• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

2006 Fiscal Year Final Research Report Summary

New Technology of Atmospheric plasmas using capacity coupled multi discharge and their applications

Research Project

Project/Area Number 17560244
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電力工学・電気機器工学
Research InstitutionIwate University

Principal Investigator

FUJIWARA Tamiya  Iwate University, Faculty of Engineering, professor, 工学部, 教授 (70042207)

Co-Investigator(Kenkyū-buntansha) TAKAKI Koichi  Iwate University, Faculty of Engineering, associate professor, 工学部, 助教授 (00216615)
MUKAIGAWA Seiji  Iwate University, Faculty of Engineering, Research associate, 工学部, 助手 (60333754)
Project Period (FY) 2005 – 2006
KeywordsAtmospheric pressure plasma / CCMD / Self quenching / Energy control / Microdischarge / Dielectric barrier discharge / Ozone generation / Discharge mechanizm
Research Abstract

The aim of this study is to establish a new technology for generation of atmospheric plasmas and to grope for their applications. In CCMD ( Capacity-Coupled Multi Discharge) system, energy input into the plasma can be easily controlled by changing the amount of electrostatic capacitance. The system is different from the past plasma generation technology dielectric barrier discharge, and it was distinguished. Current result is described as follows. 1)Enlargement of plasma volume for ozone generation, and stabilization of the discharge : In 2005 fiscal year,18 needle electrodes were connected parallel for the large cross section making about this method, and quenching capacitor of 45 pF on the needle electrode side (2.5 pF×18) was connected and the ozone development was tried. Moreover, the entire system was set up in the plasma vessel for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 320ppm was obtained in the maximum by using oxygen ( … More purity 99.5%), and the ozone generation efficiency of 8 g/kWh was obtained. In 2006 fiscal year,20 needle electrodes were integrated for making of this method a large capacity, and quenching capacitor 360 pF on the needle electrode side (18 pFx20) was connected parallel and the ozone generation was tried. The mesh electrode was used for the opposing electrode, and an electrode the entire system was set up in the glass tube for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 155ppm was obtained in the maximum by using oxygen (purity 99.5%), and the ozone generation efficiency of 19.5 g/kWh was obtained. Though the improvement of the ozone generation efficiency was able to be achieved compared with the result in 2005 fiscal year, further optimization is necessary. 2)Effect of waveform in ozone generation of alternating voltage : To promote the diffusion of the radical when the waveform of applied voltage is a continuous sinusoidal waveform (10 or 20 kHz), the waveform of applied voltage has been changed to the burst wave for the increase of the ozone generation and the improvement of the ozone generation efficiency. Though the ozone generation density decreases with decrease of the duty ratio, the ozone generation efficiency is improved to 20 g/kWh. 3)Effect of mesh electrode in ozone generation : In ozone generation using CCMD, it has been understood that the electrical discharge method to use the mesh electrode for the opposing electrode is effective to the improvement of ozone generation efficiency. 4)Characteristic of integrated CCMD : It is confirmed that the integrated CCMD operates by the principle of the electrical discharge similar to CCMD of the past. It has been understood that there is universality in the operation of the CCMD for integration. Less

  • Research Products

    (28 results)

All 2006 2005

All Journal Article (28 results)

  • [Journal Article] Production of an atmospheric-pressure glow discharge using an inductive energy storage pulsed power generator2006

    • Author(s)
      Takaki K, Kirihara H, Noda C, Fujiwara T, et al.
    • Journal Title

      PLASMA PROCESSES AND POLYMERS 3 (9)

      Pages: 734-742

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Production of pulse glow discharge in atmospheric pressure nitrogen using needle-array electrode2006

    • Author(s)
      Takaki K, Kirihara H, Noda C, Fujiwara T, et al.
    • Journal Title

      JAPANESE JOURNAL OF APPLIED PHYSICS 45 (10B)

