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2007 Fiscal Year Final Research Report Summary

Displacement measuring interferometer with picometer resolution from frequency shift using meter definition

Research Project

Project/Area Number 17360062
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionNagaoka University of Technology

Principal Investigator

AKETAGAWA Masato  Nagaoka University of Technology, Mechanical Department, Associate Prof. (10231854)

Co-Investigator(Kenkyū-buntansha) YANAGI Kazuhisa  Nagaoka University of Technology, Mechanical Department, Prof (80108216)
NAMERIKAWA Toru  Kanazawa University, Graduate School of Natural Science and Technology, 准教授 (30262554)
Project Period (FY) 2005 – 2007
Keywordsmeter definition / picometer / interferometer / phase modulation / lock-in detection / null method / frequency / external cavity laser diode
Research Abstract

Meter definition shows the length can be determined from frequency through the speed of light. From the theory, we have developed a displacement measuring interferometer with picometer resolution from frequency shift.
We have developed a phase modulation homodyne interferometer using an electricaloptical-modulator (EOM) and external cavity laser diode (ECLD). In the PMHI, a phase of an incident light from the ECLD is modulated with an EOM and the output signal of a photodiode at the end of interferometer is demodulated with the modulation signal using a lock-in amplifier. From this configuration, it is possible to determine an optical path difference L of wavelength A integer N(mode number) with accuracy of 10 pm or less using the null-method, because the lock-in demodulation can transfer a dark fringe(in the case, L=λN) into a null-cross-point of the lock-in output signal. In the proposed instrument, a displacement of movable mirror can be converted to a frequency shift of the ECLD. The frequency shift of the ECLD is determined from a beat signal between the ECLD and a frequency stabilized He-Ne laser. Using the aid, following results are obtained.
(1) We have examined non-linear interpolation error of a commercial heterodyne interferometer using the proposed method. We clarified that the interpolation error has periodical error corresponding to the wavelength of the light source in the heterodyne interferometer.
(2) We have directly measured a free spectral range (FSR) for a optical path difference of the PMHI using two ECLDs, which are locked at adjacent null-cross-points.
(3) We have measured an air-refractive-index fluctuation from the frequency shift of the ECLD. In the case, the PMHI is made of ultra-low-thermal expansion ceramics. The measured air-refractive-index fluctuation is well coincided with the theoretical one with Ciddor's equation using a temperature, humidity, CO2 contents and air-pressure.

  • Research Products

    (10 results)

All 2008 2007

All Journal Article (4 results) (of which Peer Reviewed: 2 results) Presentation (6 results)

  • [Journal Article] Phase-modulation-homodyne interferometer with 10 picometer resolution using tunable laser diode2007

    • Author(s)
      Masashi Ishige, Fumio Matsuura, M Kawasugi, Masato Aketagawa
    • Journal Title

      International Journal of Precision Engineering and Manufacturing 8

      Pages: 80-84

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Phase modulation homodyne interferometer with picometer resolution using tunable laser diode2007

    • Author(s)
      M. Ishige, F. Matsuura, M. Kawasugi, Y. Hoshino and M. Aketagawa
    • Journal Title

      Proc. of 8th International Symposium on Measurement Technology and Intelligent Instruments(ISMTII 2007)

      Pages: 665-668

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Phase-modulation-homodyne interferometer with 10 picometer resolution using tunable laser diode2007

    • Author(s)
      Masashi, Ishige, Fumio, Matsuura, M, Kawasugi, Masato, Aketagawa
    • Journal Title

      International Journal of Precision Engineering and Manufacturing Vol. 8

      Pages: 80-84

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Phase modulation homodyne interferometer with picometer resolution using tunable laser diode2007

    • Author(s)
      M, Ishige, F, Matsuura, M, Kawasugi, Y, Hoshino, M, Aketagawa
    • Journal Title

      Proc. of 8th International Symposium on Measurement Technology and Intelligent Instruments(ISMTII 2007)

      Pages: 665-668

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Development of laser interferometer with picometer resolution using frequency tunable laser-The 5th report:Compensation of the displacement measurement due to the fluctuation of the air refractive index-2008

    • Author(s)
      TUAN BANH QUOC・星野雄太・石下雅史・小林 健・明田川正人
    • Organizer
      2008年度精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      川崎・明治大学
    • Year and Date
      2008-03-17
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 周波数可変レーザを用いたピコメートル干渉測長法の開発-第4報:広範囲変位計測への展開と制御の最適化-2007

    • Author(s)
      星野雄太・石下雅史・Banh Quoc Tuan・小林 健・明田川正人
    • Organizer
      2007年度精密工学会秋季大会学術講演会講演論文集
    • Place of Presentation
      北海道・旭川市勤労者ホール
    • Year and Date
      2007-09-14
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Development of laser interferometer with picometer resolution using frequency tunable laser -4th report wide range measurement and control optimazation-2007

    • Author(s)
      Yuta, Hoshino, Masashi, Ishige, Banh, Quoc, Tuan, Ken, Kobayashi, Masato, Aketagawa
    • Organizer
      2007 Spring meeting of Japan Society for Precision Engineering
    • Place of Presentation
      Asahikawa
    • Year and Date
      2007-09-14
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 周波数可変レーザを用いたピコメートル干渉測長法の開発(第3報:FSRを直接測定する手法の検証)2007

    • Author(s)
      石下雅史, 河杉正晃, 星野雄太, 明田川正人
    • Organizer
      2007年度精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      東京・芝浦工大
    • Year and Date
      2007-03-20
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Development of laser interferometer with picometer resolution using frequency tunable laser -3rd report direct determination of FSR-2007

    • Author(s)
      Masashi, Ishige, Masaaki, Kawasugi, Yuta, Hoshino, Masato, Aketagawa
    • Organizer
      2007 Spring meeting of Japan Society for Precision Engineering
    • Place of Presentation
      Tokyo
    • Year and Date
      2007-03-20
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Development of laser interferometer with picometer resolution using frequency tunable laser-The 5th report: Compensation of the displacement measurement due to the fluctuation of the air refractive index-2007

    • Author(s)
      Banh, Quoc, Tuan, Yuta, Hoshino, Masashi, Ishige, Ken, Kobayashi, Masato, Aketagawa
    • Organizer
      2007 Spring meeting of Japan Society for Precision Engineering
    • Place of Presentation
      Kawasaki
    • Year and Date
      2007-03-17
    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2010-02-04  

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