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2007 Fiscal Year Final Research Report Summary

Basic research for development of electronics devices with strain-Si

Research Project

Project/Area Number 17360139
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKyoto University

Principal Investigator

KIMURA Kenji  Kyoto University, Graduate School of Engineering, Professor (50127073)

Co-Investigator(Kenkyū-buntansha) SUZUKI Motofumi  Kyoto Univ., Graduate School of Engineering, Associate professor (00346040)
NAKAJIMA Kaoru  Kyoto Univ., Graduate School of Engineering, Associate professor (80293885)
Project Period (FY) 2005 – 2007
Keywordsstrain-Si / high-resolution RBS / ion implantation / Ge growth / oxidation of Si
Research Abstract

New goniometers and load lock chambers were developed for the present high-resolution Rutherford backscattering spectroscopy (HRBS) system. By performing the channeling angular scan with the improved HRBS system and comparing the result with a trajectory simulation of channeling ions, the strain in the strain-Si grown on a SiGe layer was measured for both ion-implanted strain-Si samples and strain-Si samples annealed after ion implantation. It was found that the strain was recovered after annealing.
Germanium was epitaxially grown on a clean (001) surface of strain-Si and the growth process was observed in situ with HRBS. For comparison a similar measurement was done with normal Si It was hind that the interdiffusion between Ge and strain-Si is enhanced as compared with the normal Si The effect of strain on the initial oxidation process of Si(001) was also studied by in-situ HRBS observation. The saturation oxygen coverage on the strain-Si was hind to be the same as the normal Si at room temperature (RT) as well as at 640℃. More detailed observation at RT revealed that there is no difference at the oxygen exposure of 12 L but oxygen coverage for the strain-Si is larger at 30 L. This result together with the first principles calculation suggests that the effect of the strain on the oxidation depends on the adsorption site for oxygen.

  • Research Products

    (14 results)

All 2008 2007 2006 2005

All Journal Article (4 results) (of which Peer Reviewed: 2 results) Presentation (10 results)

  • [Journal Article] Measurement of the strain in strained-Si/Si_<0.79>Ge_<0.21> with HRBS/channeling2006

    • Author(s)
      T. Matsushita, W. Sakai, K. Nakajima, M. Suzuki, K. Kimura, A. Agarwal, H.-J. Gossmann, M. Ameen, H. Harima
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 249

      Pages: 432-435

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Nuclear. Instruments, and Methods2006

    • Author(s)
      T., Matsushita, W., Sakai, K., Nakajima, M., Suzuki, K., Kimura, A., Agarwal, H.-J., Gossmann, M., Ameen, H., Harima
    • Journal Title

      Physics Research B Vol.249

      Pages: 432-435

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Radiation Damage induced by 5 keV Si^+ ion implantation in Strained-Si/Si_<0.8>Ge_<0.2>2005

    • Author(s)
      T. Matsushita, W. Sakai, K. Nakajima, M. Suzuki, K. Kimura, A. Agarwal. H.-J. Gossmann, M. Ameen
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 230

      Pages: 230-233

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Nuclear. Instruments. and Methods2005

    • Author(s)
      T., Matsushita, W., Sakai, K., Nakajima, M., Suzuki, K., Kimura, A., Agarwal, H.-J., Gossmann, M., Ameen
    • Journal Title

      Physics Research B Vol.230

      Pages: 230-233

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 高分解能RBSによる歪Si(001)の酸化初期過程の観察2008

    • Author(s)
      入谷健元、錦織雅弘, 中嶋 薫, 鈴木基史, 木村健二
    • Organizer
      2008年春季第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学船橋キャンパス
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Observation of initial oxidation process of strain-Si(001) using high-resolution RBS2008

    • Author(s)
      K., Iritani, M., Nishikoori, K., Nakajima, M., Suzuki, K., Kimura
    • Organizer
      Annual meeting of the Japan Society of Applied Physics
    • Place of Presentation
      Nihon University
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 高分解能RBSによる歪Si(001)上のGe成長初期過程の観察2007

    • Author(s)
      錦織雅弘, 中嶋 薫, 鈴木基史, 木村健二
    • Organizer
      2007年秋季第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Observation of initial growth process of Ge on straine-Si(001) using high-resolution 12852007

    • Author(s)
      M., Nishikoori, K., Nakajima, M., Suzuki, K., Kimura
    • Organizer
      Annual meeting of the Japan Society of Applied Physics
    • Place of Presentation
      Hokkaido Institute of Technology
    • Year and Date
      2007-09-04
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 高分解能RBSによる歪Siの歪み評価2006

    • Author(s)
      一原主税, 小林 明, 牟礼祥一, 藤川和久, 笹川 薫, 小椋厚志, 木村健二
    • Organizer
      2006年春季第53回応用物理学会関係連合講演会
    • Place of Presentation
      武蔵工科大学
    • Year and Date
      2006-03-22
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Strain measurement using high-resolution RBS2006

    • Author(s)
      C., Ichihara, A., Kobayashi, S.,Mure, K., Fujikawa, K., Sasakawa, A., Ogura, K., Kimura
    • Organizer
      Annual meeting of the Japan Society of Applied Physics
    • Place of Presentation
      Musashi Institute of Technology
    • Year and Date
      2006-03-22
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Measurement of the strain in strained-Si/Si_<0.79>Ge_<0.21> with HRBS/channeling2005

    • Author(s)
      T. Matsushita, W. Sakai, K. Nakajima, M. Suzuki, K. Kimura, A. Agarwal, H.-J. Gossmann, M. Ameen, H. Harima
    • Organizer
      The 17th International Conference on Ion Beam Analysis
    • Place of Presentation
      Sevilla, Spain
    • Year and Date
      2005-06-28
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Measurement of the strain in strained-Si/Si0.79Ge0.21 with HRBS/channeling2005

    • Author(s)
      T., Matsushita, W., Sakai, K., Nakajima, M., Suzuki, K., Kimura, A., Agarwal, H.-J., Gossmann, M., Ameen, H., Harima
    • Organizer
      The 17th International Conference on Ion Beam.Analysis
    • Place of Presentation
      Sevilla, Spain
    • Year and Date
      2005-06-28
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Influence of strain on radiation damage studied by high-resolution RBS2005

    • Author(s)
      T. Matsushita, K. Nakajima, M. Suzuki, K. Kimura, A. Agarwal, H.-J. Gossmann, M. Ameen
    • Organizer
      The 3rd International Workshop on High-Resolution Depth Profiling
    • Place of Presentation
      Bar harbor, Maine, USA
    • Year and Date
      2005-05-25
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Influence of strain on radiation damage studied by high-resolution RBS2005

    • Author(s)
      T., Matsushita, K., Nakajima, M., Suzuki, K., Kimura, A., Agarwal, H.-J., Gossmann, M., Ameen
    • Organizer
      The 3rd International Workshop on High-Resolution Depth Profiling
    • Place of Presentation
      Bar Harbor, Maine, USA
    • Year and Date
      2005-05-25
    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2010-02-04  

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