Synhesis of Semiconducting Silicides Thin Films far Phothnic Crystals and Investigation of Optical Circuit functions

2007 Fiscal Year Final Research Report Summary

• Project/Area Number: 17360011
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied materials science/Crystal engineering
• Research Institution: Kyoto University
• Principal Investigator: MAEDA Yoshihito Kyoto University, Graduate School of Energy Science, Associate Professor (50275286)
• Co-Investigator(Kenkyū-buntansha): TERAI Yoshikazu Osaka University, Graduate Schcol of Engineering, Assistant Professor (90360049)
• Project Period (FY): 2005 – 2007
• Keywords: Photonic crystal / Semiconducting silicide / Optical circuit / Magnetic silicide / Photonics / Iron silicide / Thin film / Crystal growth

Research Abstract

The optoelectronic integrated circuit (OEIC) on Si substrates which was composed from light emitting devices, photodiodes, light waveguides, some optical computing or logic circuits will be realized in near future. Now optimized materials and material processing are investigating, actively for its prompt realization. The first generation OEICs are composed from hybrid structures where integrated light sources, light detectors and some signal processors are connected with optical fibers. The next generation OEIC will be composed from optical circuits which have some optical performances and computing on Si substrates. In the Si-OEIC, photonic crystals have been expected to be main optical computing units.
In this research project, we have investigated fundamental properties of semiconducting silicides and ferromagnetic silicides towards application to photonic crystals, a high quality thin film synthesis, submicron processes required for fabrication of two dimensional photonic crystals, and analysis method for wave propagation on high index contrast photonic crystals.
For three years project, we have succeeded in synthesis of highly optical grade silicide thin films, establishment of submicron etching processes compatible with Si LSI processes, formation of waveguides on iron silicide photonic crystals, invention of conjugated inversion structures for improvement of coupling efficiency between different index structures, and examination of efficiency of light propagation on iron silicide photonic crystals fabricated in this project. These fruitful results achieved in this project will open Si based photonics using high index contrast materials with excellent optoelectronic functions. Moreover, we have brought these results pioneer area magneto-photonic crystals where light can be controlled by strong magnetic coupling with light (magneto-optical effects).

Research Products

• [Journal Article] Luminescence properties of β-FeSi_2 and its application to photonics (2008)
  • Author(s): Y. Maeda
  • Journal Title: Applied Surface Science (印刷中)
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals (2007)
  • Author(s): A. Imai, S. Kunimatsu, K. Akiyama, Y. Terai, and Y. Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8162-8165
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Semiconducting β-FeSi_2 towards optoelectronics and photonics (2007)
  • Author(s): Y. Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8118-8121
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Photoluminescence enhancement by isolating β-FeSi_2 layer from defective layer (2007)
  • Author(s): Y. Ando, A. Imai, K. Akiyama, Y. Terai and Y. Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8133-8135
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Carrier control of β-FeSi_2 by 1.2MeV-Au^<++> ion irradiation (2007)
  • Author(s): T. Jonishi, Y. Ando, A. Imai and Y. Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8175-8178
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence measurements (2007)
  • Author(s): Y. Terai, Y. Maeda, and Y. Fujiwara
  • Journal Title: Thin Solid Films 515 Pages: 8129-8132
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Control of β-FeSi_2/Si interface structure by Cu layer (2007)
  • Author(s): K. Akiyama, M. Itakura, S. Kaneko, H. Funakubo and Y. Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8144-8148
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Axial orientation of molecular-beam-epitaxy grown Fe_3Si/Ge hybrid structures and its degradation (2007)
  • Author(s): Y. Maeda, T. Jonishi, K. Narumi, Y. Ando, K. Ueda, M. Kumano, T. Sadoh, and M. Miyao
