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2007 Fiscal Year Final Research Report Summary

Design and Modeling of Novel Reconfigurable MEMS-Based Structures by Using the State of the Art Numerical Techniques

Research Project

Project/Area Number 17560320
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionTokyo University of Technology

Principal Investigator

KURODA Michiko  Tokyo University of Technology, School of Computer Science, Professor (70225308)

Project Period (FY) 2005 – 2007
KeywordsReconfigurable RF MEMS / The coupling of the mechanical and electrical equa / FD TD method / Body fitted grid generation method with moving bou / Over set grid generation / Moving Boundary / DOE / RSM / 先端機能デバイス
Research Abstract

The accurate knowledge of the electromagnetic field evolution around a moving or rotating body is very important for the effective modeling of new optical devices or microwave devices such as MEMS structures. Two numerical techniques for the analysis of the moving boundary problems are proposed. The one is the grid generation method with moving boundaries and the second is the over set grid generation method. The first one is that by using transformation of the physical region to the computational regain, it is easy to apply the FDTD method on the computational region. This technique was applied for the analysis of the 3D MEMS devices with moving plates, and the scattered spectrum from a moving plate was also analyzed. These results were compared with the theoretical results and good agreements were obtained. The second one is that by overlapping one moving sub grid on a static main grid, each grid is calculated alternately. The unknown values on the boundary points in the overlapped r … More egion can be obtained through interpolating the solution of the other overlapped grid. By using the over set grid generation method with the interpolation technique, the FDTD method can be applied to solve the electromagnetic field around a complicated or moving object easily and accurately. The received wave at the observation point is calculated when the observation point or source point move. It can be shown that according to the motion, the frequency of the received wave was shifted. The results were compared with the theoretical results and the results by the body fitted grid generation method with moving boundaries. Good agreements were obtained in these three results. These numerical techniques will be a good numerical tools for the analysis of the moving boundary problems and for the analysis of the reconfigurable devices. These results were published in IEICE Trans in 2005, ACES Journal in 2006 and one paper is accepted for the publication in IFS CE Trans. in Sept., 2008. And they were also presented in IEEE Aces 2005, PIERS2005, IEEE APS/URSI2005, CEM-TD2005, ACES2006, IEEE APS/URSI2006, PIERS2006, ACES2007, IEEE APS/URSI2007, ISAP2007,APACE2007, ACES2008 and will be presented in IEEE APS/URSI2008 and PIERS2008. Less

  • Research Products

    (51 results)

All 2008 2007 2006 2005 Other

All Journal Article (6 results) (of which Peer Reviewed: 3 results) Presentation (45 results)

  • [Journal Article] 電磁界振動連成解析法を用いた散乱スペクトルの周波数偏移に関する検討2008

    • Author(s)
      益子 修一, 岩松 寛, 黒田 道子
    • Journal Title

      電子情報通信学会和文論文誌採録決定 Vol.J91-C, No.9

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] A Study on Frequency Shift of Scattered Spectrum by Using the Analytical Technique for Electromagnetic Field Coupling with Vibration2008

    • Author(s)
      Shuichi Masuko, Hiroshi Iwamatsu, Michiko Kuroda
    • Journal Title

      IEICE Tran. vol.J91-C, No.9

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Numerical Modeling of Reconfigurable RF MEMS-based Structures Involving the Combination of Electrical and Mechanical Force2006

    • Author(s)
      Kohei Kawano, Shafrida Shahrani, Takashi Mori, Michiko Kuroda, Manos M.Tentzeris
    • Journal Title

      ACES (Applied Computational Electromagnetics Society) Journal 21

      Pages: 1-8

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Numerical Modeling of Reconfigurable RF MEMS-Based Structures Involving the Combination of Electrical and Mechanical Force2006

    • Author(s)
      Kohei Kawano, Shafrida Shahrani, Takashi Mori, Michiko Kuroda, Manos M. Tentzeris
    • Journal Title

      ACES Journal vol.21, no.1

      Pages: 1-8

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] RF MEMSとその解析支援技術について2005

    • Author(s)
      黒田 道子
    • Journal Title

      電子情報通信学会誌 88

      Pages: 890-894

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Design of Novel Reconfigurable MEMS-Based Structures by Using the State-of-the Art Numerical Technique

    • Author(s)
      Michiko Kuroda
    • Journal Title

      IEICE Trans. vol.88, no.11

      Pages: 890-894

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Comparative Study of Over Set Grid Generation Method and Body Fitted Grid Generation Method with Moving Boundaries'2008

