2007 Fiscal Year Final Research Report Summary
Development of Bio-Compatible Piezo-Electric Ultra Thin Film Fabrication Technologies for Implantable Nano-Actuator
| Project/Area Number |
17360055
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Doshisha University (2007)
Osaka Institute of Technology (2005-2006) |
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Principal Investigator |
NAKAMACHI Eiji Doshisha University, Faculty of Life and Medical Science, Professor (60099893)
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| Co-Investigator(Kenkyū-buntansha) |
UEDA Sei Osaka Institute of Technology, Faculty of Engineering, Professor (10176589)
UETSUJI Yasutomo Osaka Institute of Technology, Faculty of Engineering, Associate Professor (00340604)
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| Project Period (FY) |
2005 – 2007
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| Keywords | Bio-Compatibility / Piezoelectric Material / Helicon Wave Plasma Sputtering / ab-initio calculation / Perovsekite Crystal Structure / Material Design / Process Crystallographic Technology / Optimum Fabrication Condition Search |
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| Research Abstract |
In this research, we have developed (1) a crystallographic process design algorithm based on the ab-initio molecular mechanics and the homogenization finite element analyses, (2) a sputtering process technique to generate a newly designed biocompatible piezoelectric material MgSiO_3 for the nano-actuator, and (3) the piezoelectric characterization techniques to qualify the promised functions for a nano-actuator, as described below;
1. Development of ab-initio・triple-scale simulation based bio-compatible piezo-electric material design system: A new biocompatible Perovskite crystal type elastic piezo-electric material was invented by employing a newly developed triple-scale analyses based design system. We found a candidate bio-compatible piezo-electric crystal material MgSiO_3. Further, the process crystallographic analysis algorithm was developed to find an optimum crystal structure of substrates for MgSiO_3 tetragonal structure, such as Ir and Cu.
2. Material process technology developm
… More
ent of a bio-compatible piezo-electric ultra-thin MgSiO_3 film by using Helicon wave sputtering apparatus.
An optimum condition of HWPS fabrication process to generate MgSiO_3 tetragonal perovskite structure was sought by using the experimental design method, the surface response method and the interpolation method. Finally, we found 1) the substrate temperature 613℃, 2) the target ratio 40.2% and the post annealing temperature 663℃.
3. Piezo-electric properties evaluations of a newly fabricated ultra-thin MgSiO_3 film. :
We evaluated piezo-electric properties of MgSiO_3 films by employing (1) the chemical compositions by the XPS, (2) the crystal structure by XRD・EBSD, (3) Surface morphology properties by SEM・AFM and (4) a piezo-electric constant d_<33> by using the AFM piezoelectric tester and a "double-beam" nano-vibration tester. It shows the piezoelectric constant d_<33>=2.70pm/V in the case of the high temperature sputtering, and further d_<33>=29.8pm/V in case of the combined process of low temperature sputtering at 613℃ and high temperature annealing at 663℃. Less
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