  • Journal Title: Appl. Phys. Lett. 91 Pages: 171910(1)-(3)
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] 共役反転格子フォトニック結晶での導波解析 (2007)
  • Author(s): 國松俊佑, 寺井慶和, 前田佳均
  • Journal Title: 電子情報通信学会技術研究報告.シリコン材料・デバイス 107 Pages: 39-42
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Fe_3Si/Ge(111)ヘテロエピタキシャル成長の軸配向性の評価 (2007)
  • Author(s): 平岩佑介, 佐道泰造, 宮尾正信, 鳴海一雅, 前田佳均
  • Journal Title: 電子情報通信学会技術研究報告.シリコン材料・デバイス 107 Pages: 35-38
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] 強磁性体シリサイド/Geの低温エピタキシャル成長とスピントランジスタ (2007)
  • Author(s): 安藤裕一郎, 上田公二, 熊野守, 佐道泰造, 鳴海一雅, 前田佳均, 宮尾正信
  • Journal Title: 電子情報通信学会技術研究報告.シリコン材料・デバイス(Proceedings of the 15th AWAD 2007) 107 Pages: 221-224
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals (2007)
  • Author(s): A., Imai, S., Kunimatsu, K., Akiyama, Y., Terai, Y., Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8162-8165
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Semiconducting β-FeSi_2 towards optoelectronics and photonics (2007)
  • Author(s): Y., Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8118-8121
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Carrier control of β-FeSi_2 by 1.2MeV-Au++ ion irradiation (2007)
  • Author(s): T., Jonishi, Y., Ando, A., Imai, Y., Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8175-8178
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Photoluminescence enhancement by isolating β-FeSi_2 layer from defective layer (2007)
  • Author(s): Y., Ando, A.,_Imai, K., Akiyama, Y., Terai, Y., Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8133-8135
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence (2007)
  • Author(s): Y., Terai, Y., Maeda, Y., Fujiwara
  • Journal Title: Thin Solid Films 515 Pages: 8129-8132
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Control of β-FeSi_2/Si interface structure by Cu layer (2007)
  • Author(s): K., Akiyama, M., Itakura, S., Kaneko, H., Funakubo, Y., Maeda
  • Journal Title: Thin Solid Films 515 Pages: 8144-8148
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Axial orientation of molecular-beam-epitaxy grown Fe_3Si/Ge hybrid structures and its degradation (2007)
  • Author(s): Y., Maeda, T., Jonishi, N., Narumi, Y., Ando, K., Ueda, M., Kumano, T., Sadoh, M., Miyao
  • Journal Title: Appl. Phys. Lett 91 Pages: 171910-1-3
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Analysis of wave propagation in conjugated inversion photonic crystals (2007)
  • Author(s): S., Kunimatsu, Y., Terai, Y., Maeda
  • Journal Title: IEIC Technical Report 107 Pages: 39-42
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Axial orientation of enitaxial growth of Fe_3Si on Ge(111) (2007)
  • Author(s): Y., Hiraiwa, T., Sadoh, M., Miyao, K., Narumi, Y., Maeda
  • Journal Title: IEIC Technical Report 107 Pages: 35-38
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Low temperature epitaxy of ferromagnetic silicide on Ge and spin transistors (2007)
  • Author(s): Y., Ando, K., Ueda, M., Kumano, T., Sadoh, K., Narumi, Y., Maeda, M., Miyao
  • Journal Title: IEIC Technical Report 107 Pages: 221-224
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] 鉄シリサイド・高屈折率フォトニック結晶の作製:反応性イオンエッチングによるサブミクロン微細加工 (2006)
  • Author(s): 今井章文, 寺井慶和, 前田佳均
  • Journal Title: (社)応用物理学会シリサイド半導体研究会・技術研究報告 AP-063211 Pages: 28-41
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals (2006)
  • Author(s): A. Imai and Y. Maeda
  • Journal Title: Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology 1 Pages: 26-27
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals (2006)
  • Author(s): S. Kunimatsu, A. Imai, Y. Ando, and Y. Maeda
  • Journal Title: Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology 1 Pages: 54-55
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Semiconducting(β-FeSi_2 towards optoelectronics and photonics (2006)
  • Author(s): Y. Maeda
  • Journal Title: Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology 1 Pages: 5-7
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Fe系シリサイドによるフォトニック結晶の作製 (2006)
  • Author(s): 國松俊佑, 今井章文, 秋山賢輔, 前田佳均
  • Journal Title: 電子情報通信学会技術研究報告.シリコン材料・デバイス 106 Pages: 7-10
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] β-FeSi_2のイオンビーム合成:アニールによるSi空孔の変化 (2006)
  • Author(s): 上西隆文, 安藤裕一郎, 前田佳均
  • Journal Title: 電子情報通信学会技術研究報告.シリコン材料・デバイス 106 Pages: 11-14
