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2007 Fiscal Year Final Research Report Summary

Micro and nano-machining of polymer and glass materials using proton beamwriting

Research Project

Project/Area Number 17310085
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionShibaura Institute of Technology

Principal Investigator

NISHIKAWA Hiroyuki  Shibaura Institute of Technology, Department of Electrical Engineering, Associate Professor (40247226)

Co-Investigator(Kenkyū-buntansha) MATSUMURA Kazunari  Shibaura Institute of Technology, Department of Materials Science, Lecturer (10348899)
KAMIYA Tomihiro  Japan Atomic Energy Agency, Takasaki Advanced Radiation Research Institute, Assistant Principal Researcher (70370385)
SATO Takahiro  Japan Atomic Energy Agency, Takasaki Advanced Radiation Research Institute, Researcher (10370404)
ISHII Yasuyuki  Japan Atomic Energy Agency, Takasaki Advanced Radiation Research Institute, Assistant Principal Researcher (00343905)
Project Period (FY) 2005 – 2007
Keywordsproton / polymer / glass / high-aspect-ratio structures / resist / micro, nanostructures / pillar / dielectrophoretic device
Research Abstract

Microelectronic and photonics industries need a manufacturing system with flexibility, high precision and a fast prototyping capability. In order to fulfill these requirements, proton beam writing (PBW) will be pursued in the research project. The purpose of this research is to explore the PBW-based flexible micromachining system to demonstrate a fast prototyping capability and its application to t he fabrication of optical, electronic and bio and chemical sensor devices, etc. The technological challenges in this research are three folds. The first challenge is the search for an optimal operation condition of ion source and a focusing system for PBW. Second is the study of materials and processing using PBW. The third challenge is to demonstrate device applications.
We have established the PBW-based lithography techniques on organic and inorganic films for resists by demonstrating the high-as pect-ratio structures as high as 〜20. By the development of the hardware and software involved in the PBW system, 100-nm class be am focusing was achieved. Also, trials to achieve increased beam current, wide area beam scan as large as 10 mm squared area using stages were made. Device applications of high-aspect-ratio microstructures by the PBW to dielectrophoretic devices were demonstrat ed. We have confirmed the functionality of the high-aspect-ratio pillar arrays as electric-micro filters in capturing microbes with a size of several micrometers such as E call and yeast. For applications in the area of micro-photonics, organic and inorganic siloxane films were successfully micro-patterned by PBW.

  • Research Products

    (49 results)

All 2008 2007 2006 2005 Other

All Journal Article (13 results) (of which Peer Reviewed: 6 results) Presentation (35 results) Remarks (1 results)

  • [Journal Article] Ni electroplating on a resist micro-machined by proton beam writing2008

    • Author(s)
      N.Uchiya, Y.Furuta, H.Nishikawa, T.Watanabe, J.Haga, T.Satoh, M.Oikawa, Y.Ishii, T.Kamiya
    • Journal Title

      Microsystem Technologiesオンライン版(Published online:29 January 2008)

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Ni electroplating on a resist micro-machined by proton beam writing2008

    • Author(s)
      N., Uchiya, Y., Furuta, H., Nishikawa, T., Watanabe, J., Haga, T., Satoh, M., Oikawa, Y., Ishii, T., Kamiya
    • Journal Title

      Microsystem Technologies Published online

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Fabrication of three-dimensional structures of resist by proton beam writing2007

    • Author(s)
      Y.Furuta, N.Uchiya, H.Nishikawa, J.Haga, T.Sato, M.Oikawa, Y.Ishii, T.Kamiya
    • Journal Title

      Journal of Vacuum Science&Technology B:Microelectronics and Nanometer Structures 25

      Pages: 2171-2174

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Micro-machining of resists on silicon by proton beam writing2007

    • Author(s)
      N.Uchiya, T.Harada, M.Murai, H.Nishikawa, J.Haga, T.Sato, Y.Ishii and T.Kamiya
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B260

      Pages: 405-408

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Modification of structural and optical properties of silica glass induced by ion microbeam2007

    • Author(s)
      H.Nishikawa, M.Murai, T.Nakamura, Y.Ohki, M.Oikawa, T.Sato, T.Sakai, Y.Ishii, M.Fukuda
    • Journal Title

      Surface and Coatings Technology 201

      Pages: 8185-8189

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Micro-photoluminescence study on defects induced by ion microbeam in silica glass2007