    • Author(s)
      Hiroshi Iwamatsu, Ryo Fukumoto, Masahiro Ishihara, Michiko Kuroda.
    • Organizer
      IEEE APS/URSI2008
    • Place of Presentation
      San Diego
    • Year and Date
      20080700
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Body Fitted Grid Generation Method with Moving Boundaries and Over Set Grid Generation Method2008

    • Author(s)
      Hiroshi Iwamatsu, Ryo Fukumoto, Shuichi Masuko , Michiko Kuroda
    • Organizer
      PIERS2008
    • Place of Presentation
      Boston
    • Year and Date
      20080700
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] FDTD Method for the Analysis of Electromagnetic Field in Consideration for Doppler Effect2008

    • Author(s)
      Hiroshi Iwamatsu, Shuichi Masuko, Michiko Kuroda
    • Organizer
      ACES2008
    • Place of Presentation
      Niagara Falls
    • Year and Date
      20080300-04
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 重合格子法と移動境界適合座標系2008

    • Author(s)
      福本 亮, 岩松 寛, 石原 正博, 黒田 道子
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      北九州
    • Year and Date
      20080300
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Over Set Grid Generation Method and Body Fitted Grid Generation Method2008

    • Author(s)
      Ryo, Fukumoto, Hiroshi Iwamatsu, Masahiro Ishikawa, Michiko Kuroda
    • Organizer
      IEICE General Conference
    • Place of Presentation
      Kitakyuushuu
    • Year and Date
      20080300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Comparative Study of Over Set Grid Generation Method and Body fitted Grid Generation Method with Moving Boundaries2008

    • Author(s)
      Hiroshi Iwamatsu, Ryo Fukumoto, Masahiro Ishihara, Michiko Kuroda
    • Organizer
      IEEE APS2008
    • Place of Presentation
      San Diego,USA
    • Year and Date
      2008-07-07
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Body Fitted Grid Generation Method with Moving Boundaries and Over Set Grid Generation Method2008

    • Author(s)
      Hiroshi Iwamatsu, Ryo Fukumoto, Shuichi Masuko and Michiko Kuroda
    • Organizer
      PIERS2008
    • Place of Presentation
      Boston、USA
    • Year and Date
      2008-07-04
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] FDTD Method for the Analysis of Electromagnetic Field in Consideration for Doppler Effect2008

    • Author(s)
      Hiroshi Iwamatsu, Shuichi Masuko, Michiko Kuroda
    • Organizer
      ACES2008
    • Place of Presentation
      Niagara Falls,Canada
    • Year and Date
      2008-04-02
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] An accurate numerical approach of 2D Comb Structured MEMS Capacitor2007

    • Author(s)
      Shafrida Sahrani, Michiko Kuroda
    • Organizer
      APACE2007
    • Place of Presentation
      Melaka
    • Year and Date
      20071200
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 移動境界適合座標系をもちいたドップラー効果の解析2007

    • Author(s)
      岩松 寛, 益子 修一, 黒田 道子
    • Organizer
      電子情報通信学会ソサイエテイ大会
    • Place of Presentation
      鳥取
    • Year and Date
      20070900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 移動境界適合座標系の時間領域と周波数領域における解析2007

    • Author(s)
      益子 修一, 岩松 寛, 黒田 道子
    • Organizer
      電子情報通信学会ソサイエテイ大会
    • Place of Presentation
      鳥取
    • Year and Date
      20070900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Numerical Technique for the Analysis of Doppler Effect2007

    • Author(s)
      Hiroshi Iwamatsu, Shuichi Masuko, Michiko Kuroda
    • Organizer
      IEICE Society Conference
    • Place of Presentation
      Tottori
    • Year and Date
      20070900
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Body Fitted Grid Generation Method with Moving Boundaries in Time Domain and Spectral Domain2007

    • Author(s)
      Shuichi Masuko, Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      IEICE Society Conference
    • Place of Presentation
      Tottori
    • Year and Date
      20070900
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Efficient Numerical Technique for the Motion Effects to Electromagnetic Field between Moving Plates2007

    • Author(s)
      Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      ISAP2007
    • Place of Presentation
      Niigata,Japan
    • Year and Date
      20070800
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Efficient Numerical Technique for the Motion Effects to Electromagnetic Field between Moving Plates2007