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Reactive ion etching of β-FeSi_2/Si and fabrication of two dimensional photonic crystals (2006)
  • Author(s): A. Imai, Y. Ando, K. Akiyama, Y. Terai, and Y. Maeda
  • Journal Title: Proceedings of the 16th International Microscopic Congress II Pages: 1349(1)
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Fabrication of silicide photonic crystals with high index contrast by reactive ion etching (2006)
  • Author(s): A., Imai, Y., Terai, Y., Maeda
  • Journal Title: Research Report on Semiconducting Silicides, JSAP 063211 Pages: 28-41
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards photonic crystals (2006)
  • Author(s): A., Imai, Y., Maeda
  • Journal Title: Proceedings of Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006) 1 Pages: 26-27
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals (2006)
  • Author(s): S., Kunimatsu, A., Imai, Y., Ando, Y., Maeda
  • Journal Title: Proceedings of Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006) 1 Pages: 54-55
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Semiconducting β-FeSi_2 towards optoelectronic and photonics (2006)
  • Author(s): Y., Maeda
  • Journal Title: Proceedings of Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006) 1 Pages: 5-7
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Fabrication of iron-silicide photonic crystals (2006)
  • Author(s): S., Kunimatsu, A., Imai, K., Akiyama, Y., Maeda
  • Journal Title: IEIC Technical Report 106 Pages: 7-10
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Ion-beam synthesis of β-FeSi_2 : Vacancy change by annealing (2006)
  • Author(s): T., Jonishi, Y., Ando, Y., Maeda
  • Journal Title: IEIC Technical Report 106 Pages: 11-14
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Reactive ion etching of β-FeSi_2/Si and fabrication of two dimensional photonic crystals (2006)
  • Author(s): A., Imai, Y., Ando, K., Akiyama, Y., Terai, Y., Maeda
  • Journal Title: Proceedings of the 16th International Microscopic Congress, II Pages: 1349-1349
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] β-FeSi_2の1.55μm発光増強 (2005)
  • Author(s): 安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
  • Journal Title: 電子情報通信学会技術研究報告(IEIC Technical Report) SDM205-201-223 Pages: 113-117
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] 環境に優しい光半導体:β-FeSi_2 (2005)
  • Author(s): 前田佳均
  • Journal Title: 日本金属学会誌 まてりあ 44・6 Pages: 471-476
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] 鉄シリサイド半導体の基礎と応用 (2005)
  • Author(s): 前田佳均
  • Journal Title: 機能材料 25・9 Pages: 5-14
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] Epitaxial growth of Al-doped(β-FeSi_2 on Si by ion beam synthesis (2005)
  • Author(s): Y. Maeda, Y. Terai, and M. Itakura
  • Journal Title: Jpn. J. Appl. Phys. 44 Pages: 2502-2505
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] 1.54μm photoluminescence enhancement in β-FeSi_2 by surface oxidation (2005)
  • Author(s): Y. Maeda and Y. Terai
  • Journal Title: Jpn. J. Appl. Phys. 44 Pages: 2492-2495
  • Description: 「研究成果報告書概要(和文)」より
  • Peer Reviewed
• [Journal Article] 1.55 μm Photoluminescence enhancement of β-FeSi_2 (2005)
  • Author(s): Y., Ando, A., Imai, Y., Maeda, Y., Terai, K., Akiyama
  • Journal Title: IEIC Technical Report 205-201-223 Pages: 113-117
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Ecologically friendly optical semiconductor : β-FeSi_2 (2005)
  • Author(s): Y., Maeda
  • Journal Title: Materia 44-6 Pages: 471-476
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Fundamental properties of iron silicides and their applications (2005)
  • Author(s): Y., Maeda
  • Journal Title: Functional Materials 25-9 Pages: 5-14
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Epitaxial growth of Al-doped β-FeSi_2 on Si by ion beam synthesis (2005)
  • Author(s): Y., Maeda, Y., Terai, Y., Itakura
  • Journal Title: Jpn. J. Appl. Phys 44 Pages: 2502-2505
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] 1.54μm photoluminescence enhancement in β-FeSi_2 by surface oxidation (2005)
  • Author(s): Y., Maeda, Y., Terai
  • Journal Title: Jpn. J. Appl. Phys 44 Pages: 2492-2495
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Luminescence properties of β-FeSi_2 and its application to photonics
  • Author(s): Y., Maeda
  • Journal Title: Applied Surface Science (in press)
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] β-FeSi2の遠赤外分光と発光特性 (2008)