    • Author(s)
      M.Murai, H.Nishikawa, T.Nakamura, H.Aiba, Y.Ohki, M.Oikawa, T.Sato, T.Kamiya
    • Journal Title

      Journal of Non-Crystalline Solids 353

      Pages: 537-541

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] 集束プロトンビーム描画による微細加工と型加工への応用(解説)2007

    • Author(s)
      西川 宏之, 打矢 直之, 古田 祐介, 吉田 栄治, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Journal Title

      成形加工(プラスチック成形加工学会誌) 19

      Pages: 276-281

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 量子ビーム応用最前線,PBWで三次元微細加工の新地平を拓く(解説)2007

    • Author(s)
      打矢 直之, 古田 祐介, 西川 宏之, 吉田 栄治, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Journal Title

      原子力eye(日刊工業新聞社) 53

      Pages: 48-51

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Fabrication of three-dimensional structures of resist by proton beam writing2007

    • Author(s)
      Y., Furuta, N., Uchiya, H., Nishikawa, J., Haga, T., Sato, M., Oikawa, Y., Ishii, T., Kamiya
    • Journal Title

      Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures 25

      Pages: 2171-2174

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Micro-machining of resists on silicon by proton beam writing2007

    • Author(s)
      N., Uchiya, T., Harada, M., Murai, H., Nishikawa, J., Haga, T., Sato, Y., Ishii, T., Kamiya
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B260

      Pages: 405-408

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Micro-photoluminescence study on defects induced by ion microbeam in silica glass2007

    • Author(s)
      H., Nishikavva, M., Murai, T., Nakamura, Y., Ohki, M., Oikawa, T., Sato, T., Sakai, Y., Ishii, M., Fukuda
    • Journal Title

      Journal of Non-Crystalline Solids 353

      Pages: 537-541

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Spatial distribution of irradiation effects on silica glass induced by 15-MeV oxygen ion microbeam2006

    • Author(s)
      H.Nishikawa, K.Fukagawa, T.Nakamura, Y.Ohki, M.Oikawa, T.Kamiya, K.Arakawa
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B242

      Pages: 437-440

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Spatial distribution of irradiation effects on silica glass induced by 15-MeV oxygen ion microbeam2006

    • Author(s)
      H., Nishikawa, K., Fukagawa, T., Nakamura, Y., Ohki, M., Oikawa, T., Kamiya, K., Arakawa
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B242

      Pages: 437-440

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] シロキサン系薄膜の集束イオンビーム描画による微細加工2008

    • Author(s)
      土屋 龍太郎, 古田 祐介, 打矢 直之, 西川 宏之, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Organizer
      第55回応用物理学関係連合講演会講演予稿集No.2, 30p-ZL-2, p.750
    • Place of Presentation
      日本大学理工学部(千葉)
    • Year and Date
      2008-03-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 三次元構造誘電泳動デバイスにおける微生物の捕集特性2008

    • Author(s)
      中尾 亮太, 内田 諭, 古田 祐介, 西川 宏之
    • Organizer
      第55回応用物理学関係連合講演会講演予稿集No.3, 29p-R-9, p.1371
    • Place of Presentation
      日本大学理工学部(千葉)
    • Year and Date
      2008-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 集束陽子線による微細構造のPDMSによる転写2008

    • Author(s)
      関 佳裕, 西川 宏之, 打矢 直之, 古田 祐介, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Organizer
      第55回応用物理学関係連合講演会講演予稿集No.2, 29a-ZL-19, p.732
    • Place of Presentation
      日本大学理工学部(千葉)
    • Year and Date
      2008-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 集束プロトンビーム微細加工を応用した微生物濃縮セルの作製と評価2008

    • Author(s)
      古田 祐介, 打矢 直之, 西川 宏之, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕, 中尾 亮太, 内田 諭
    • Organizer
      第55回応用物理学関係連合講演会講演予稿集No.3, 27a-ZL-1, p.714
    • Place of Presentation
      日本大学理工学部(千葉)
    • Year and Date
      2008-03-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Lithography Using Focused High-Energy Proton Beam for Fabrication of High-Aspect-Ratio Microstructures2007

    • Author(s)
      H., Nishikawa, Y., Furuta, N., Uchiya, J., Haga, M., Oikawa, T., Satoh, Y., Ishii, T., Kamiya
    • Organizer
      20th Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      20071106-08
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Electroplating of Metal Micro-Structure Using a Resist Micro-Machined by Proton Beam Writing2007