    • Author(s)
      Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      ISAP2007
    • Place of Presentation
      Niigata
    • Year and Date
      20070800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Analysis of the Scattered Wave from Moving Plate in Spectral Domain2007

    • Author(s)
      Shuichi Masuko, Michiko Kuroda
    • Organizer
      IEICE Technical Report
    • Place of Presentation
      Muroran
    • Year and Date
      20070800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Technique for the Analysis of Transient Effect of Electromagnetic Wave from Moving Plates in Time Domain and Spectral Domain2007

    • Author(s)
      Shuichi Masuko, Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      IEEEAPS2007
    • Place of Presentation
      Honolulu,USA
    • Year and Date
      20070600
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Transient Effect of 3D RF-MEMS Structures with Moving Plate2007

    • Author(s)
      Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      ACES2007
    • Place of Presentation
      Verona, Italy
    • Year and Date
      20070300
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Transient Effect of 3D RF-MEMS Structures with Moving Plate2007

    • Author(s)
      Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      ACES2007
    • Place of Presentation
      Verona
    • Year and Date
      20070300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Technique for the Analysis of Transient Effect of Electromagnetic Wave from Moving Plates in Time Domain and Spectral Domain2007

    • Author(s)
      Shuichi Masuko, Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      IEEE APS/URSI2007
    • Place of Presentation
      Honolulu
    • Year and Date
      20070000
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] An accurate numerical approach of 2D Comb Structured MEMS Capacitor2007

    • Author(s)
      Shafrida Sahrani, Michiko Kuroda
    • Organizer
      APACE2007(Asia-Pacific conference on Applied Electromagnetics)
    • Place of Presentation
      Melaka,Malaysia
    • Year and Date
      2007-12-06
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 移動体からの散乱波のスペクトル解析2007

    • Author(s)
      益子 修一, 黒田 道子
    • Organizer
      電子情報通信学会光・電波ワークショップ
    • Place of Presentation
      室蘭
    • Year and Date
      2007-08-20
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] MEMS構造体の過渡的現象を含む3次元数値解析2006

    • Author(s)
      岩松 寛、黒田 道子
    • Organizer
      電気学会電磁界理論研究会
    • Place of Presentation
      玉造
    • Year and Date
      20061000
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Numerical Analysis of MEMS Structures with Transient Effect in Three Dimension2006

    • Author(s)
      Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      Electromagnetic Theory Symposium
    • Place of Presentation
      Tamatsukuri
    • Year and Date
      20061000
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Technique for the Analysis of 2D MEMS Structure by Using Overset Grid Generation2006

    • Author(s)
      Nadiah Hanim, Binghu Piao, Michiko Kuroda, Shigeaki Kuroda
    • Organizer
      PIERS2006
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      20060800
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] The Modeling Technique of RF MEMS Structures with Transient Behavior2006

    • Author(s)
      Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      PIERS2006
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      20060800
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 移動境界問題の数値解析法と可変機能をもつデバイスへの応用2006

    • Author(s)
      黒田 道子
    • Organizer
      電子情報通信学会第二種研究会、マイクロ波シミュレータ時限研究専門委員会主催 第12回マイクロ波シミュレータワークショップ
    • Place of Presentation
      横浜
    • Year and Date
      20060800
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Numerical Technique for the Analysis of 2D MEMS Structure by Using Overset Grid Generation2006

    • Author(s)
      Nadiah Hanim, Binghu Piao, Michiko Kuroda, Shigeaki Kuroda
    • Organizer
      PIERS2006
    • Place of Presentation
      Tokyo
    • Year and Date
      20060800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] The Modeling Technique of RF MEMS Structures with Transient Behavior2006

    • Author(s)
      Hiroshi Iwamatsu, Michiko Kuroda
    • Organizer
      PIERS2006
    • Place of Presentation
      Tokyo
    • Year and Date
      20060800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion2006

    • Author(s)
      Takashi Mori, Hiroshi Iwamatsu, Takamichi Kanno, Michiko Kuroda
    • Organizer
      IEEE APS/URSI2006
    • Place of Presentation
      Albuquerque,USA
    • Year and Date
      20060700
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion2006

    • Author(s)
      Takashi Mori, Hiroshi Iwamatsu, Takamichi Kanno, Michiko Kuroda
    • Organizer
      IEEE APS/URSI2006
    • Place of Presentation
      Albuquerqueg
    • Year and Date
      20060700
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Novel Numerical Technique for the Analysis of the Moving Boundary Problems by Using the Overset Grid Generation2006