  • Author(s): 前田佳均, 平岩佑介
  • Organizer: 第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学
  • Year and Date: 2008-03-30
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Far-IR study of β-FeSi_2 and photoluminescence properties (2008)
  • Author(s): Y., Maeda, Y., Hiraiwa
  • Organizer: The 55th JSAP Spring Meeting
  • Place of Presentation: Nihon University
  • Year and Date: 2008-03-30
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Xeマーカーを用いたFe_3Si/Ge界面での相互拡散の検討 (2008)
  • Author(s): 平岩佑介, 安藤裕一郎, 佐道泰造, 宮尾正信, 前田佳均
  • Organizer: 第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学
  • Year and Date: 2008-03-29
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Investigation of interdiffusion at Fe_3Si/Ge by Xe marker (2008)
  • Author(s): Y., Hiraiwa, Y., Ando, T., Sadoh, M., Miyao, Y., Maeda
  • Organizer: The 55th JSAP Spring Meeting
  • Place of Presentation: Nihon University
  • Year and Date: 2008-03-29
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] RBS study of epitaxial growth of ferromagnetic Fe_3Si on Ge (2007)
  • Author(s): Y. Ando, T. Jonishi, K. Ueda, T. Sadoh, M. Miyao, and Y. Maeda
  • Organizer: European Materials Research Society
  • Place of Presentation: Strasbourg, France
  • Year and Date: 20070528-0601
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Submicron sized fabrication of iron silicides for their applications to photonic crystals (2007)
  • Author(s): A. Imai, S. Kunimatsu, Y. Ando, Y. Terai, and Y. Maeda
  • Organizer: European Materials Research Society
  • Place of Presentation: Strasbourg, France
  • Year and Date: 20070528-0601
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Enhancement of photoluminescence from ion-beam synthesized β-FeSi_2/Si (2007)
  • Author(s): T. Jonishi, Y. Ando, and Y. Maeda
  • Organizer: European Materials Research Society
  • Place of Presentation: Strasbourg, France
  • Year and Date: 20070528-0601
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] RBS study of epitaxial growth of ferromagnetic Fe_3Si on Ge (2007)
  • Author(s): Y., Ando, T., Jonishi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
  • Organizer: European MRS Spring Meeting
  • Place of Presentation: Strasbourg, France
  • Year and Date: 20070528-0601
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Submicron sized fabrication of iron silicides for their applications to photonic crystals (2007)
  • Author(s): A., Imai, S., Kunimatsu, Y., Ando, Y., Teral, Y., Maeda
  • Organizer: European MRS Spring Meeting
  • Place of Presentation: Strasbourg, France
  • Year and Date: 20070528-0601
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Enhancement of photoluminescence from ion-beam synthesized β-FeSi_2 (2007)
  • Author(s): T., Jonishi, Y., Ando, Y., Maeda
  • Organizer: European MRS Spring Meeting
  • Place of Presentation: Strasbourg, France
  • Year and Date: 20070528-0601
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] 共役反転格子フォトニック結晶での導波解析 (2007)
  • Author(s): 國松俊佑, 寺井慶和, 前田佳均
  • Organizer: 電子情報通信学会, SDM, シリコン材料・デバイス研究会
  • Place of Presentation: 奈良先端科学技術大学
  • Year and Date: 2007-12-24
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Analysis of wave propagation on photonic crystals with conjugated Inversion interface structures (2007)
  • Author(s): S., Kunimatsu, Y., Terai, Y,. Maeda
  • Organizer: IEIC SDM Meeting
  • Place of Presentation: Nara Institute Technology
  • Year and Date: 2007-12-24
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Luminescence of β-FeSi_2 and application to photonics (2007)
  • Author(s): Y. Maeda
  • Organizer: Fifth International Symposium on Control of Semiconductor Interfaces(ISCSI-V)
  • Place of Presentation: 首都大学東京
  • Year and Date: 2007-11-13
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Diffusion behavior in Fe_3Si/Ge hybrid structures and related degradation of axial orientation (2007)
  • Author(s): Y. Hiraiwa, T. Jonishi, Y. Ando, K. Narumi, M. Kumano, K. Ueda, T. Sadoh, M. Miyao, and Y. Maeda,
  • Organizer: Fifth International Symposium on Control of Semiconductor Interfaces(ISCSI-V)
  • Place of Presentation: 首都大学東京
  • Year and Date: 2007-11-13
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Luminescence of β-FeSi_2 and application to photonics (2007)
  • Author(s): Y., Maeda
  • Organizer: Fifth International Symposium on Control of Semiconductor Interface (ISCSI-V)
