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2007 Fiscal Year Final Research Report Summary

Interaction between ion source plasma and ion source wall

Research Project

Project/Area Number 17340175
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionDoshisha University

Principal Investigator

WADA Motoi  Doshisha University, Faculty of Engineering, Professor (30201263)

Co-Investigator(Kenkyū-buntansha) KASUYA Toshiro  Doshisha University, Faculty of Engineering, Professor (50221875)
NISHIURA Masaki  National Institute for Fusion Science, 核融合科学研究所, Assistant Professor (60360616)
Project Period (FY) 2005 – 2007
Keywordsnegative ion / photodetachment / plasma wall interaction / pasma diagnostics / jon source
Research Abstract

Condition of the wall largely affects the performance of an ion source. Several fundamental mechanisms are responsible for the change in extractable amount of ions from the source. These include change of particle/energy reflection coefficient at the source wall due to formation of deposition layers, and alteration of dc electromagnetic structures near the source wall. Time-of-flight energy analysis for neutral particles, optical emission spectroscopy, and electrostatic probes were the three major tools employed to investigate factors governing the plasma-surface interactions in ion source plasmas. Peaks of velocity distribution functions of neutrals effusing out of plasma, shift toward the higher energy side with the increasing discharge power into the ion source. Vacuum ultraviolet spectra of hydrogen gas in a negative hydrogen ion source have shown the coverage of high temperature cathode materials alters distributions of molecular excitation levels of the gas confined in the ion so … More urce. High frequency electrical powers can excite plasma without any cathodes acting as sputtering/evaporation particle sources, but they still form deposition layers on ion source walls. The deposition layers formed by high frequency discharge power often show insulating characteristics causing change in local potential distributions around the ion extraction holes. The penetration of local electrical potential into plasma has been measured with the extraction potential turned on. The result has clearly shown the presence of field attracting ions to be extracted from the source. The extraction probability calculated from the local electric field has been compared with the experimental result. Plasma flow speed which is an input parameter for the theoretical model to predict extraction probability has been measured experimentally by dc laser photodetachment method. Other diagnostic methods to characterize plasma surface interaction like laser induced photoelectron emission have been developed to further deepen the understanding the plasma-surface interaction for ion source and process plasmas. Less

  • Research Products

    (54 results)

All 2008 2007 2006 2005

All Journal Article (32 results) (of which Peer Reviewed: 24 results) Presentation (19 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Compact 2.45 GHz microwave ion/atom source2008

    • Author(s)
      Y.Sakamoto, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02A318/1-3

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Photodetachment Diagnostics of a volume production type negative ion source with a diode laser2008

    • Author(s)
      Y.Matsuda, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02A517/1-3

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Compact EXB mass separator for heavy ion beams2008

    • Author(s)
      M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02B501/1-3

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Effects upon H^- transport due to electrical bias on a plasma electrode of a volume-type hydrogen negative ion source2008

    • Author(s)
      Y.Matsumoto, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02B909/1-5

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Simulation studies on the evolution of gallium nitride on a liquid gallium surface under nitrogen plasma bombardment based on a plasma-sputter type ion source System2008

    • Author(s)
      M.R.Vasquez, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02C713/1-4

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Negative Ion Production in Cesium Seeded High-electron Temperature Plasmas2008

    • Author(s)
      T.Inoue, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02C112/1-4

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Status of the heavy beam ion probe system in the Large Helical Device2008

    • Author(s)
      M.Nishiura, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02C713/1-4

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Photodetachment diagnostics of a volume production type negative ion source with a diode laser2008

    • Author(s)
      Y. Matsuda, T. Kasuya, M. Wada
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02A517/1-3

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Compact EXB mass separator for heavy ion beams2008

    • Author(s)
      M. Wada, T. Hashino, T. Kasuya, Y. Sakamoto, M. Nishiura
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02B501/1-3

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Negative Ion Production in Cesium Seeded High-electron Temperature Plasmas2008

    • Author(s)
      T. Inoue, H. Tobari, M. Hanada, M. Kashiwagi, K. Sakamoto, N. Takado, A. Hatayama, M. Wada
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 02C112/1-4

