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2007 Fiscal Year Final Research Report Summary

Study on nano-scale thermophysical properties measurement method with Scanning Thermal Microscope

Research Project

Project/Area Number 17360094
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thermal engineering
Research InstitutionMeiji University (2006-2007)
Tokyo Institute of Technology (2005)

Principal Investigator

NAKABEPPU Osamu  Meiji University, Department of Mechanical Engineering, Professor (50227873)

Project Period (FY) 2005 – 2007
KeywordsSThM / Thermal Conductivity / MEMS / Cantilever probe / Contact thermal conductance
Research Abstract

This research aims to develop the local thermal conductivity measurement method with nano-scale spatial resolution on the scanning thermal microscope. With fabricating the multi-functional micro cantilever probe, its performance has been experimentally examined. The cantilever has 2 micron thick and 600 micron long body of SiO2, and five thermal devices on it. There is electrode of contact thermocouple at the end of the probe for detecting the contact temperature, Pt thin film heater for calibrating heat flow sensor next, thermopile sensor for detecting heat flow along the cantilever, thin film thermocouple for measuring cantilever body temperature and another heater for controlling the body temperature near Si base plate. For the local thermal conductivity measurement with high-accuracy, it is required to measure the contact thermal conductance and the contact temperature simultaneously with high accuracy. The cantilever probe developed in the research enable to calibrate the thermopi … More le heat flow sensor with known heating of the Pt heater, and to identifying thermoelectricmotive force of the thin film thermocouple by using temperature dependency of the heaters. Improvement in accuracy was conducted by eliminating the common ambiguity of the micro-fabricated sensors and introducing the self-calibration functions. It can lead the improvement in thermal conductivity measurement.
Following results were obtained by attaching the cantilever probe on the SThM based on the AFM and operating under vacuum condition of below 10^<-4> Pa. The active thermometry, where thermal feedback compensates temperature difference between the cantilever and sample, can be available with higher sensitivity than a previous thermometry probe. Thermal conductance imaging with high spatial resolution can be also available by constantly heating the Pt heater near the tip and monitoring the heat flow from the probe to the sample with the thermopile sensor. Furthermore, the contact temperature is measured with the contact thermocouple at the tip by contacting the probe with the sample coated with gold thin film. It shows that the simultaneous measurement of the thermal conductance and the contact temperature is possible and allows the quantitative local thermal conductivity measurement with the SThM. Less

  • Research Products

    (21 results)

All 2007 2006 2005

All Journal Article (9 results) (of which Peer Reviewed: 3 results) Presentation (6 results) Book (6 results)

  • [Journal Article] MEMS技術の熱工学への応用2007

    • Author(s)
      中別府 修
    • Journal Title

      第44回日本伝熱シンポジウム講演論文集

      Pages: 249-250

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] SThMによる局所熱伝導率計測に関する研究2007

    • Author(s)
      大崎哲史, 中別府修
    • Journal Title

      日本機械学会関東支部 関東学生会第47回学生員卒業研究発表講演会講演前刷集

      Pages: 261-262

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Application of MEMS technology to thermal engineering.2007

    • Author(s)
      Osamu NAKABEPPU
    • Journal Title

      Proceedings of The 44th National Heat Transfer Symposium of JAPAN

      Pages: 249-250

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] SThMによる局所熱伝導率計測に関する研究2006

    • Author(s)
      中別府修, 磨田謙一
    • Journal Title

      日本機械学会論文集(B編) 72巻

      Pages: 2524-2531

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] High-Performance Thermal Sensors with MEMS Technology(SThM, Chip Calorimeter and Bio Metabolism Monitor)2006

    • Author(s)
      Osamu NAKABEPPU
    • Journal Title

      Proc. of 17th International Symposium on Transport Phenomena (CD-ROM)

      Pages: 3-D-I-3

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Study on the local thermal conductivity measurement by the SThM2006

    • Author(s)
      Osamu NAKABEPPU, Kenichi TOKITA
    • Journal Title

      JSME B 72-722

      Pages: 2524-2531

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] High-Performance Thermal Sensors with MEMS Technology (SThM, Chip Calorimeter and Bio Metabolism Monitor)2006