  • Place of Presentation: Tokyo Met. University
  • Year and Date: 2007-11-13
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] 「研究成果報告書概要(欧文)」より (2007)
  • Author(s): Y., Hiraiwa, T., Jonishi, Y., Ando, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
  • Organizer: Fifth International Symposium on Control of Semiconductor Interface (ISCSIV)
  • Place of Presentation: Tokyo Met. University
  • Year and Date: 2007-11-13
• [Presentation] 環境材料としての鉄シリサイド系とその応用 (2007)
  • Author(s): 前田佳均
  • Organizer: 応用物理学会九州支部シンポジウム講演
  • Place of Presentation: 九州工業大学
  • Year and Date: 2007-11-10
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Iron-sfficides as ecomaterials and their application (2007)
  • Author(s): Y., Maeda
  • Organizer: JSAP Kyushu-chapter Symposium on Ecomaterials and electronics
  • Place of Presentation: Kyushu Institute of Technology
  • Year and Date: 2007-11-10
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] シリサイド共役反転格子フォトニック結晶での導波解析 (2007)
  • Author(s): 國松俊佑, 寺井慶和, 秋山賢輔, 前田佳均
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] 強磁性体シリサイド(Fe_3Si)/半導体(Ge)ヘテロ界面の原子層制御 (2007)
  • Author(s): 上田公二, 熊野 守, 安藤裕一郎, 佐道泰造, 鳴海一雅, 前田佳均, 宮尾正信
  • Organizer: 第68回応用物理学会学術講演会:講演奨励賞受賞講演
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Fe_3Si/Geヘテロエピタキシャル成長層の軸配向性の成長温度依存性の考察 (2007)
  • Author(s): 安藤裕一郎, 上西隆文, 鳴海一雅, 熊野 守, 上田公二, 佐道泰造, 前田佳均, 宮尾正信
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Fe_3Si/Geヘテロエピタキシャル界面における相互拡散と軸配向性 (2007)
  • Author(s): 上西隆文, 安藤裕一郎, 平岩佑介, 鳴海一雅, 熊野守, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] MBE法による[Fe_3Si/Ge]_2多層ヘテロエピタキシャル成長の検討 (2007)
  • Author(s): 熊野 守, 安藤裕一郎, 上田公二, 権丈 淳, 佐道泰造, 前田佳均, 宮尾正信
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Analysis of wave propagation on conjugated inversion photonic crystals (2007)
  • Author(s): S., Kunimatsu, Y., Terai, K., Akiyama, Y., Maeda
  • Organizer: The 68th JSAP Fall Meeting
  • Place of Presentation: Hokkaido Institute of Technology
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Atomic layer control of ferromagnetic silicide/semiconductor hetero Structures (2007)
  • Author(s): K., Ueda, M., Kumano, Y., Ando, T., Sadoh, K., Narumi, Y., Maeda, M., Miyao
  • Organizer: The 68th JSAP Fall Meeting
  • Place of Presentation: Hokkaido Institute of Technology
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Growth temperature dependence of axial orientation of Fe_3Si/Ge hetero Structures (2007)
  • Author(s): Y., Ando, T., Jonishi, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, Y., Maeda, M., Miyao
  • Organizer: The 68th JSAP Fall Meeting
  • Place of Presentation: Hokkaido Institute of Technology
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Interdiffusion at Fe_3Si/Ge hetero-interface and its axial orientation (2007)
  • Author(s): T., Jonishi, Y., Ando, Y., Hiraiwa, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
  • Organizer: The 68th JSAP Fall Meeting
  • Place of Presentation: Hokkaido Institute of Technology
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] MBE growth of [Fe_3Si/Ge]. multilayered heterostructures (2007)
  • Author(s): M., Kumano, Y., Ando, K., Ueda, J., Kenjo, T., Sadoh, Y., Maeda, M., Miyao
  • Organizer: The 68th JSAP Fall Meeting
  • Place of Presentation: Hokkaido Institute of Technology
  • Year and Date: 2007-09-07
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] 共役反転フォトニック結晶の導波解析 (2007)
  • Author(s): 國松俊佑, 寺井慶和, 前田佳均
  • Organizer: 応用物理学会・第10回シリサイド系半導体・夏の学校講演会
  • Place of Presentation: 静岡県掛川市
  • Year and Date: 2007-07-29
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Conjugated inversion photonic crystals and wave propagation on them (2007)
  • Author(s): S., Kunimatsu, Y., Terai, Y., Maeda
  • Organizer: The 10th Summer Seminar of JSAP on Semiconducting Silicides
  • Place of Presentation: Kakegawa
  • Year and Date: 2007-07-29
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] 鉄シリサイド・フォトニック結晶 (2007)
  • Author(s): 前田佳均
  • Organizer: 応用物理学会・第10回シリサイド系半導体・夏の学校セミナー
  • Place of Presentation: 静岡県掛川市
  • Year and Date: 2007-07-28
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Iron-silicide photonic crystals (2007)
  • Author(s): Y., Maeda
  • Organizer: The 10th Summer Seminar of JSAP on Semiconducting Silicides
  • Place of Presentation: Kakegawa
  • Year and Date: 2007-07-28
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Atomically controlled hetero-epitaxy of Fe_3Si/SiGe for spintronics application, (2007)
