujiwara, K. Horiba, H. Kumigashira, M. Oshima, H. Takagi
  • Journal Title: Appl.Phys.Lett. 95 Pages: 012110
  • Peer Reviewed
• [Journal Article] Synthesis of Mn-substituted titania nanosheets and ferromagnetic thin films with controlled doping (2009)
  • Author(s): X. P. Dong, K. Ono
  • Journal Title: Chem.Mater. 21 Pages: 4366-4373
  • Peer Reviewed
• [Journal Article] Orientation dependence of the Schottky barrier height for La_<0.6>Sr_<0.4>MnO_3/SrTiO_3 heterojuctions (2009)
  • Author(s): M. Minohara, Y. Furukawa, R. Yasuhara, H. Kumigashira, M. Oshima
  • Journal Title: Appl.Phys.Lett. 94 Pages: 242106
  • Peer Reviewed
• [Journal Article] Epitaxial growth and surface metallic nature of LaNiO3 thin films (2008)
  • Author(s): K. Tsubouchi, I. Ohkubo, H. Kumigashira, Y. Matsumoto, T. Ohnishi, M. Lippmaa, H. Koinuma, M. Oshima
  • Journal Title: Appl.Phys.Lett. 92 Pages: 262109
  • Peer Reviewed
• [Journal Article] Application of SPELEEM to high-k gate dielectrics : relationship between surface morphology and photoelectron spectra during Hf-silicide formation (2008)
  • Author(s): R. Yasuhara, T. Taniuchi, H. Kumieashira, M. Oshima, F. Z. Guo, K. Ono, T. Kinoshita, K. Ikeda, G-L Liu, Z. Liu, K. Usuda
  • Journal Title: Appl.Surf.Sci. 254 Pages: 4757-4761
  • Peer Reviewed
• [Journal Article] Origin of metallic states at the heterointerface between the band insulators LaAlO_3 and SrTiO_3 (2008)
  • Author(s): K. Yoshimatsu, R. Yasuhara, H. Kumigashira, M. Oshima
  • Journal Title: Phys.Rev.Lett. 101 Pages: 026802
  • Peer Reviewed
• [Journal Article] Development and Trial Measurements of Hard X-ray Photoelectron Emission Microscope (2007)
  • Author(s): T. Taniuchi, T. Wakita, M. Takagaki, N. Kawamura, M. Suzuki, T. Nakamura, K. Kobayashi, M. Kotsugi, M. Oshima, H. Akinaga, H. Muraoka, K. Ono
  • Journal Title: AIP Conf.Proc. 879 Pages: 1353-1356
  • Peer Reviewed
• [Journal Article] Development and Trial Measurements of Hard X-ray Photoelectron Emission Microscope (2007)
  • Author(s): T. Taniuchi, T. Wakita, M. Takagaki, N. Kawamura, M. Suzuki, T. Nakamura, K. Kobayashi, M. Kotsugi, M. Oshima, H. Akinaga, H. Muraoka, K. Ono
  • Journal Title: American Institute of Physics Conf.Proc. 879 Pages: 1353
  • Peer Reviewed
• [Journal Article] Magnetic domain structure of a technologically patterned La_<0.6>Sr_<0.4>MnO_3 thin film (2007)
  • Author(s): Kubota, T. Taniuchi, R. Yasuhara, H. Kumigashira, M. Oshima, K. Ono, H. Okazaki, T. Wakita, T. Yokoya, H. Akinaga, M. Lippmaa, M. Kawasaki, H. Koinuma
  • Journal Title: Appl.Phys.Lett. 91 Pages: 182503
  • Peer Reviewed
• [Journal Article] High-throughput characterization of metal electrode performance for electric-field-induced resistance switching in metal-Pr_<0.7>Ca_<0.3>MnO_3-metal structures (2007)
  • Author(s): K. Tsubouchi, I. Ohkubo, H. Kumigashira, M. Oshima, M. Lippmaa, T. Ohnishi, Y. Matsumoto, K. Itaka, H. Koinuma
  • Journal Title: Adv.Materials 19 Pages: 1711
  • Peer Reviewed