    • Author(s)
      N., Uchiya, Y., Furuta, H., Nishikawa, T., Watanabe, J., Haga, T., Satoh, M., Oikawa, T., Ohkubo, Y., Ishii, T., Kamiya
    • Organizer
      20th Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      20071106-08
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Fabrication of High-Aspect-Ratio Pillars by Proton Beam Writing and Application to DEP-Devices2007

    • Author(s)
      Y., Furuta, N., Uchiya, H., Nishikawa, J., Haga, M., Oikawa, T., Satoh, Y., Ishii, T., Kamiya, R., Nakao, S., Uchida
    • Organizer
      20th Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      20071106-08
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing(PBW)2007

    • Author(s)
      N., Uchiya, Y., Furuta, H., Nishikawa, T., Watanabe, J., Haga, T., Sato, Y., Ishii, T., Kamiya
    • Organizer
      7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts, 201-202
    • Place of Presentation
      France
    • Year and Date
      20070607-09
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Fabrication of 3-D Structures of Resist by Proton Beam Writing2007

    • Author(s)
      Y., Furuta, N., Uchiya, H., Nishikawa, J., Haga, T., Satoh, M., Oikawa, Y., Ishii, T., Kamiya
    • Organizer
      The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
    • Place of Presentation
      USA
    • Year and Date
      20070529-0601
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 集束プロトンビーム描画による高アスペクト比微細型加工2007

    • Author(s)
      吉田 栄治, 古田 祐介, 打矢 直之, 西川 宏之, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Organizer
      2007年度精密工学会春季大会学術講演会講演論文集, 論文番号C47, pp.253-254
    • Place of Presentation
      芝浦工業大学
    • Year and Date
      20070300
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Proton Beam Writingによる3次元微細加工2007

    • Author(s)
      打矢 直之, 西川 宏之, 古田 祐介, 吉田 栄治, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Organizer
      第12回放射線プロセスシンポジウム要旨集pp.95-98
    • Place of Presentation
      日本科学未来館(東京)
    • Year and Date
      2007-11-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Lithography Using Focused High-Energy Proton Beam for Fabrication of High-Aspect-Ratio Microstructures2007

    • Author(s)
      H.Nishikawa, Y.Furuta, N.Uchiya, J.Haga, M.Oikawa, T.Satoh, Y.Ishii, T.Kamiya
    • Organizer
      20th Microprocesses and Nanotechnology Conference, pp.66-67, Paper No.6A-4-12
    • Place of Presentation
      京都
    • Year and Date
      2007-11-06
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Electroplating of Metal Micro-Structure Using a Resist Micro-Machined by Proton Beam Writing2007

    • Author(s)
      N.Uchiya, Y.Furuta, H.Nishikawa, T.Watanabe, J.Haga, T.Satoh, M.Oikawa, T.Ohkubo, Y.Ishii, T.Kamiya
    • Organizer
      20th Microprocesses and Nanotechnology Conference, pp.288-289, Paper No.6A-4-113
    • Place of Presentation
      京都国際会館(京都)
    • Year and Date
      2007-11-06
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Fabrication of High-Aspect-Ratio Pillars by Proton Beam Writing and Application to DEP-Devices2007

    • Author(s)
      Y.Furuta, N.Uchiya, H.Nishikawa, J.Haga, M.Oikawa, T.Satoh, Y.Ishii, T.Kamiya, R.Nakao, S.Uchida
    • Organizer
      20th Microprocesses and Nanotechnology Conference, pp.340-341, Paper No.6A-4-139
    • Place of Presentation
      京都国際会館(京都)
    • Year and Date
      2007-11-06
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 集束プロトン線による高アスペクト比ピラー形成とデバイス応用2007

    • Author(s)
      古田 祐介, 打矢 直之, 西川 宏之, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕, 中尾 亮太, 内田 諭
    • Organizer
      第68回秋季応用物理学会学術講演会講演予稿集No.2, 5a-C-21, p.736
    • Place of Presentation
      北海道工業大学(北海道)
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing(PBW)2007

    • Author(s)
      N.Uchiya, Y.Furuta, H.Nishikawa, T.Watanabe, J.Haga, T.Sato, Y.Ishii, T.Kamiya
    • Organizer
      7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts, pp.201-202
    • Place of Presentation
      フランス
    • Year and Date
      2007-06-07
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Fabrication of 3-D Structures of Resist by Proton Beam Writing2007