  • Author(s): M. Miyao, T. Sadoh, and Y. Maeda
  • Organizer: The 5th International Conference on Silicon Epitaxy and Heterostructures(ICSI-5)
  • Place of Presentation: Marseilles・France
  • Year and Date: 2007-05-24
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Atomically controlled heteroepitaxy of Fe_3Si/Ge for spintronics application (2007)
  • Author(s): M., Miyao, T., Sadoh, Y., Maeda
  • Organizer: The 5th International Conference on Silicon Epitaxy and Heterostructures (ICSI-5)
  • Place of Presentation: Marseilles. France
  • Year and Date: 2007-05-24
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Fe_3Siリフトオフ法による磁性体フォトニック結晶の作製 (2007)
  • Author(s): 國松俊佑, 今井章文, 寺井慶和, 秋山賢輔, 前田佳均
  • Organizer: 第54回応用物理学会関係連合講演会
  • Place of Presentation: 青山学院大学
  • Year and Date: 2007-03-29
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] RBSによるFe_3Si/Geエピタキシャル成長の評価 (2007)
  • Author(s): 安藤裕一郎, 上西隆文, 西蔭義明, 鳴海一雅, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
  • Organizer: 第54回応用物理学会関係連合講演会
  • Place of Presentation: 青山学院大学
  • Year and Date: 2007-03-29
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Fe_3Siエピタキシャル界面での原子拡散の成長温度依存性 (2007)
  • Author(s): 上西隆文, 安藤裕一郎, 西蔭義明, 鳴海一雅, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
  • Organizer: 第54回応用物理学会関係連合講演会
  • Place of Presentation: 青山学院大学
  • Year and Date: 2007-03-29
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Fabrication of magnet-photonic crystals by lift-off processes of Fe_3Si (2007)
  • Author(s): S., Kunimatsu, A., Imai, Y., Terai, K., Akiyama, Y., Maeda
  • Organizer: The 54th JSAP Spring Meeting
  • Place of Presentation: Aoyama-Gakuin University
  • Year and Date: 2007-03-29
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] RBS study of epitaxial growth of Fe_3Si on Ge (2007)
  • Author(s): Y., Ando, T., Jonishi, Y., Nishikage, K., Narumi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
  • Organizer: The 54th JSAP Spring Meeting
  • Place of Presentation: Aoyama-Gakuin University
  • Year and Date: 2007-03-29
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Growth temperature dependence of atomic diffusion at Fe_3Si/Ge epitaxial interface (2007)
  • Author(s): T., Jonishi, Y., Ando, Y., Nishikage, K., Narumi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
  • Organizer: The 54th JSAP Spring Meeting
  • Place of Presentation: Aoyama-Gakuin University
  • Year and Date: 2007-03-29
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Reactive ion etching of β-FeSi_2 and fabrication of two dimensional photonic crystals (2006)
  • Author(s): A., Imai, S., Kunimatsu, Y,. Ural, K., Akiyama, Y., Maeda
  • Organizer: The 16th International Microscopic Congress
  • Place of Presentation: Sapporo International Conference Hall
  • Year and Date: 20060903-8
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Enhancement of photoluminescence from ion-beam synthesized β-FeSi_2 Si (2006)
  • Author(s): Y., Ando, T., Jonishi, Y., Terai, Y., Maeda
  • Organizer: The 16th International Microscopic Congress
  • Place of Presentation: Sapporo Inter national Conference Hall
  • Year and Date: 20060903-8
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Reactive ion etching of β-FeSi_2/Si and fabrication of two dimensional photonic crystals (2006)
  • Author(s): A. Imai, S. Kunimatsu, Y. Terai, K. Akiyama, and Y. Maeda
  • Organizer: The 16th International Microscopy Congress
  • Place of Presentation: 札幌国際会議場
  • Year and Date: 20060903-08
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Enhancement of Photoluminescence from Ion-Beam Synthesized β-FeSi_2/Si (2006)
  • Author(s): Y. Ando, T. Jonishi, Y. Terai, and Y. Maeda
  • Organizer: The 16th International Microscopy Congress
  • Place of Presentation: 札幌国際会議場
  • Year and Date: 20060903-08
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Semiconducting β-FeSi_2 towards optoelectronics and photonics (2006)
  • Author(s): Y. Maeda
  • Organizer: Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
  • Place of Presentation: 京都大学
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Photoluminescence enhancement by isolathing β-FeSi_2 layer from defective layer (2006)
  • Author(s): Y. Ando, A. Imai, Y. Terai, K. Akiyama, and Y. Maeda
  • Organizer: Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
  • Place of Presentation: 京都大学
