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2007 Fiscal Year Final Research Report Summary

Development of functional electrodes for dissociation of water molecules and its applications to the electrochemical machining procesges in ultrapure water

Research Project

Project/Area Number 17206013
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

GOTO Hidekazu  Osaka University, Graduate School of Engineering, Associate Professor (80170463)

Project Period (FY) 2005 – 2007
Keywordselectrochemical machinine / ultrapure water / ion-exchanee fimctional crou / functional electrodes / carboxylation / sulfonation / silicon surface / fine particles
Research Abstract

Catalytic electrodes which can dissociate water molecules effectively were proposed and developed for ultraprecision electrochemical machining processes in ultrapure water. Surface carboxylated or sulfonated carbon polycrystalline electrodes were successfully prepared and etching rate of 8nm/s was obtained far etching of Cu polycrystalline surface using these surface modified electrodes. Especially, in the case of using the surface sulfonated carbon electrodes, ultra-smooth surfaces whose roughness are 4nm (Ra) were obtained with 100% current efficiency. On the other hand, for the etching processes of cathode metal or semi-conductor, we used aminated gold electrodes, and etching rates of 0.2nm/s were obtained for the cathode AL. Applying these results, a new ultraprecision machining method in which using surface modified fine-particles dispersed in ultrapure water were proposed and tested. Surface aminated ultrafine particle whose diameters are 30nm were dispersed in ultrapure water and using dialysis the density of impurity of metal ions were lowered to ppb level. By using this new "electrolyte", we performed ultraclean electrochemical etching process of Si surfaces. The observed surface roughness for (001) and (111) surfaces were 0.1228nm (Ra) and 0.064nm (Ra), respectively. Finally, the present new electrochemical machining processes were applied to transcription of the geometry of electrodes to Cu, Al and W surfaces. In the case of using fine-particles whose diameters are 5mm, the transcriptions were successfully achieved.

  • Research Products

    (31 results)

All 2008 2007 2006 2005

All Journal Article (12 results) (of which Peer Reviewed: 6 results) Presentation (18 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Electron Transport Simulations of a Multilead System Using the Impulse Response Method2008

    • Author(s)
      T. Suzuki, H. Goto and K. Hirose
    • Journal Title

      Surface and Interface Analysis (in press.)

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Electron Transport Simulations of a Multilead System Using the Impulse Rdsponse Method2008

    • Author(s)
      T., Suzuki, H., Goto, K., Hirose
    • Journal Title

      Surface and Interface Analysis (in press)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Fabrication of flat silicon surfaces using ion-exchange particles in ultrapure water2007

    • Author(s)
      Y. Ichii and H. Goto
    • Journal Title

      Electrochimica Acta 52

      Pages: 2927-2932

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Fabrication of Damascene Cu Wiring Using Solid Acid Catalyst2007

    • Author(s)
      K. Yagi, J. Murata, H. Hara, Y. Sano, K. Yamauchi and H. Goto
    • Journal Title

      Science and Technology of Advanced Materials 8

      Pages: 166-169

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Facrication of flat silicon surfaces uning ion-exchange particles in ultrapure water2007

    • Author(s)
      Y., Ichii, H., Goto
    • Journal Title

      Electrochimica Acta 52

      Pages: 2927-2932

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Fabrication of Damascene Cu Wiring Using Solid Acid Catalyst2007

    • Author(s)
      K., Yagi, J., Murata, H., Hara, Y., Sano, K., Yamauchi, H., Goto
    • Journal Title

      Science and Technology of Advanced Materials 8

      Pages: 166-169

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Electrochemical Etching Using Surface-Sulfonated Electrodes in Ultrapure Water2006

    • Author(s)
      Y. Ichii, Y. Mori, K. Hirose, K. Endo, K. Yamauchi and H. Goto
    • Journal Title

      Journal of Electrochemical Society 153(5)

      Pages: C344-C348

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Development of Eco-Friendly Electrochemical Etching Process of Silicon on Cathode2006

