2007 Fiscal Year Final Research Report Summary
Development of Next Generation Display Using Carbon Nanowalls
| Project/Area Number |
17206006
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Nagoya University |
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Principal Investigator |
HORI Masaru Nagoya University, Graduate School of Engineering, Professor (80242824)
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| Co-Investigator(Kenkyū-buntansha) |
HIRAMATSU Mineo Nagoya University, Faculty of Science and Technology, Professor (50199098)
TAKASHIMA Seigo Nagoya University, Graduate School of Engineering, Researcher (80397471)
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| Project Period (FY) |
2005 – 2007
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| Keywords | carbon nanowalls / initial growth / field emission / hydrogen plasma / magnesium dioxide / nitrogen doping / graphene sheet / diamond-like carbon |
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| Research Abstract |
Analysis in the initial phase, and morphology and construction control of carbon nanowalls (CNWs), which are new two-dimensional carbon nanostructures, were investigated for applying the carbon nanowalls to the field emission devices. In addition, hydrogen plasma process, magnesium dioxide coating, and nitrogen doping were carried out to realizing the CNWs with higher field emission properties.
By the analysis of initial growth process using a spectroscopic ellipsometer, it was found that the diamond-like carbon (DIE) thin film formed in the early phase, and then carbon nanowalls constructed by graphene sheets grew up. It was confirmed that the average distance between each CNW and the crystallized structure of graphene sheets were dependence on the pressure, the input power, deposition time of CNWs etc. On the basis of these results, we succeeded in control of morphology and structure of CNWs. From the results of investigation about the effect of the morphology of CNWs on the field emission property, the best performance was realized in the case that the ratio of the height of wall to the distance between walls was 1. Moreover the fabrication of CNWs without the thin film grown in the initial phase using a electron beam excited plasma (EBEP), in addition those CNWs were extremely thin, e. g., a few nm, and completely vertical from the bottom to the surface.
The field emission properties of the previous CNWs were a threshold voltage of 6.0 V/μm and current density of 2 μA/cm^2. In this study, those properties were improved to 3.7 V/μm and 10 μA/cm^2, respectively, by hydrogen plasma process after CNWs deposition and magnesium dioxide coating on CNWs. Furthermore, the CNWs with nitrogen doping has the higher current density of 〜1 mA/cm^2. These CNWs have a property enough for applying to the field emission devices.
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[Presentation] Field emission properties of carbon nanowalls covered with MgO coating2007
Author(s)
Tomomi, Obayashi, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 54th Spring Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Kanagawa, Japan
Year and Date
20070327-30
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Supporting effects of carbon nanowalls with dispersed metal nanoparticles on field emission properties2007
Author(s)
Takuma, Machino, Masatoshi, Nakamura, Koji, Yamakawa, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 54th Spring Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Kanagawa, Japan
Year and Date
20070327-30
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Radical density measurements in VHF plasma for carbon nanowalls fabrication2007
Author(s)
Satoru, Kato, Hajime, Sasaki, Seigo, Takashima, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 54th Spring Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Kanagawa, Japan
Year and Date
20070327-30
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Morphology control of carbon nanowalls employing radical injection plasma enhanced CVD2007
Author(s)
Shigetoshi, Maruyama, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 54th Spring Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Kanagawa, Japan
Year and Date
20070327-30
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Synthesis of carbon nanowalls using electron beam excited plasma-enhanced chemical vapor deposition2007
Author(s)
Takateru, Mori, Mineo, Hiramatsu, Koji, Yamakawa, Keigo, Takeda, Masaru, Hori
Organizer
The 54th Spring Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Kanagawa, Japan
Year and Date
20070327-30
Description
「研究成果報告書概要(欧文)」より
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[Presentation] High speed growth of carbon nanowalls using radical injection plasma-enhanced CVD2007
Author(s)
Koji, Yamakawa, Shoji, Den, Toshiro, Katagiri, Hioryuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 54th Spring Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Kanagawa, Japan
Year and Date
20070327-30
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Constitution of carbon nanowalls using electron beam excited plasma-enhanced CVD2007
Author(s)
Takateru, Mori, Mineo, Hiramatsu, Koji, Yamakawa, Keigo, Takeda, Masaru, Hori
Organizer
The 24th Symposium on Plasma Processing
Place of Presentation
Osaka, Japan
Year and Date
20070129-31
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Fabrication of carbon nanowalls on various kinds of substrates2007
Author(s)
Shigetoshi, Maruyama, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 24th Symposium on Plasma Processing
Place of Presentation
Osaka, Japan
Year and Date
20070129-31