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals (2006)
  • Author(s): S. Kunimatsu, A. Imai, Y. Terai, and Y. Maeda
  • Organizer: Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
  • Place of Presentation: 京都大学
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals (2006)
  • Author(s): A. Imai, S. Kunimatsu, K. Akiyama, Y. Terai, and Y. Maeda
  • Organizer: Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
  • Place of Presentation: 京都大学
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Carrier control of β-FeSi_2 by 1.2MeV-Au^<++> ion irradiation (2006)
  • Author(s): T. Jonishi, Y. Ando, A. Imai and Y. Maeda
  • Organizer: Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
  • Place of Presentation: 京都大学
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence measurements (2006)
  • Author(s): Y. Terai, Y. Maeda, and Y. Fujiwara
  • Organizer: Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
  • Place of Presentation: 京都大学
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Semiconducting β-FeSi_2 towards optoelectronic and photonics (2006)
  • Author(s): Y., Maeda
  • Organizer: Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
  • Place of Presentation: Kyoto University
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Photoluminescence enhancement by isolating β-FeSi_2 layer from defective Layer (2006)
  • Author(s): Y., Ando, A., Imai, K., Akiyama, Y., Terai, Y., Maeda
  • Organizer: Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
  • Place of Presentation: Kyoto University
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals (2006)
  • Author(s): S., Kunimatsu, A., Imai, Y., Ando, Y., Maeda
  • Organizer: Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
  • Place of Presentation: Kyoto University
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals (2006)
  • Author(s): A., Imai, S., Kunimatsu, K., Akiyama, Y., Terai, Y., Maeda
  • Organizer: Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
  • Place of Presentation: Kyoto University
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Carrier control of β-FeSi_2 by 1.2MeV-Au++ ion irradiation (2006)
  • Author(s): T., Jonishi, Y., Ando, A., Imai, Y., Maeda
  • Organizer: Asia-Pacific Conf. on Semiconducting (APAC-SILICIDE 2006)
  • Place of Presentation: Kyoto University
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence (2006)
  • Author(s): Y., Terai, Y., Maeda, Y., Fujiwara
  • Organizer: Asia-Pacific Conf on Semiconducting (APAC-SILICIDE 2006)
  • Place of Presentation: Kyoto University
  • Year and Date: 20060729-31
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Fabrication of iron-silicide photonic crystals (2006)
  • Author(s): S., Kunimatsu, A., Imai, Y., Terai, Y., Maeda
  • Organizer: IEIC SDM Meeting
  • Place of Presentation: Osaka
  • Year and Date: 2006-12-24
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Fe系シリサイドによるフォトニック結晶の作製 (2006)
  • Author(s): 國松俊佑, 今井章文, 寺井慶和, 前田佳均
  • Organizer: 電子情報通信学会, SDM, シリコン材料・デバイス研究会
  • Place of Presentation: 大阪市
  • Year and Date: 2006-11-24
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Siエッチングガスを用いたFe系シリサイドのサブミクロン加工:フォトニク結晶の作製を目指して (2006)
  • Author(s): 今井章文, 寺井慶和, 秋山賢輔, 前田佳均
  • Organizer: 第67回応用物理学会学術講演会:講演奨励賞受賞記念講演
  • Place of Presentation: 立命館大学
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] β-FeSi_2:2次元フォトニック結晶のサイズ誤差の影響 (2006)
  • Author(s): 國松俊佑, 今井章文, 寺井慶和, 前田佳均
  • Organizer: 第67回応用物理学会学術講演会
  • Place of Presentation: 立命館大学
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] あたらしい応用を求めて:高屈折率シリサイド・フォトニック結晶への展開 (2006)
  • Author(s): 前田佳均
  • Organizer: 第67回応用物理学会学術講演会:シンポジウム講演
  • Place of Presentation: 立命館大学
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] β-FeSi_2のイオンビーム合成:Si空孔の変化 (2006)
  • Author(s): 上西隆文, 安藤裕一郎, 前田佳均
  • Organizer: 第67回応用物理学会学術講演会
  • Place of Presentation: 立命館大学
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] 高輝度発光β-FeSi_2のイオンビーム合成:表面偏析のメカニズム (2006)
  • Author(s): 安藤裕一郎, 上西隆文, 今井章文, 前田佳均
  • Organizer: 第67回応用物理学会学術講演会
  • Place of Presentation: 立命館大学
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Submicron fabrication of iron-silicides by Si process gases towards photonic crystals (2006)
  • Author(s): A., Imai, Y., Terai, K., Akiyama, Y., Maeda
  • Organizer: The 67th JSAP Annual Meeting
  • Place of Presentation: Ritsumeikan University