    • Author(s)
      Y. Ichii and H. Goto
    • Journal Title

      Journal of Electrochemical Society 153(10)

      Pages: C694-C700

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Electrochemical Etching Using Surface-Sulfonated Electrodes in Ultrapure Water2006

    • Author(s)
      Y., Ichii, Y., Mori, K., Hirose, K., Endo, K., Yamauchi, H., Goto
    • Journal Title

      Journal of The Electrochemical Society 153(5)

      Pages: C344-C348

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of Eco-Friendly Electrochemical Etching Process of Silicon on Cathode2006

    • Author(s)
      Yoshio, Ichii, Hidekazu, Goto
    • Journal Title

      Journal of The Electrochemical Society 153(10)

      Pages: C694-C700

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Electrochemical Etching Using Surface Modified Graphite Electrodes in Ultrapure Water2005

    • Author(s)
      Y. Ichii, Y. Mori, K. Hirose, K. Endo, K. Yamauchi and H. Goto
    • Journal Title

      Electrochimica Acta 50(27)

      Pages: 5379-5383

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Electrochemical Etching Using Surface Carboxylated Graphite Electrodes in Ultrapure Water2005

    • Author(s)
      Yoshio, Ichii, Yuzo, Mori, Kikuji, Hirose, Katsuyoshi, Endo, Kazuto ,Yamauchi, Hidekazu, Goto
    • Journal Title

      Electrochemica Acta 50(27)

      Pages: 5379-5383

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Electron-Transport Simulations of Multileads System Using Impulse-Response Method2007

    • Author(s)
      T., Suzuki, H., Goto, K., Hirose
    • Organizer
      The 10th Asian Workshop on First-Principles Electronic Structure Calculations, program and abstracts
    • Place of Presentation
      Hiroshima
    • Year and Date
      20071029-31
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Electron-Transport Simulations of Multieads System Using Impulse-Response Method2007

    • Author(s)
      T. Suzuki, H. Goto and K. Hirose
    • Organizer
      The 10th Asian Workshop on First-Principles Electronic Structure Calculations, program and abstracts, P76.
    • Place of Presentation
      広島大学
    • Year and Date
      2007-10-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Fabrication of flat silicon surface using eco-friendly electrochemical etching process on cathode2006

    • Author(s)
      Yoshio, ICHII, Hidekazu, GOTO
    • Organizer
      International 21st COE Symposium on Atomistic Fabrication 'technology
    • Place of Presentation
      Osaka
    • Year and Date
      20061019-20
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Fabrication of Damascene Cu Wiring Using Solid Acid Catalyst2006

    • Author(s)
      K., Yagi, J., Murata, H., Hara, Y., Sano, K., Yamauchi, H., Goto
    • Organizer
      International 21st COE Symposium on Atomistic Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      20061019-20
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Development of Low-emission MEMS Process2006

    • Author(s)
      Yoshi, ICHII, Hidekazu, GOTO
    • Organizer
      4th ISE (The International Society of Electrochemistry) Spring Meeting 2006
    • Place of Presentation
      Singapore
    • Year and Date
      20060417-20
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Development of Low-emission Chemical Etching Method for Nano-structure Fabrication on Silicon2006

    • Author(s)
      Y., Ichii, H., Goto
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium Abstracts
    • Place of Presentation
      Osaka University
    • Year and Date
      20060130-0201
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Fabrication of flat silicon surface using eco-friendly electrochemical etching process on cathode2006

    • Author(s)
      Y. Ichii and H. Goto
    • Organizer
      International 21st COE Symposium on Atomistic Fabrication Technology
    • Place of Presentation
      大阪大学
    • Year and Date
      2006-10-19
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Fabrication of Damascene Cu Wiring Using Solid Acid Catalyst2006

    • Author(s)
      K. Yagi, J. Murata, H. Hara, Y. Sano, K. Yamauchi and H. Goto
    • Organizer
      International 21st COE Symposium on Atomistic Fabrication Technology
    • Place of Presentation
      大阪大学
    • Year and Date
      2006-10-19
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Development of Low-emission MEMS Process2006