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Particle reflections of low energy light ions from a vanadium alloy(V-4Cr-4Ti)2007

    • Author(s)
      H.Yamaoka, M.Wada, et. al.
    • Journal Title

      Journal of Nuclear Materials 363-365

      Pages: 1304-1308

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Particle reflections of low energy light ions from a vanadium alloy(V-4Cr-4Ti)2007

    • Author(s)
      H. Yamaoka, N. Tanaka, Y. Matsumoto, M. Nishiura, K. Tsumori, S. Takeuchi, H. Sugawara, K. Shinto, A. Okamoto, M. Sasao, M. Wada
    • Journal Title

      Journal of Nuclear Materials, Volumes 363-365

      Pages: 1304-1308

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Effects of bias potential upon H-density near a plasma grid of a negative ion source2006

    • Author(s)
      H.Takahashi, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 77-03A

      Pages: 513-515

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Enhancement of H-extraction from a compact source by streaming neutral gas injection2006

    • Author(s)
      A.Mendenilla, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 77-03A

      Pages: 518-520

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Optimization of negative ion sources for a heavy-ion-beam probe2006

    • Author(s)
      M.Nishiura, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 77-03A

      Pages: 537-539

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Optimization of a compact multicusp He^+ ion source for double-charge-exchanged He^+ beam2006

    • Author(s)
      K.Shinto, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 77-03B

      Pages: 512-515

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Optimization of negative ion sources for a heavy-ion-beam probe2006

    • Author(s)
      Y.Matsumoto, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 77-03A

      Pages: 537-539

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Development of an angular-resolved momentum analyzer system to study particle reflections from solid surfaces2006

    • Author(s)
      H.Yamaoka, M.Wada, et. al.
    • Journal Title

      Review of Scientific Instruments 77-03C

      Pages: 301-303

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Dependence of H-extraction probability on filter magnetic field and gas pressure of a volume-type negative ion source2006

    • Author(s)
      Y.Matsumoto, M.Wada, et. al.
    • Journal Title

      Thin Solid Films 506-507

      Pages: 522-526

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Enhancement of extracted H_- current by streaming neutral gas injection2006

    • Author(s)
      A.Mendenilla, M.Wada, et. al.
    • Journal Title

      Thin Solid Films 506-507

      Pages: 527-530

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Grid bias effect upon the negative ion density in a tandem plasma source2006

    • Author(s)
      H.Takahashi, M.Wada, et. al.
    • Journal Title

      Thin Solid Films 506-507

      Pages: 575-578

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Measurement of velocity distributions of neutral particles in a plasma2006

    • Author(s)
      S.Nishigaito, M.Wada, et. al.
    • Journal Title

      Thin Solid Films 506-507

      Pages: 697-700

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Local Neutral Density Enhancement by Streaming Neutral Gas Injection2006

    • Author(s)
      A.Mendenilla, M.Wada, et. al.
    • Journal Title

      Japanese Journal of Applied Physics 45

      Pages: 5936-5939

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] An Investigation as to the Cause of Beam Asymmetry in a Compact Gas Discharge Ion Source:A Focus on Beam-Wall Interaction2006

    • Author(s)
      G.Q.Blantocas, M.Wada, et. al.
    • Journal Title

      Japanese Journal of Applied Physics 45,10B

      Pages: 8325-8530

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Numerical Simulation of Ion Extraction from a Negative Hydrogen Ion Source2006

    • Author(s)
      S.Nishigaito, M.Wada, et. al.
    • Journal Title

      Journal of Korean Physical Society 49Sppl.I

      Pages: S393-S397

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Effects of bias potential upon H-density near a plasma grid of a negative ion source2006

    • Author(s)
      H. Takahashi, T. Kasuya, M. Wada
    • Journal Title

      Review of Scientific Instruments 77/3

      Pages: 03A513-515

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Local Neutral Density Enhancement by Streaming Neutral Gas Injection2006

    • Author(s)
      Alexander G. Mendenilla, Toshiro Kasuya, Motoi Wada
    • Journal Title

      Japanese Journal of Applied Physics. Vol.45, Part 1, No.7

      Pages: 5936-5939

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] プローブ計測の基礎から応用まで2005

    • Author(s)
      雨宮 宏, 和田 元, et. al.
    • Journal Title

      プラズマ核融合学会誌 81

      Pages: 482-523

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Ion sources for fusion plasma diagnostics2005

    • Author(s)
      M.Sasao, M.Wada, et. al.
    • Journal Title

      IEEE Transaction on Plasma Science 33

      Pages: 1872-1900

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Ion beams and their applications in high-resolution probe formation2005

    • Author(s)
      S.K.Guharay, M.Wada, et. al.
    • Journal Title

      IEEE Transaction on Plasma Science 33

      Pages: 1911-1930

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Ion sources for fusion plasma diagnostics2005

    • Author(s)
      M. Sasao, K. A. Connor, K. Ida, H. Iguchi, A. A. Ivanov, M. Nishiura, D. M. Thomas, M. Wada, M. Yoshinuma
    • Journal Title

      IEEE Transaction on Plasma Science Volume : 33

      Pages: 1872-1900

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Ion beams and their applications in high-resolution probe formation2005

    • Author(s)
      S. K. Guharay, J. Orloff, M. Wada
    • Journal Title

      IEEE Transaction on Plasma Science Volume : 33

      Pages: 1911-1930

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] A DC Plasma Chemical Vapor Deposition Chamber Utilizing a Striaming Neutral Gas Injection Cathode2007

    • Author(s)
      A. G. Mendenilla, G. Malapit, M. Wada
    • Organizer
      25th Philippines Physics Congress, UP Los Banos
    • Place of Presentation
      Laguna, Philippines
    • Year and Date
      20071000
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] COMPACT EXB MASS SEPARATOR FOR HEAVY ION BEAMS2007

    • Author(s)
      M. Wada, T. Hashino, T. Kasuya, Y. Sakamoto, M. Nishiura
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      20070800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] H2(V) MOLECULE FORMATION ON SURFACES IN LOW PRESSURE DISCHARGES/NEGATIVE ION SOURCES2007

    • Author(s)
      M. Bacal, M. Glass-Maujean, A. A. Ivanov Jr, M. Nishiura, M. Sasao, M. Wada
    • Organizer
      INTERNATIONAL ASTROPHYSICS AND ASTROCHEMISTRY MEETING
    • Place of Presentation
      Molecules in Space & Laboratory, Paris
    • Year and Date
      20070500
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Photoelectric work funciton measurement of an electfode in a low pressure Hg discharge lamp2007

    • Author(s)
      Hitoshi Kozakura, Shigeo Gotoh, Toshiro Kasuya, Motoi Wada
    • Organizer
      11th International Symposium on the Science and Technology of Light Sources
    • Place of Presentation
      Shanghai
    • Year and Date
      20070500
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] A dc plasma chemical vopor deposition chamber utilizing a streaming neutral gas injection cathode2007

    • Author(s)
      A.G.Mendenilla, M.Wada, et. al.
    • Organizer
      25th Philippines Physics Congress
    • Place of Presentation
      Los Banos,Philippines
    • Year and Date
      2007-10-11
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Negative ion production in cesium seedd high electron temperature plasmas2007

    • Author(s)
      T.Inoue, M.Wada, et. al.
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju,Korea
    • Year and Date
      2007-08-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Simulation studies on the evolution of gallium nitride on a liquid gallium surface under nitrogen plasma bombardment based on a plasma sputter type ion source system2007

    • Author(s)
      M.R.Vasquez, M.Wada, et. al.
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju,Korea
    • Year and Date
      2007-08-28
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Compact EXB mass separator for heavy ion beams2007

    • Author(s)
      M.Wada, et. al.
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju,Korea
    • Year and Date
      2007-08-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Photodetachment diagnostics of a volume production type negative ion sourcewith a DC laser2007

    • Author(s)
      Y.Matsuda, M.Wada, et. al.
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju,Korea
    • Year and Date
      2007-08-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Compact 2.45 GHz microwave ion/radical source2007