    • Author(s)
      Osamu NAKABEPPU
    • Journal Title

      Proc. of 17th International Symposium on Transport Phenomena 3-DI-3 (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] SCANNING THERMAL MICROSCOPY FOR QUANTITATIVE THERMAL MEASUREMENTS2005

    • Author(s)
      Osamu NAKABEPPU, Kenichi Tokita, Yuya Miyata, Takahiro Kanda
    • Journal Title

      Sixth World Conference on Experimental Heat Transfer, Fluid Mechanics and Thermodynamics (CD-ROM)

      Pages: 9-b-15

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] SCANNING THERMAL MICROSCOPY FOR QUANTITATIVE THERMAL MEASUREMENTS2005

    • Author(s)
      Osamu NAKABEPPU, Kenichi Tokita, Yuya Miyata, Takahiro Kanda
    • Journal Title

      Sixth World Conference on Experimental Heat Transfer, Fluid Mechanics and Thermodynamics 9-b-15 (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Application of MEMS technology on Scanning Thermal Microscopy and Chip-Calorimetry2007

    • Author(s)
      Osamu Nakabeppu
    • Organizer
      62th Calorimetry Conference
    • Place of Presentation
      Hawaii
    • Year and Date
      2007-08-09
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Application of MEMS technology on Scanning Thermal Microscopy and Chip-Calorimetry2007

    • Author(s)
      Osamu NAKABEPPU
    • Organizer
      The 62th Calorimetry Conference
    • Place of Presentation
      Hawaii
    • Year and Date
      2007-08-09
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 熱物性計測の先端技術-MEMSセンサを用いた微小スケールの温度・熱物性計測-2007

    • Author(s)
      中別府修
    • Organizer
      計測自動制御学会 第123回「温度計測部会」講演会
    • Place of Presentation
      東京, 品川区
    • Year and Date
      2007-07-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Advanced Technology in Thermophysical Properties Measurement2007

    • Author(s)
      Osamu NAKABEPPU
    • Organizer
      Society of measurement and control, The 123rd lecture meeting of temperature measurement division
    • Place of Presentation
      Tokyo
    • Year and Date
      2007-07-27
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Applications of micro thermal cantilevers2005

    • Author(s)
      Osamu NAKABEPPU
    • Organizer
      Japan/U. S. Join Seminar Nanoscale Transport Phenomena -Science and Engineering-
    • Place of Presentation
      仙台
    • Year and Date
      2005-07-06
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Applications of Micro Thermal Cantilevers2005

    • Author(s)
      Osamu NAKABEPPU
    • Organizer
      Japan/U. S. Join Seminar Nanoscale Transport Phenomena -Science and Engineering-
    • Place of Presentation
      Sendai
    • Year and Date
      2005-07-06
    • Description
      「研究成果報告書概要(欧文)」より
  • [Book] マイクロ・ナノ熱流体ハンドブック(ナノスケール温度・熱物性計測)2006

    • Author(s)
      丸山茂夫, 中別府修, ほか(共著)
    • Total Pages
      667
    • Publisher
      NTS
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] Handbook of micro- and nano-thermo-fluidics2006

    • Author(s)
      Shigeo Maruyama, Osamu Nakabeppu, et al.
    • Total Pages
      667
    • Publisher
      NTS
    • Description
      「研究成果報告書概要(欧文)」より
  • [Book] 実戦ナノテクノロジー 走査プローブ顕微鏡と局所分光2005

    • Author(s)
      重川秀実, 中別府修, 他(共著)
    • Total Pages
      429
    • Publisher
      裳華房
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] 日本化学会編 第5版 実験化学講座6 温度・熱, 圧力2005

    • Author(s)
      阿竹徹, 中別府修, 他(共著)
    • Total Pages
      547
    • Publisher
      丸善
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] Scanning Probe Microscopy and Local Spectroscopy2005

    • Author(s)
      Hidemi Shigekawa, Osamu Nakabepu, et al.
    • Total Pages
      429
    • Publisher
      Shokabo
    • Description
      「研究成果報告書概要(欧文)」より
  • [Book] Experimental Course in Chemistry 6, Temperature, Heat and Pressure2005

    • Author(s)
      Tooru Atake, Osamu Nakabeppu, et al.
    • Total Pages
      547
    • Publisher
      Maruzen
    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2010-06-09  

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