Products Report
Femtosecond Pulse Radiolysis Study on Nanoscale Time Space Reaction Process
| Project/Area Number |
17106014
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| Research Category |
Grant-in-Aid for Scientific Research (S)
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| Allocation Type | Single-year Grants |
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| Research Field |
Nuclear engineering
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| Research Institution | Osaka University |
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Principal Investigator |
TAGAWA Seiichi Osaka University, 産業科学研究所, 教授 (80011203)
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| Co-Investigator(Kenkyū-buntansha) |
KOZAWA Takahiro 大阪大学, 産業科学研究所, 准教授 (20251374)
SEKI Shuhei 大阪大学, 工学研究科, 准教授 (30273709)
SAEKI Akinori 大阪大学, 産業科学研究所, 助教 (10362625)
OKAMOTO Kazumasa 大阪大学, 産業科学研究所, 特任助教 (10437353)
YAMAMOTO Hiroki 大阪大学, 産業科学研究所, 特任助教 (00516958)
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| Project Period (FY) |
2005 – 2008
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Research Products
(51 results)
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[Presentation] Depth profile of acid generator distribution in chemically amplified resists2007
Author(s)
T. Fukuyama, T. Kozawa, S. Tagawa, R. Takasu, H. Yukawa, M. Sato, J. Onodera, I. Hirosawa, T. Koganesawa, K. Horie
Organizer
Microprocess and Nanotechnology Conference
Place of Presentation
Kyoto, Japan
Year and Date
2007-11-05 – 2007-11-08
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[Presentation] High precision measurement of higher diffraction-order contamination in monochromatized soft X-ray by using a compact transmission-grating spectrometer2007
Author(s)
K. Fukui, T. Sakai, T. Hatsui, N. Kosugi, Y. Hamamura, K. Okamoto, Y. Matsui, T. Kozawa, S. Seki, S. Tagawa
Organizer
International Conference on Vacuum Ultraviolet Radiation Physics 15th
Place of Presentation
Berlin, Germany
Year and Date
2007-06-29 – 2007-07-03
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[Presentation] The reaction mechanism of poly[4-hydroxystyrene-co-4-(1, 1, 1, 3, 3, 3-hexafluoro-2- hydroxypropyl)-styrene]2006
Author(s)
H. Yamamoto, T. Kozawa, K. Okamoto, S. Tagawa, T. Ando, M. Sato, H. Komano
Organizer
31st Int. Symp. Microlithography
Place of Presentation
San Jose, California, USA
Year and Date
2006-02-19 – 2006-02-24