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Two-dimensional β-FeSi_2 photonic crystals : Influence of size error (2006)
  • Author(s): S., Kunimatsu, A., Imai, Y., Terai, Y., Maeda
  • Organizer: The 67th JSAP Fall Meeting
  • Place of Presentation: Ritsumeikan University
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Toawards novel application of silicides : High index contrast photonic crystals (2006)
  • Author(s): Y., Maeda
  • Organizer: The 67th JSAP Fall Symposium
  • Place of Presentation: Ritsumeikan University
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Ion beam synthesis of β-FeSi_2 : Si vacancy-change (2006)
  • Author(s): T., Jonishi, Y., Ando, Y., Maeda
  • Organizer: The 67th JSAP Fall Meeting
  • Place of Presentation: Ritsumeikan University
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Ion beam synthesis of highly efficient light emission β-FeSi_2 : surface segregation mechanism (2006)
  • Author(s): Y., Ando, T., Jonishi, A., Imai, Y., Maeda
  • Organizer: The 67th JSAP Fall Meeting
  • Place of Presentation: Ritsumeikan University
  • Year and Date: 2006-08-30
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] 鉄シリサイド・高屈折率フォトニック結晶の作製 (2006)
  • Author(s): 前田佳均, 今井章文, 寺井慶和, 秋山賢輔
  • Organizer: 応用物理学会・第9回シリサイド系半導体研究会講演会
  • Place of Presentation: 明治大学
  • Year and Date: 2006-03-26
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Fabrication of iron silicide high-index contrast photonic crystals (2006)
  • Author(s): Y., Maeda, A., Imai, Y., Terai, K., Akiyama
  • Organizer: The 9th Meeting of Semiconducting Silicides
  • Place of Presentation: Meiji University
  • Year and Date: 2006-03-26
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] β-FeSi_2フォトニック結晶の作製(I):反応性イオンエッチングの検討 (2006)
  • Author(s): 今井章文, 寺井慶和, 秋山賢輔, 前田佳均
  • Organizer: 第53回応用物理学関係連合会講演会
  • Place of Presentation: 武蔵工業大学
  • Year and Date: 2006-03-25
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] A1ドープβ-FeSi_2の2ステップアニールとフォトルミネッセンス特性 (2006)
  • Author(s): 安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
  • Organizer: 第53回応用物理学関係連合会講演会
  • Place of Presentation: 武蔵工業大学
  • Year and Date: 2006-03-25
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Fabrication of β-FeSi_2 photonic crystals(I) : Reactive ion etching (2006)
  • Author(s): A., Imai, Y., Terai, K., Akiyama, Y., Maeda
  • Organizer: The 53rd JSAP Spring Meeting
  • Place of Presentation: Musashi Institute of Technology
  • Year and Date: 2006-03-25
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] Photoluminescence properties of Al-doped β-FeSi_2 annealed by two-step Processes (2006)
  • Author(s): Y., Ando, A., Imai, Y., Maeda, Y., Terai, K., Akiyama
  • Organizer: The 53rd JSAP Spring Meeting
  • Place of Presentation: Musashi Institute of Technology
  • Year and Date: 2006-03-25
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] β-FeSi2の発光増強 (2005)
  • Author(s): 安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
  • Organizer: 電子情報通信学会, SDM, シリコン材料・デバイス研究会
  • Place of Presentation: 奈良先端科学技術大
  • Year and Date: 2005-12-21
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Enhancement of light emission of β-FeSi_2 (2005)
  • Author(s): Y., Ando, A., Imai, Y., Maeda, Y., Teral, K., Akiyama
  • Organizer: IEIC SDM Meeting
  • Place of Presentation: Nara Institute of Science and Technology
  • Year and Date: 2005-12-21
  • Description: 「研究成果報告書概要(欧文)」より
• [Presentation] シリサイド半導体の展望 (2005)
  • Author(s): 前田佳均, 今井章文, 寺井慶和, 秋山賢輔
  • Organizer: 第8回シリサイド系半導体研究会講演会
  • Place of Presentation: 徳島市民会館
  • Year and Date: 2005-09-12
  • Description: 「研究成果報告書概要(和文)」より
• [Presentation] Perspective technology of semiconducting silicides (2005)
  • Author(s): Y., Maeda, A., Imai, Y., Terai, K., Akiyama
  • Organizer: The 8th Meeting of Semiconducting Silicides
  • Place of Presentation: Tokushima Civic Hall
  • Year and Date: 2005-09-12
  • Description: 「研究成果報告書概要(欧文)」より
• [Book] 日本学術振興会第131委員会編 薄膜ハンドブックー第2版, 4.24 化合物半導体薄膜, (V)Fe-Si薄膜 (2008)
  • Author(s): 前田佳均(分担執筆)
  • Total Pages: 3
  • Publisher: オーム社
  • Description: 「研究成果報告書概要(和文)」より
• [Book] Chapter 4, Section 4.24 Compound semiconductor thin film, (V) Fe-Si thin film (2008)
  • Author(s): Y., Maeda
  • Total Pages: 3
  • Publisher: Thin Film Handbook, Second Edition by Thin Film 131 commission of JSPS, OHM Publishing Co. Ltd
  • Description: 「研究成果報告書概要(欧文)」より
• [Remarks] 「研究成果報告書概要(和文)」より
  • URL: http://www004.upp.so-net.ne.jp/silicide/index.htm