2007 Fiscal Year Final Research Report Summary
Development of functional electrodes for dissociation of water molecules and its applications to the electrochemical machining procesges in ultrapure water
| Project/Area Number |
17206013
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Osaka University |
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Principal Investigator |
GOTO Hidekazu Osaka University, Graduate School of Engineering, Associate Professor (80170463)
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| Project Period (FY) |
2005 – 2007
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| Keywords | electrochemical machinine / ultrapure water / ion-exchanee fimctional crou / functional electrodes / carboxylation / sulfonation / silicon surface / fine particles |
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| Research Abstract |
Catalytic electrodes which can dissociate water molecules effectively were proposed and developed for ultraprecision electrochemical machining processes in ultrapure water. Surface carboxylated or sulfonated carbon polycrystalline electrodes were successfully prepared and etching rate of 8nm/s was obtained far etching of Cu polycrystalline surface using these surface modified electrodes. Especially, in the case of using the surface sulfonated carbon electrodes, ultra-smooth surfaces whose roughness are 4nm (Ra) were obtained with 100% current efficiency. On the other hand, for the etching processes of cathode metal or semi-conductor, we used aminated gold electrodes, and etching rates of 0.2nm/s were obtained for the cathode AL. Applying these results, a new ultraprecision machining method in which using surface modified fine-particles dispersed in ultrapure water were proposed and tested. Surface aminated ultrafine particle whose diameters are 30nm were dispersed in ultrapure water and using dialysis the density of impurity of metal ions were lowered to ppb level. By using this new "electrolyte", we performed ultraclean electrochemical etching process of Si surfaces. The observed surface roughness for (001) and (111) surfaces were 0.1228nm (Ra) and 0.064nm (Ra), respectively. Finally, the present new electrochemical machining processes were applied to transcription of the geometry of electrodes to Cu, Al and W surfaces. In the case of using fine-particles whose diameters are 5mm, the transcriptions were successfully achieved.
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[Journal Article] Fabrication of Damascene Cu Wiring Using Solid Acid Catalyst2007
Author(s)
K., Yagi, J., Murata, H., Hara, Y., Sano, K., Yamauchi, H., Goto
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Journal Title
Science and Technology of Advanced Materials 8
Pages: 166-169
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Electrochemical Etching Using Surface-Sulfonated Electrodes in Ultrapure Water2006
Author(s)
Y., Ichii, Y., Mori, K., Hirose, K., Endo, K., Yamauchi, H., Goto
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Journal Title
Journal of The Electrochemical Society 153(5)
Pages: C344-C348
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Electrochemical Etching Using Surface Carboxylated Graphite Electrodes in Ultrapure Water2005
Author(s)
Yoshio, Ichii, Yuzo, Mori, Kikuji, Hirose, Katsuyoshi, Endo, Kazuto ,Yamauchi, Hidekazu, Goto
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Journal Title
Electrochemica Acta 50(27)
Pages: 5379-5383
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Fabrication of Damascene Cu Wiring Using Solid Acid Catalyst2006
Author(s)
K., Yagi, J., Murata, H., Hara, Y., Sano, K., Yamauchi, H., Goto
Organizer
International 21st COE Symposium on Atomistic Fabrication Technology
Place of Presentation
Osaka
Year and Date
20061019-20
Description
「研究成果報告書概要(欧文)」より
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[Presentation] First-Principles Molecular-Dynamics Simulations of Organic Molecule Dissociation Process by OH2005
Author(s)
T., Kimura, S., Kakeya, K., Yagi, Y., Ichii, K., Inagaki, K., Endo, K., Hirose, H., Goto
Organizer
The 8th Asian Workshop on First-Principles Electronic Structure Calculations, Abstract and Program pp.76-76
Year and Date
2005-10-31
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Electrochemical Etching Using Surface Modified Graphite Electrodes in Ultrapure Water2005
Author(s)
Y., Ichii, Y., Mori, H., Hirose, K., Endo, K., Yamauchi, K., Yagi, H., Goto
Organizer
The 5th Asian Conference on Electro-chemistry(ACEC2005), Proceedings of ACEC2005, IP14
Year and Date
2005-05-10
Description
「研究成果報告書概要(欧文)」より
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