    • Author(s)
      Nadiah Hanim, Binghu Piao, Michiko Kuroda, Shigeaki Kuroda
    • Organizer
      ACES2006
    • Place of Presentation
      Miami, USA
    • Year and Date
      20060300
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 可変機能を持つ3次元MEMS 構造体の数値解析2006

    • Author(s)
      森貴 史, 岩松 寛, 菅野 崇理, 黒田 道子
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      東京
    • Year and Date
      20060300
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Novel Numerical Technique for the Analysis of the Moving Boundary Problems by Using the Overset Grid Generation2006

    • Author(s)
      Nadiah Hanim, Binghu Piao, Michiko Kuroda, Shigeaki Kuroda
    • Organizer
      ACES2006
    • Place of Presentation
      Miami
    • Year and Date
      20060300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Novel Numerical Technique for the Analysis of 3DMEMS Structures2006

    • Author(s)
      Takashi Mori, Hiroshi Iwamatsu, Takamichi Kannno, Michiko Kuroda
    • Organizer
      IEICE General Conference
    • Place of Presentation
      Tokyo
    • Year and Date
      20060300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] FDTD Method by Using the Overset Grid Generation2005

    • Author(s)
      Nidia Hanim, Binghu Piao, Michiko Kuroda, Shigeki Kuroda
    • Organizer
      電気学会電磁界理論研究会
    • Place of Presentation
      那須塩原
    • Year and Date
      20051100
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] FDTD Method by Using the Overset Grid Generation2005

    • Author(s)
      Nadia Hanim, Binghu Piao, Michiko Kuroda, Shigeki Kuroda
    • Organizer
      Electromagnetic Theory Symposium
    • Place of Presentation
      Nasu Shiobara
    • Year and Date
      20051100
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Technique for the Analysis of Patch Antennas with MEMS-Enabled Moving Parts2005

    • Author(s)
      Michiko Kuroda, Kohei Yamagata, Manos M.Tentzeris
    • Organizer
      CEM-TD2005
    • Place of Presentation
      Atlanta, USA
    • Year and Date
      20050900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Numerical Technique for the Analysis of Patch Antennas with MEMS-Enabled Moving Parts2005

    • Author(s)
      Michiko Kuroda, Kohei Yamagata, Manos M. Tentzeris
    • Organizer
      CEM-TD2005
    • Place of Presentation
      Atlanta
    • Year and Date
      20050900
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Technique for the Analysis of MEMS Structures Including the Complex Motion Effect2005

    • Author(s)
      Michiko Kuroda
    • Organizer
      PIERS2005
    • Place of Presentation
      Hanzou, China
    • Year and Date
      20050800
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Numerical Technique for the Analysis of MEMS Structures Including the Complex Motion Effect2005

    • Author(s)
      Michiko Kuroda
    • Organizer
      PIERS2005
    • Place of Presentation
      Hangzhou
    • Year and Date
      20050800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Numerical Modeling of Antennas with Mechanically/MEMS-Enabled Moving Parts2005

    • Author(s)
      Kohei Yamagata, Michiko Kuroda, Manos M.Tentzeris
    • Organizer
      IEEE APS/URSI2005
    • Place of Presentation
      Washington DC,USA
    • Year and Date
      20050700
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Numerical Modeling of Antennas with Mechanically/MEMS-Enabled Moving Parts2005

    • Author(s)
      Kohei Yamagata, Michiko Kuroda, Manos M. Tentzeris
    • Organizer
      IEEE APS/URSi2005
    • Place of Presentation
      Washington DC
    • Year and Date
      20050700
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Dynamic and Electrical Analysis of MEMS Capacitor with Accelerated Motion Effects2005

    • Author(s)
      Kohei Kawano, Shafrida Shahrani, Takashi Mori, Michiko Kuroda, Manos M.Tentzeris
    • Organizer
      The 2005 IEEE ACES International Conference
    • Place of Presentation
      Honolulu,USA
    • Year and Date
      20050400
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Dynamic and Electrical Analysis of MEMS Capacitor with Accelerated Motion Effects2005

    • Author(s)
      Kohei Kawano, Shafrida Shahrani, Takashi Mori, Michiko Kuroda, Manos M. Tentzeris
    • Organizer
      IEEE/ACES2005
    • Place of Presentation
      Honolulu
    • Year and Date
      20050400
    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2010-02-04  

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