• [Journal Article] Application of photoelectron emission microscopy (PEEM) to extraterrestial materials (2007)
  • Author(s): M. Kotsugi, T. Wakita, N. Kawamura, T. Taniuchi, K. Ono, M. Suzuki, M. Oshima, N. Ishimatsu, M. Taniguchi, H. Maruyama
  • Journal Title: Surf.Sci. 601 Pages: 4764
  • Peer Reviewed
• [Journal Article] Hard X-ray photoelectron microscopy as a tool to study buried interfhces (2006)
  • Author(s): T. Wakita, T. Taniuchi, K. Ono, M. Suzuki, N. Kawamura, M. Takagaki, H. Miyagawa, F. Z. Guo, T. Nakamura, T. Muro, H. Akinaga, T. Yokoya, M. Oshima, K. Kobayashi
  • Journal Title: Jpn.J.Appl.Phys. Part 1, 45 Pages: 1886-1888
  • Peer Reviewed
• [Journal Article] Band offsets and chemical bonding states in N-plasma-treated HfSiON gate stacks studied by photoelectron spectroscopy and x-ray absorption spectroscopy (2006)
  • Author(s): M. Oshima, H. Takahashi, J. Okabayashi, S. Toyoda, H. Kumigashira, M. Inoue, M. Mizutani, J. Yugami
  • Journal Title: J.Appl.Phys. 100 Pages: 033709-33713
  • Peer Reviewed
• [Journal Article] Observation of in-plane magnetic domain formation in Lal-xSrxMnO3 thin films by photoelectron emission microscopy ; the competition between the step-induced magnetic anisotropy and the magnetocrystalline anisotropy (2006)
  • Author(s): T. Taniuchi, H. Kumigashira, M. Oshima, T. Wakita, T. Yokoya, M. Kubota, K. Ono, H. Akinaga, M. Lippmaa, M. Kawasaki, H. Koinuma
  • Journal Title: Appl.Phys. Lett. 89 Pages: 112505-112508
  • Peer Reviewed
• [Journal Article] Local electronic structure analysis using a photoelectron emission microscope (PEEM) with hard X-ray (2006)
  • Author(s): M. Kotsugi, T. Wakita, T. Taniuchi, K. Ono, M. Suzuki, N. Kawamura, M. Takagaki, M. Taniguchi, K. Kobayashi, M. Oshima, N. Ishimatsu, H. Maruyama
  • Journal Title: e-joumal of surface science and nanotechnology 4 Pages: 490-493
  • Peer Reviewed
• [Journal Article] Vortex chirality control in mesoscopic disk magnets observed by PEEM (2005)
  • Author(s): T. Taniuchi, M. Oshima, H. Akinaga, K. Ono
  • Journal Title: J.Electron Spec.Rel.Phenom. 144-147 Pages: 741-744
  • Peer Reviewed
• [Journal Article] Vortex chirality control in mesoscopic disk magnets observed by photoelectron emission microscopy (2005)
  • Author(s): T. Taniuchi, M. Oshima, H. Akinaga, K. Ono
  • Journal Title: J.Appl.Phys. 97 Pages: 10J904-10J905
  • Peer Reviewed
• [Presentation] In-situ photoelectron spectroscopy and photoemission electron microscopy for local electronic and magnetic structures of transition metal oxide thin films (2008)
  • Author(s): M. Oshima
  • Organizer: Int'l Symposium on Surface Science and Nanotechnology
  • Place of Presentation: Int'l Conference Center Waseda University, Tokyo Japan
  • Year and Date: 20081109-20081113
• [Book] 第2章グリーンナノテクを支える放射光(分担執筆 : 高橋加藤編「シンクロトロン放射光物質科学最前線」) (2010)
  • Author(s): 尾嶋
  • Publisher: アドスリー出版
• [Book] 第6章カーボンアロイ触媒のキャラクタリゼーション(分担執筆 : 宮田監修「カーボンアロイ触媒」) (2010)
  • Author(s): 尾嶋
  • Publisher: シーアイエス出版
• [Remarks]
  • URL: http://www.oshimalab.t.u-tokyo.ac.jp/