      Pages: 8241-8245

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Influence of metal foil width on bonding strength in capacitor discharge ceramics joining2006

    • Author(s)
      Takaki K, Mikami Y, Fujiwara T, et al.
    • Journal Title

      IEEE TRANSACTIONS ON PLASMA SCIENCE 34 (5)

      Pages: 1709-1714

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Ion extraction from magnetically driven carbon shunting arc plasma2006

    • Author(s)
      Takaki K, Kumagai O, Mukaigawa S, Fujiwara T, et al.
    • Journal Title

      IEEE TRANSACTIONS ON PLASMA SCIENCE 34 (4)

      Pages: 1209-1215

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition2006

    • Author(s)
      Takaki K, Kumagai O, Hasegawa S, Fujiwara T, et al.
    • Journal Title

      THIN SOLID FILMS 506

      Pages: 150-154

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Amorphous carbon film deposition by PBII&D using shunting arc discharge2006

    • Author(s)
      Yukimura K, Ego K, Takaki K, Fujiwara T, et al.
    • Journal Title

      NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 242 (1-2)

      Pages: 321-323

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Energy control of capacity-coupled discharge in atmospheric air2006

    • Author(s)
      Takaki K, Ohmukai R, Mukaigawa S, Fujiwara T, et al.
    • Journal Title

      JAPANESE JOURNAL OF APPLIED PHYSICS 45 (3A)

      Pages: 1797-1800

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Heat flux into the substrate and electric power measurement in radio frequency discharge plasma2006

    • Author(s)
      Hachiya K, Fujiwara T, et al.
    • Journal Title

      ELECTRICAL ENGINEERING IN JAPAN 155 (1)

      Pages: 1-8

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 磁気駆動型シャンティングアークプラズマからのイオン引き出しとシース近辺の密度の算定2006

    • Author(s)
      熊谷 倫他
    • Journal Title

      電気学会論文誌A 126 (7)

      Pages: 661-668

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Production of an atmospheric-pressure glow discharge using an inductive energy storage pulsed power generator2006

    • Author(s)
      Takaki K, Kirihara H, Noda C, Mukaigawa S, Fujiwara T
    • Journal Title

      PLASMA PROCESSES AND POLYMERS 3(9)

      Pages: 734-742

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Production of pulse glow discharge in atmospheric pressure nitrogen using needle-array electrode2006

    • Author(s)
      Takaki K, Kirihara H, Noda C, Mukaigawa S, Fujiwara T
    • Journal Title

      JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45(10B)

      Pages: 8241-8245

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Influence of metal foil width on bonding strength in capacitor discharge ceramics joining2006

    • Author(s)
      Takaki K, Mikami Y, Itagaki M, Mukaigawa S, Fujiwara T, Nakamurn S
    • Journal Title

      IEEE TRANSACTIONS ON PLASMA SCIENCE 34(5)

      Pages: 1709-1714

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Ion extraction from magnetically driven carbon shunting arc plasma2006

    • Author(s)
      Takaki K, Kumagai O, Mukaigawa S, Fujiwara T, Yukimura K
    • Journal Title

      IEEE TRANSACTIONS ON PLASMA SCIENCE 34(4)

      Pages: 1209-1215

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Characteristics of magnetically driven shunting arc plasma for amorphous carbon film deposition2006

    • Author(s)
      Takaki K, Kumagai O, Hasegawa R, Mukaigawa S, Fujiwara T, Kumagai M, Yukimura K
    • Journal Title

      THIN SOLID FILMS 560

      Pages: 150-154

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Amorphous carbon film deposition by PBII&D using shunting arc discharge2006

    • Author(s)
      Yukimura K, Ego K, Takaki K, Mukaigawa S, Fujiwara T
    • Journal Title

      NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH : SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 242(1-2)

      Pages: 321-323

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Energy control of capacity-coupled discharge in atmospheric air2006

