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2006 Fiscal Year Final Research Report Summary

Zinc Oxide-Based Semiconductor Quasi Alloys Exhibiting p-Type Conductivity

Research Project

Project/Area Number 17360010
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKyoto University

Principal Investigator

FUJITA Shizuo  Kyoto University, International Innovation Center, Professor (20135536)

Project Period (FY) 2005 – 2006
Keywordszinc oxide / p-type / quasi alloy / superlattice / doping / molecular beam epitaxy / cupper-based oxide thin film / wide band gap semiconductor
Research Abstract

The objective of this research is to realize p-type Zn(Mg)O quasialloys, which consist with superlattices of p-type wide band gap oxide semiconductors and Zn(Mg)O thin films, and can be coherently grown on Zn(Mg)O. Zn(Mg)O semiconductors, being supported by their unique excitonic properties, have attracted increasing attentions toward their applications to ultraviolet optical devices such as light emitting diodes. However, the difficulty in achieving p-type conductivity has significantly obstructed their applications. This research, based on our original technologies, contributes to offer the breakthroughs to overcome the above problems and to promote the device applications of Zn(Mg)O semiconductors.
As candidate materials with which Zn(Mg)O forms superlattices, we considered cupper-based oxides such as CuO, Cu_2O, CuInO_2, CuGaO_2, and CuAlO_2. These materials exhibit p-type conductivity and their shapes of crystal planes are similar to that of c-axis oriented hexagonal ZnO. Among them, an attention has been focused on CuGaO_2 because of its wide band gap energy of 3.6eV, delafossite crystal structure that can be matched to c-faces of ZnO, and small lattice mismatch, smaller than 1%, to ZnO.
The crystal growth has been done by molecular beam epitaxy (MBE). The irradiation of Cu and O resulted in CuO films. The CuO crystal takes cubic structure but a very thin film on ZnO has grown coherently to ZnO keeping hexagonal structure. However, no p-type conductivity was confirmed with CuO. On the other hand, the irradiation of Ga and O formed Ga_2O_3. This has very wide band gap of close to 5eV and exhibited sharp absorption edges. The alloys of both materials, CuGaO_2, showed p-type conductivity with the carrier concentration of 9×10^<14>cm^<-3> and Hall mobility of 3. 5cm^2/Vs. This result was successfully followed by p-type CuGaO_2/ZnO superlattices with the carrier concentration of the order of 10^<14>cm^<-3>.

  • Research Products

    (14 results)

All 2007 2005

All Journal Article (4 results) (of which Peer Reviewed: 2 results) Presentation (9 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Roles of hydrogen and nitrogen in p-type doping of ZnO2007

    • Author(s)
      J.G.-Lu
    • Journal Title

      Chemical Physics Letters 441

      Pages: 68-71

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Ga_2O_3 thin film growth on c-plane sapphire substrates by molecular beam epitaxy for deepultraviolet photodetectors2007

    • Author(s)
      T.Oshima
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 7217-7220

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Roles of hydrogen and nitrogen in p-type doping of ZnO2007

    • Author(s)
      JG.-Lu, S. Fujita
    • Journal Title

      Chemical Physics Letters Vol.441(1-3)

      Pages: 68-71

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Ga_2O_3 thin film growth on c-plane sapphire substrates by molecular beam epitaxy for deep-ultraviolet photodetecters2007

    • Author(s)
      T. Oshima, T. Okuno, S. Fujita
    • Journal Title

      Japanese Journal of Applied Physics vol.46 No, 11

      Pages: 7217-7220

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] MBE gxowth and characterization of Ga_2O_3 and (InCa)_2O_3 films with ultraviolet optical functions2007

    • Author(s)
      T.Oshima
    • Organizer
      49th Electronic Materials Conference
    • Place of Presentation
      Notre Dame
    • Year and Date
      2007-06-22
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] MBE growth and characterization of Ga_20_3 and(InGa)_20_3 films with ultraviolet optical functions2007

    • Author(s)
      T. Oshima, T. Okuno, S. Fujita
    • Organizer
      49th Electronic Materials Conference
    • Place of Presentation
      Note Dame
    • Year and Date
      2007-06-22
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Properties of N-doped ZnO thin films in annealing process2007

    • Author(s)
      J.-G.Lu
    • Organizer
      2007 European Materials Research Society(E-MRS)Spring Meeting
    • Place of Presentation
      Strasbourg
    • Year and Date
      2007-05-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] MBE gxowth and characterization of Ga_2 O_3 and (InCa)_2O_3 films for ultraviolet applications2007

    • Author(s)
      T.Oshima
    • Organizer
      211th Electrochemical Society Meeting
    • Place of Presentation
      Chicago
    • Year and Date
      2007-05-07
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] MBE growth and characterization of(In_xGa_<1-x>)_2O_3 this films(in Japanese)2007

    • Author(s)
      T. Oshima, S. Fujita
    • Organizer
      211th Electrochemical Society Meeting
    • Place of Presentation
      Chicago
    • Year and Date
      2007-05-07
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 酸化亜鉛系半導体ナノ構造2007

    • Author(s)
      藤田 静雄
    • Organizer
      2007年春季第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] MBEによる(In_xGa_<1-x>_2O3_薄膜の成長2007

    • Author(s)
      大島 孝仁
    • Organizer
      2007年春季第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] ZnO-based nanostructures(in Japanese)2007

    • Author(s)
      S. Fujita
    • Organizer
      54th Meeting of Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Aoyama Gakuin Univ
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] MBE growth of(In_xGa_<1-x>i-.)_20_3 this films(in Japanese)2007

    • Author(s)
      T. Oshima, S. Fujita
    • Organizer
      54th Meeting of Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Aoyama Gakuin Univ
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(欧文)」より
  • [Patent(Industrial Property Rights)] p型ワイドギャップ半導体2005

    • Inventor(s)
      藤田 静雄, 外3名
    • Industrial Property Rights Holder
      国立大学法人京都大学
    • Industrial Property Number
      特許出願2005-223846
    • Filing Date
      2005-08-02
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2010-02-04  

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