    • Author(s)
      Y.Furuta, N.Uchiya, H.Nishikawa, J.Haga, T.Satoh, M.Oikawa, Y.Ishii, T.Kamiya
    • Organizer
      The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Paper 7A.5
    • Place of Presentation
      米国コロラド州
    • Year and Date
      2007-06-01
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 集束プロトンビーム描画による3次元構造体の作製2007

    • Author(s)
      古田 祐介, 打矢 直之, 西川 宏之, 芳賀 潤二, 及川 将一, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Organizer
      第54回応用物理学関係連合講演会, 講演予稿集論文番号29p-SH-14
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 集束プロトンビーム描画による高アスペクト比微細型加工2006

    • Author(s)
      吉田 栄治, 西川 宏之, 打矢 直之, 古田 祐介, 神谷 富裕, 石井 保行, 佐藤 隆博, 及川 将一, 芳賀 潤二
    • Organizer
      成形加エシンポジア'06第14回プラスチック成形加工学会秋季大会予稿集pp.33-34
    • Place of Presentation
      岐阜大学
    • Year and Date
      20061100
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Micro-machining of Resists on Silicon by Proton Beam Writing2006

    • Author(s)
      Naoyuki, Uchiya, Takuya, Harada, Masato, Murai, Hiroyuki, Nishikawa, Junji, Haga, Takahiro, Sato, Yasuyuki, Ishii, Tomihiro, Kamiya
    • Organizer
      10th International Conference on Nuclear Microprobe Technology and Applications
    • Place of Presentation
      Singapore
    • Year and Date
      20060709-14
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Accurate Measurements of Beam Energy Spreads Using a Combination of Nuclear Resonance Reaction and a 0-degree Beam-Line analyzing method2006

    • Author(s)
      Y., Ishii, A., Chiba, J., Haga, K., Mizuhashi, T., Kamiya
    • Organizer
      The 10th International Conference on Nuclear Microprobe Technology and Applications
    • Year and Date
      20060709-14
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Micro-machining of Resists on Silicon by Proton Beam Writing2006

    • Author(s)
      Naoyuki Uchiya, Takuya Harada, Masato Murai, Hiroyuki Nishikawa, Junji Haga, Takahiro Sato, Yasuyuki Ishii, Tomihiro Kamiya
    • Organizer
      Abstracts of the 10th International Conference on Nuclear Microprobe Technology and Applications
    • Place of Presentation
      Singapore
    • Year and Date
      20060700
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Accurate Measurements of Beam Energy Spreads Using a Combination of Nuclear Resonance Reaction and a 0-degree Beam-Line analyzing method2006

    • Author(s)
      Y.Ishii, A.Chiba, J.Haga, K.Mizuhashi, T.Kamiya
    • Organizer
      Abstracts of the 10th International Conference on Nuclear Microprobe Technology and Applications
    • Place of Presentation
      Singapore
    • Year and Date
      20060700
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Micro-photoluminescence study on defects induced by ion microbeam in silica glass2006

    • Author(s)
      M.Murai, H.Nishikawa, T.Nakamura, H.Aiba, Y.Ohki, M.Oikawa, T.Sato, T.Kamiya
    • Organizer
      6th Symposium, SiO_2 Advanced Dielectrics and Related Devices, Book of Abstracts, pp.96-97
    • Place of Presentation
      Italy
    • Year and Date
      20060625-28
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Micro-photoluminescence study on defects induced by ion microbeam in silica glass2006

    • Author(s)
      M., Murai, H., Nishikawa, T., Nakamura, H., Aiba, Y., Ohki, M., Oikawa, T., Sato, T., Kamiya
    • Organizer
      6th Symposium, SiO2 Advanced Dielectrics and Related Devices,(Book of Abstracts)
    • Place of Presentation
      Palermo, Italy
    • Year and Date
      20060625-28
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] シリカガラスに生じたイオンマイクロビーム誘起変形と屈折率変化の熱的特性2006

    • Author(s)
      相場 洋彦, 大木 義路, 中村 知晴, 西川 宏之, 村井 将人, 荒川 和夫, 福田 光宏, 酒井 卓郎, 及川 将一, 佐藤 隆博, 石井 保行, 山本 春也
    • Organizer
      第1回高崎量子応用研究シンポジウム, 1P-73
    • Place of Presentation
      高崎市民ギャラリー
    • Year and Date
      20060600
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 集束プロトンビーム描画によるレジスト材料のマイクロマシニング2006