    • Author(s)
      Y.Sakamoto, M.Wada, et. al.
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju,Korea
    • Year and Date
      2007-08-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Time of flight analyzer system to detect reflected particles from a solid surface following low energy particle injection2007

    • Author(s)
      H.Yamaoka, M.Wada, et. al.
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju,Korea
    • Year and Date
      2007-08-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Effects upon H-transport due to electrical bias on a plasma electrode of a volume production type H-on source2007

    • Author(s)
      Y.Matsumoto, M.Wada, et. al.
    • Organizer
      International Conference on Ion Sources
    • Place of Presentation
      Jeju,Korea
    • Year and Date
      2007-08-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Temporal Evolution of a Probe Current in an Oxygen Plasma upon Irradiation of a DC Laser Light2007

    • Author(s)
      Y.Matsuda, M.Wada, et. al.
    • Organizer
      Symposium on Plasma Science for Materials
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-06-21
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Effect of Ni Catalyst on Growth of Multi-Walled Carbon Nanotubes in an Compact Capacitively Coupled Plasma Source2007

    • Author(s)
      Y.Sakamoto, M.Wada, et. al.
    • Organizer
      Symposium on Plasma Science for Materials
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-06-21
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Photoelectric work funciton measurement of and electfode in a low pressure Hg discharge lamp2007

    • Author(s)
      H.Kozakura, M.Wada, et. al.
    • Organizer
      International Conference on Light Sources
    • Place of Presentation
      Shanghai,China
    • Year and Date
      2007-05-23
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] H_2(ν") MOLECULE FORMATION ON SURFACES IN LOW PRESSURE DISCHARGES/NEGATIVE ION SOURCES2007

    • Author(s)
      M.Bacal, M.Wada, et. al.
    • Organizer
      Molecules in Space & Laboratory
    • Place of Presentation
      Paris,France
    • Year and Date
      2007-05-15
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Particle reflections of low energy light ions from a vanadium alloy(V-4Cr-4Ti)2006

    • Author(s)
      H. Yamaoka, N. Tanaka, Y Matsumoto, M. Nishiura, K. Tsumori, S, Takeuchi, H. Sugawara, K. Shinto, A. Okamoto, M. Sasao, M. Wada
    • Organizer
      17th International Conference on Plasma Surface Interaction in Controlled Fusion Devices
    • Place of Presentation
      Hefei, China
    • Year and Date
      20060500
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Effects of bias potential upon H-density near a plasma grid of a negative ion source2005

    • Author(s)
      H. Takahashi, T. Kasuya, M. Wada
    • Organizer
      International Conference on Ion Sources, Cean.
    • Place of Presentation
      France
    • Year and Date
      20050900
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Degradation of Carbon Nanotube Growth and its Field Emission Characteristics Due to Substrate-bias Effects2005

    • Author(s)
      A. Mendenilla, R. Fujitsuka, Y. Oguchi, T. Kasuya, M. Wada
    • Organizer
      The 18th Symposium on Plasma Science for Materials
    • Place of Presentation
      Tokyo
    • Year and Date
      20050600
    • Description
      「研究成果報告書概要(欧文)」より
  • [Patent(Industrial Property Rights)] イオンプレーティング方法および装置2007

    • Inventor(s)
      和田 元, 前野 修一, 井上 多加志
    • Industrial Property Rights Holder
      同志社
    • Industrial Property Number
      特願2007-144706
    • Filing Date
      2007-05-31
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 活性度制御式窒素化合物MBE成膜方法及び装置2007

    • Inventor(s)
      大鉢 忠, 和田 元, 有屋 田修
    • Industrial Property Rights Holder
      同志社
    • Industrial Property Number
      特願2007-286231
    • Filing Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 原子フラックス測定装置2007

    • Inventor(s)
      大鉢 忠, 和田 元, 有屋 田修
    • Industrial Property Rights Holder
      同志社
    • Industrial Property Number
      特願2007-323345
    • Filing Date
      2007-12-14
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2010-02-04  

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