2007 Fiscal Year Final Research Report Summary
High speed synthesis of diamond using in-liquid plasma
| Project/Area Number |
17560636
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Ehime University |
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Principal Investigator |
TOYOTA Hiromichi Ehime University, Graduate School of Science and Engineering, Associate Professor (00217572)
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| Co-Investigator(Kenkyū-buntansha) |
NOMURA Shinfuku Ehime University, Graduate School of Science and Engineering, Professor (20263957)
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| Project Period (FY) |
2005 – 2007
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| Keywords | plasma process / chemical process / ceramics |
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| Research Abstract |
1. High speed synthesis of diamond
Diamond synthesis experiment was performed using in-liquid plasma process by changing experimental parameters (concentration of alcohol solution, substrate temperature, electric power and frequency, gap space between substrate and electrode). By increasing the pressure and the plasma power, the far higher growth rate was achieved than the conventional CVD diamond processes. Effective introduction of Microwave to electrode was also achieved. When the electric power of 300 W and 2.45 GHz microwave was irradiated into the methanol solution by the 6 mm electrode, the diamond film that has the thickness of 33 μm and width of 5 mm could be synthesized on the silicon substrate in 10 min. Growth rate was estimated as 200 μm/h. The result was submitted as a patent.
2. Synthesis of silicon carbide (SiC)
The good SiC crystals were synthesized by the chemical process that the hydrogen radicals pull up the impurity oxygen atoms contained in the forming SiC film. The graphite crystals were simultaneously synthesized between the SIC crystal grains. This chemical process was proved by the investigation of the plasma spectra.
3. Synthesis of aluminum nitride (AIN)
In-liquid plasma was generated in the water solution of AiCl_3 and NH_4X (X: anion) and AIN synthesis experiment was investigated. Alumina (Al_2O_3) could be synthesized; however, AIN could not be synthesized. It is important that the distance between aluminum and nitrogen atoms become closed when in-liquid plasma chemical reaction occurs.
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[Journal Article] Discharge Characteristics of MW and HF In-liquid Plasma in Water2008
Author(s)
Shinfuku, Nomura, Hiromichi, Tovota, Shinobu, Mukasa, Yoshiyuki, Takahashi, Tsunehiro, Maehara, Ayato, Kawashima, Hiroshi, Yamashita
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Journal Title
Applied Phisics Express Vol.1 No.4
Pages: 046002
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Microwave plasma in hydrocarbon liquids2006
Author(s)
Shinfuku, Nomura, Hiromichi, Thyota, Shinobu, Mukasa, Hiroshi, Yamashita, Tsunehiro, Maehara, Makoto, Kuramoto
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Journal Title
Applied Physics Letters Vol.88
Pages: 211503
Description
「研究成果報告書概要(欧文)」より
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[Presentation] In-liquid plasma chemical deposition2007
Author(s)
Yoshiyuki Takahashi, Hiromichi Toyota, Shinfuku Nomura, Shinobu Mukasa
Organizer
The 18th International Symposium on Plasma Chemistry
Place of Presentation
Kyoto
Year and Date
20070826-31
Description
「研究成果報告書概要(和文)」より
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[Presentation] High Frequency and Microwave Plasma in Water2007
Author(s)
Shinfuku Nomura, Hiromichi Toyota, Shinobu Mukasa, et. al.
Organizer
Proceedings of the ASME-JSME 2007 Thermal Engineering and Summer Heat Transfer Conference (HT2007)
Place of Presentation
Vancouver, BC, Canada
Year and Date
20070708-12
Description
「研究成果報告書概要(和文)」より
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