    • Author(s)
      打矢 直之, 原田 卓也, 村井 将人, 西川 宏之, 芳賀 潤二, 酒井 卓郎, 佐藤 隆博, 及川 将一, 石井 保行, 福田 光宏, 山本 春也, 神谷 富裕
    • Organizer
      第1回高崎量子応用研究シンポジウム, 2P-68
    • Place of Presentation
      高崎市民ギャラリー
    • Year and Date
      20060600
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] シリカガラスに生じたイオンマイクロビーム誘起変形の熱的安定性2006

    • Author(s)
      相場 洋彦, 中村 知晴, 大木 義路, 村井 将人, 西川 宏之, 及川 将一, 佐藤 隆博, 荒川 和夫
    • Organizer
      第53回応用物理学関係連合講演会講i演予稿集, No.2, 論文番号25p-ZA-10, p.962
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      20060300
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 集束プロトンビーム描画による厚膜レジストの微細加工2006

    • Author(s)
      打矢 直之, 古田 祐介, 西川 宏之, 芳賀 潤二, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Organizer
      第67回応用物理学会学術講演会, 講i演予稿集論文番号31a-RC-9, p.694
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-31
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Modification of structural and optical properties of silica glass induced by ion microbeam2005

    • Author(s)
      H., Nishikawa, M., Murai, T., Nakamura, Y., Ohki, M., Oikawa, T., Sato, T., Sakai, Y., Ishii, M., Fukuda
    • Organizer
      International Conference on Surface Modification of Materials by Ion Beams(SMMIB'05), Paper, MP-O8
    • Place of Presentation
      Turkey
    • Year and Date
      20050904-09
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Modification of structural and optical properties of silica glass induced by ion microbeam2005

    • Author(s)
      H.Nishikawa, M.Murai, T.Nakamura, Y.Ohki, M.Oikawa, T.Sato, T.Sakai, Y.Ishii, and M.Fukuda
    • Organizer
      International Conference on Surface Modification of Materials by Ion Beams(SMMIB'05), Paper No.MP-08, p.85
    • Place of Presentation
      Turkey
    • Year and Date
      20050900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Irradiation Effects on Silica Glass by Ion Microbeam for Fabrication of Optical Elements2005

    • Author(s)
      Masato Murai, Kazunari Fukagawa, Hiroyuki Nishikawa, Tomoharu Nakamura, Yoshimichi Ohki, Masakazu Oikawa, Takahiro Sato, Kazuo Arakawa
    • Organizer
      Proceedings of 2005 International Symposium on Electrical Insulating Materials, B3-7, pp.210-213
    • Place of Presentation
      Kitakyushu,Japan
    • Year and Date
      20050605-09
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Irradiation Effects on Silica Glass by Ion Microbeam for Fabrication of Optical Elements2005

    • Author(s)
      Masato, Murai, Kazunari, Fukagawa, Hiroyuki, Nishikawa, Tomoharu, Nakamura, Yoshimichi, Ohki, Masakazu, Oikawa, Takahiro, Sato, Kazuo, Arakawa
    • Organizer
      International Symposium on Electrical In sulating Materials, B3-7
    • Place of Presentation
      Kitakyushu, Japan
    • Year and Date
      20050605-09
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] プロトンマイクロビーム描画によるレジストの微細加工2005

    • Author(s)
      打矢 直之, 原田 卓弥, 西川 宏之, 芳賀 潤二, 酒井 卓郎, 佐藤 隆博, 石井 保行, 神谷 富裕
    • Organizer
      2005年放電学会年次大会講演論文集論文番号D-4-6
    • Place of Presentation
      芝浦工業大学
    • Year and Date
      2005-11-10
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] プロトンマイクロビーム照射によるポリマーの微細加工2005

    • Author(s)
      原田 卓弥, 打矢 直之, 村井 将人, 西川 宏之, 酒井 卓郎, 佐藤 隆博, 石井 保行, 福田 光宏
    • Organizer
      第66回応用物理学会学術講演会講演予稿集No.2, p.629, 9a-ZD-11
    • Place of Presentation
      徳島大学
    • Year and Date
      2005-09-09
    • Description
      「研究成果報告書概要(和文)」より
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www.cfm.ae.shibaura-it.ac.jp/

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Published: 2010-02-04  

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