    • Author(s)
      Y.Ichii and H. Goto
    • Organizer
      4th ISE(The International Society of Electroche mistry)Spring Meeting 2006
    • Place of Presentation
      Singapore
    • Year and Date
      2006-04-17
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 低環境負荷型電気化学加工法の開発-単結晶シリコン(001)表面の形状パターニング2006

    • Author(s)
      一井愛雄、後藤英和
    • Organizer
      電気化学会第73回大会講演論文集, pp.311-311.
    • Place of Presentation
      首都大学東京
    • Year and Date
      2006-04-01
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Development of Low-emission Chemical Etching Method for Nano-structure Fabrication on Silicon2006

    • Author(s)
      Y. Ichii and H. Goto
    • Organizer
      Handai Nanoscience and Nanotechnology International Symposium Abstracts, pp.95-95.
    • Place of Presentation
      大阪大学
    • Year and Date
      2006-01-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 水分解触媒電極を用いた超純水電気化学加工法の研究2005

    • Author(s)
      村田順二、一井愛雄、森勇藏、広瀬喜久治、遠藤勝義、山内和人、後藤英和
    • Organizer
      精密工学会
    • Place of Presentation
      京都大学
    • Year and Date
      20050900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 超純水のみによる電気化学的加工法の研究-加工中に生成するOHラジカルの測定-2005

    • Author(s)
      八木 圭太, 一井愛雄, 森勇蔵, 広瀬喜久治, 遠藤勝義, 後藤英和
    • Organizer
      精密工学会
    • Place of Presentation
      京都大学
    • Year and Date
      20050900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] First-Principles Molecular-Dynamics Simulations of Organic Molecule Dissociation Process by OH2005

    • Author(s)
      T. Kimura, S. Kakeya, K. Yagi, Y. Ichii, K. Inagaki, K. Endo, K. Hirose and H. Goto
    • Organizer
      The 8th Asian Workshop on First-Principles Electronic Structure Calculations, Abstract and Program pp.76-76.
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2005-10-31
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] First-Principles Molecular-Dynamics Simulations of Organic Molecule Dissociation Process by OH2005

    • Author(s)
      T., Kimura, S., Kakeya, K., Yagi, Y., Ichii, K., Inagaki, K., Endo, K., Hirose, H., Goto
    • Organizer
      The 8th Asian Workshop on First-Principles Electronic Structure Calculations, Abstract and Program pp.76-76
    • Year and Date
      2005-10-31
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Electrochemical Etching Using Surface Modified Graphite Electrodes in Ultrapure Water2005

    • Author(s)
      Y. Ichii, Y. Mori, H. Hirose, K. Endo, K. Yamauchi, K. Yagi and H. Goto
    • Organizer
      The 5th Asian Conference on Electrochemistry (ACEC2005), Proceedings of ACEC2005, 1P14
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2005-05-10
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Electrochemical Etching Using Surface Modified Graphite Electrodes in Ultrapure Water2005

    • Author(s)
      Y., Ichii, Y., Mori, H., Hirose, K., Endo, K., Yamauchi, K., Yagi, H., Goto
    • Organizer
      The 5th Asian Conference on Electro-chemistry(ACEC2005), Proceedings of ACEC2005, IP14
    • Year and Date
      2005-05-10
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 表面修飾電極を用いた超純水中での電気化学加工法2005

    • Author(s)
      一井愛雄、森 勇藏、後藤英和、広瀬喜久治、遠藤勝義、山内和人
    • Organizer
      電気化学会第72回大会、電気化学会第72回大会講演論文集、pp.384-384.
    • Place of Presentation
      熊本大学
    • Year and Date
      2005-04-03
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 基板表面の加工方法2006

    • Inventor(s)
      後藤英和、一井愛雄
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Industrial Property Number
      特願2006-005121
    • Filing Date
      2006-01-12
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2010-02-04  

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