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Measurement of radical densities in fluorocarbon / hydrogen VHF plasmas using radical injection for carbon nanowalls2007
Author(s)
Satoru, Kato, Hajime, Sasaki, Seigo, Takashima, Koji, Yamakawa, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 24th Symposium on Plasma Processing
Place of Presentation
Osaka, Japan
Year and Date
20070129-31
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Effects of H_2 plasma treatment on field emission properties from carbon nanowalls2007
Author(s)
Tomomi, Obayashi, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 24th Symposium on Plasma Processing
Place of Presentation
Osaka, Japan
Year and Date
20070129-31
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Supporting effects of carbon nanowalls with highly dispersed metal nanoparticles on field emission properties2007
Author(s)
Takuma, Machino, Masatoshi, Nakamura, Koji, Yamakawa, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 24th Symposium on Plasma Processing
Place of Presentation
Osaka, Japan
Year and Date
20070129-31
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Fabrication of carbon nanowalls using electron beam excited plasma-enhanced CVD2006
Author(s)
Takateru, Mori, Mineo, Hiramatsu, Koji, Yamakawa, Keigo, Takeda, Masaru, Hori
Organizer
The 16th Symposium of The MRS-J
Place of Presentation
Tokyo, Japan
Year and Date
20061208-10
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Formation and morphology control of carbon nanowalls on various kinds of substrates2006
Author(s)
Shigetoshi, Maruyama, Tomomi, Obayashi, Shingo, Kondo, Masaru, Hori, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu
Organizer
The 16th Symposium of The MRS-J
Place of Presentation
Tokyo, Japan
Year and Date
20061208-10
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Supporting Dispersed Pt Nanoparticles on carbon nanowalls and their field emission properties2006
Author(s)
Takuma, Machino, Masaru, Hori, Masatoshi, Nakamura, Mineo, Hiramatsu, Koji, Yamakawa
Organizer
The 16th Symposium of The MRS-J
Place of Presentation
Tokyo, Japan
Year and Date
20061208-10
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Field emission properties depending on height and distance of carbon nanowalls2006
Author(s)
Tomomi, Obayashi, Masaru, Hori, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu
Organizer
The 16th Symposium of The MRS-J
Place of Presentation
Tokyo, Japan
Year and Date
20061208-10
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Field emission properties of carbon nanowalls(II)2006
Author(s)
Tomomi, Obayashi, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 67th Fall Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Shiga, Japan
Year and Date
20060829-0901
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Elucidation of initial structures of carbon nanowalls synthesized by radical injection plasma-enhanced CVD2006
Author(s)
Shingo, Kondo, Koji, Yamakawa, Shinji, Kawai, Shoji, Den, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 67th Fall Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Shiga, Japan
Year and Date
20060829-0901
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Formation and morphology control of carbon nanowalls on various kinds of substrates2006
Author(s)
Shigetoshi, Maruyama, Tomomi, Obayashi, Shingo, Rondo, Koji, Yamakawa, Shinji, Kawai, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 67th Fall Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Shiga, Japan
Year and Date
20060829-0901
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Analysis of surface structures of carbon nanowalls2006
Author(s)
Shinji, Kawai, Shingo, Kondo, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 67th Fall Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Shiga, Japan
Year and Date
20060829-0901
Description
「研究成果報告書概要(欧文)」より
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[Presentation] The effect of hydrogen plasma process on carbon nanowalls for field emission properties2006
Author(s)
Tomomi, Obayashi, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The 53rd Spring Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Tokyo, Japan
Year and Date
20060322-26
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Fabrication and morphology control of carbon nanowalls using radical injection plasma-enhanced CVD2006
Author(s)
Wakana, Takeuchi, Koji, Yamakawa, Hiroyuki, Kano, Mineo, Hiramatsu, Masaru, Hori
Organizer
The Symposium on Final Results Reports of 21st Century COE Program
Place of Presentation
Nagoya, Japan
Year and Date
2006-12-15
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Development of nano assembling system (2)2006
Author(s)
Masaru, Ho, Seigo, Takashima, Mineo, Hiramatsu, Hiroyuki, Kano, Koji, Yamakawa, Shoji, Den
Organizer
The Symposium of 21st Century COE Program
Place of Presentation
Nagoya, Japan
Year and Date
2006-01-12
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Rapid growth of carbon nanowalls using tandem-typed hydrogen2005
Author(s)
Masaru, Ebihara, Shoji, Den, Hiroyuki, Kano, Tomohiro, Den, Mineo, Hiramatsu, Seigo, Takashima, Masaru, Hori
Organizer
The 16th Symposium of The MRS-J
Place of Presentation
Tokyo, Japan
Year and Date
20051209-11
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Carbon nanowalls growth on nanostructures2005
Author(s)
M. Ebihara, S. Den, H. Kano, T. Maeda, M. Hiramatsu, S. Takashima, M. Hori
Organizer
The 66th Fall Meeting of The Japan Society of Applied Physics and Related Societies
Place of Presentation
Tokushima, Japan
Year and Date
20050907-11
Description
「研究成果報告書概要(欧文)」より
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