    • Author(s)
      Takaki K, Ohmukai R, Mukaigawa S, Fujiwara T, Miura T, Mase H, Sato N
    • Journal Title

      JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45(3A)

      Pages: 1797-1800

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Heat flux into the substrate and electric power measurement in radio frequency discharge plasma2006

    • Author(s)
      Hachiya K, Ebe K, Kato S, Mukaigawa S, Takaki K, Fujiwara T
    • Journal Title

      ELECTRICAL ENGINEERING IN JAPAN 155(1)

      Pages: 1-8

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Ion Extraction from Magnetically Driven Shunting Arc Plasma and Density Estimation at Sheath Boundary2006

    • Author(s)
      O.Kumagai, S.Mukaigawa, K.Takaki, T.Fujiwara, K.Yukimura, K.Ego
    • Journal Title

      The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 126(7)

      Pages: 661-668

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] High deposition rate of amorphous carbon film using a magnetically driven shunting arc discharge2005

    • Author(s)
      Yukimura K, Kumagai M, Fujiwara T, et al.
    • Journal Title

      SURFACE & COATINGS TECHNOLOGY 196 (1-3)

      Pages: 203-206

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Production of atmospheric-pressure glow discharge in nitrogen using needle-array electrode2005

    • Author(s)
      Takaki K, Hosokawa M, Fujiwara T, et al.
    • Journal Title

      APPLIED PHYSICS LETTERS 86 (15)

      Pages: Art. No. 151501

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Voltage-current characteristics of nitrogen high-current glow discharge2005

    • Author(s)
      Takaki K, Hosokawa M, Fujiwara T, et al.
    • Journal Title

      JOURNAL OF ADVANCED OXIDATION TECHNOLOGIES 8 (1)

      Pages: 11-17

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 大電流窒素グロー放電の電流電圧特性のギャップ長と気圧依存性2005

    • Author(s)
      細川真人他
    • Journal Title

      電気学会論文誌A 125(12)

      Pages: 993-1000

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 分光学的手法を用いた大電流パルスグロー放電の振動温度導出2005

    • Author(s)
      野田千春他
    • Journal Title

      プラズマ応用科学 13

      Pages: 35-41

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] High deposition rate of amorphous carbon film using a magnetically driven shunting arc discharge2005

    • Author(s)
      Yukimura K, Kumagai M, Takaki K, Hasegawa R, Nakamura S Mukaigawa S, Fujiwara T
    • Journal Title

      SURFACE & COATINGS TECHNOLOGY 196(1-3)

      Pages: 203-206

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Production of atmospheric-pressure glow discharge in nitrogen using needle-array electrode2005

    • Author(s)
      Takaki K, Hosokawa M, Sasaki T, Mukaigawa S, Fujiwara T
    • Journal Title

      APPLIED PHYSICS LETTERS 86(15)Art.No.151501

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Voltage-current characteristics of nitrogen high-current glow discharge2005

    • Author(s)
      Takaki K, Hosokawa M, Sasaki T, Mukaigawa S, Fujiwara T
    • Journal Title

      JOURNAL OF ADVANCED OXIDATION TECHNOLOGIES 8(1)

      Pages: 11-17

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Dependence of Voltage-Current Characteristics of High-Current Nitrogen Glow Discharge on Gap Length and Gas Pressure2005

    • Author(s)
      M.Hosokawa, C.Noda, S.Mukaigawa, K.Takaki, T.Fujiwara
    • Journal Title

      The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 125(12)

      Pages: 993-1000

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Measurement of Vibrational Temperature for High-Current Pulse Glow Discharge Using Spectroscopic Diagnostics2005

    • Author(s)
      C.Noda, S.Mukaigawa, K.Takaki, T.Fujiwara
    • Journal Title

      Applied Plasma Science Vol.13

      Pages: 35-41

    • Description
      「研究成果報告書概要(欧文)」より

URL: 

Published: 2008-05-27  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi