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2019 Fiscal Year Annual Research Report

高分子薄膜における垂直配向界面の創成と分子配置基盤技術

Research Project

Project/Area Number 17H03113
Research InstitutionTokyo Institute of Technology

Principal Investigator

早川 晃鏡  東京工業大学, 物質理工学院, 教授 (60357803)

Project Period (FY) 2017-04-01 – 2020-03-31
Keywords高分子薄膜 / ブロック共重合体 / 垂直配向制御 / 界面 / 表面自由エネルギー / ナノドメイン / ミクロ相分離構造 / DSA(誘導自己組織化)
Outline of Annual Research Achievements

本研究では,高分子ブロック共重合体の垂直配向界面を利用した高度な分子配置技術とサブナノ界面薄膜材料に展開するための研究基盤を確立することを目的に,ミクロ相分離薄膜におけるナノ構造の垂直配向制御について,一次構造,形態,基板界面,および配向性の相関などの未だ解明されていない基礎的な問題の解決に取り組んだ.
要求特性に応じた分子構造設計,ならびに精密合成されたブロック共重合体(PS-b-PHFMA,PMAPOSS-b-PTFEMA等)を用い,ナノドメインの配向状態に注目した薄膜表面および基板界面部分における詳細な構造解析を実施し,実験的観点からミクロ相分離構造の配向過程を考察し明らかにした.また,誘導自己組織化技術(DSA)によるドメインの正確な配置と高度な配列についても試み,本研究の総括として,最終目標でもあるサブナノ界面薄膜材料の開発に向けた要素技術の確立に道筋を立てることにも成功した.本年度の具体的な研究実績として,下記の内容を明らかにした.
1.前年度に引き続き,膜厚に対するナノドメインの垂直配向性について,走査型電子顕微鏡観察,ならびに斜入射小角X線散乱測定によりブロック共重合体薄膜の断面構造解析を実施し,ナノ構造の垂直配向過程を時系列で解析,また整理することで明らかにした.
2.熱処理過程におけるミクロ相分離構造の配列過程をその場観察から明らかにするために,高速原子間力顕微鏡による高分子薄膜表面のミクロ相分離ドメインの観察と解析を実施することに成功した.
3.DSA用のパターン化された基板にスピンキャスト膜を用い,熱処理を施しながら正確なドメインの配列と配置を試み,得られた膜のナノドメイン構造について,高速原子間力顕微鏡観察により詳細な構造解析を行うことに成功した.

Research Progress Status

令和元年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

令和元年度が最終年度であるため、記入しない。

  • Research Products

    (32 results)

All 2020 2019 Other

All Int'l Joint Research (3 results) Journal Article (8 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 7 results) Presentation (20 results) (of which Int'l Joint Research: 12 results,  Invited: 11 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Int'l Joint Research] University of Wisconsin- Madison/Materials Science and Engineering/Prof. Padma Gopalan(米国)

    • Country Name
      U.S.A.
    • Counterpart Institution
      University of Wisconsin- Madison/Materials Science and Engineering/Prof. Padma Gopalan
  • [Int'l Joint Research] Cornell University/Materials Science and Engineering/Prof. Christopher K. Ober(米国)

    • Country Name
      U.S.A.
    • Counterpart Institution
      Cornell University/Materials Science and Engineering/Prof. Christopher K. Ober
  • [Int'l Joint Research] Virginia Tech/Chemistry/Prof. Timothy Long(米国)

    • Country Name
      U.S.A.
    • Counterpart Institution
      Virginia Tech/Chemistry/Prof. Timothy Long
  • [Journal Article] Modifying the Interaction Parameters of a Linear ABC Triblock Terpolymer by Functionalizing the Short, Reactive Middle Block To Induce Morphological Change2020

    • Author(s)
      Wylie Kevin、Dong Lei、Chandra Alvin、Nabae Yuta、Hayakawa Teruaki
    • Journal Title

      Macromolecules

      Volume: 53 Pages: 1293~1301

    • DOI

      10.1021/acs.macromol.9b02567

    • Peer Reviewed
  • [Journal Article] Real-time and in situ observation of structural evolution of giant block copolymer thin film under solvent vapor annealing by atomic force microscopy2020

    • Author(s)
      Takano Kaori、Nyu Takashi、Maekawa Tatsuhiro、Seki Takashi、Nakatani Ryuichi、Komamura Takahiro、Hayakawa Teruaki、Hayashi Tomohiro
    • Journal Title

      RSC Advances

      Volume: 10 Pages: 70~75

    • DOI

      10.1039/c9ra09043f

    • Peer Reviewed
  • [Journal Article] Altering the Self-Assembly of Poly(styrene-block-methyl methacrylate) by Introduction of Strongly Dissimilar Molecules at the Block Interface2019

    • Author(s)
      Wylie Kevin、Nabae Yuta、Hayakawa Teruaki
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 32 Pages: 395~400

    • DOI

      10.2494/photopolymer.32.395

    • Peer Reviewed
  • [Journal Article] Preparation of polyhedral oligomeric silsesquioxane‐containing block copolymer with well‐controlled stereoregularity2019

    • Author(s)
      Tsai Sung‐Yu、Kuretani Satoshi、Manabe Kei、Terao Toshiki、Komamura Takahiro、Agata Yoshihiro、Ohta Noboru、Fujii Syuji、Nakamura Yoshinobu、Wang Chien‐Lung、Hayakawa Teruaki、Hirai Tomoyasu
    • Journal Title

      Journal of Polymer Science Part A: Polymer Chemistry

      Volume: 57 Pages: 2181~2189

    • DOI

      10.1002/pola.29498

    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Block copolymers containing stable radical and fluorinated blocks with long-range ordered morphologies prepared by anionic polymerization2019

    • Author(s)
      Cintora Alicia、Takano Hiroki、Khurana Mohit、Chandra Alvin、Hayakawa Teruaki、Ober Christopher K.
    • Journal Title

      Polymer Chemistry

      Volume: 10 Pages: 5094~5102

    • DOI

      10.1039/c9py00416e

    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Dynamic Ordering in High-χ Block Copolymer Lamellae Based on Cross-Sectional Orientational Alignment2019

    • Author(s)
      Nakatani Ryuichi、Chandra Alvin、Uchiyama Takumi、Nabae Yuta、Hayakawa Teruaki
    • Journal Title

      ACS Macro Letters

      Volume: 8 Pages: 1122~1127

    • DOI

      10.1021/acsmacrolett.9b00353

    • Peer Reviewed
  • [Journal Article] Direct In Situ Observation of the Early‐Stage Disorder‐Order Evolution of Perpendicular Lamellae in Thermally Annealed High‐χ Block Copolymer Thin Films2019

    • Author(s)
      Chandra Alvin、Nakatani Ryuichi、Uchiyama Takumi、Seino Yuriko、Sato Hironobu、Kasahara Yusuke、Azuma Tsukasa、Hayakawa Teruaki
    • Journal Title

      Advanced Materials Interfaces

      Volume: 6 Pages: 1801401~1801401

    • DOI

      10.1002/admi.201801401

    • Peer Reviewed
  • [Journal Article] Development of Ultra-microfabricating Polymeric Materials and Its Self-assembly Technology2019

    • Author(s)
      Hayakawa Teruaki
    • Journal Title

      Molecular Technology: Energy Innovation

      Volume: 1 Pages: 71~83

    • DOI

      10.1002/9783527823987.vol3_c4

  • [Presentation] Fabrication of Mesoporous Polyimide Films Through Block Copolymer Templates Under Mild Temperature and Application to Additive Manufacturing2020

    • Author(s)
      Takahiro Komamura, Glenn Spiering, Viswanath Meenakshisundaram, Robert B. Moore, Christopher B. Williams, Timothy E. Long, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      259th ACS National Meeting
    • Int'l Joint Research
  • [Presentation] Fabrication of Well-ordered Mesoporous Polyimide Films and 3D objects using Block Copolymer Self-Assembly Template and Additive Manufacturing2019

    • Author(s)
      Takahiro Komamura, Kenta Okuhara, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      2019 MII Technical Conference and Review
    • Int'l Joint Research
  • [Presentation] 超微細共連続構造形成を指向したオニウム塩型末端基を有するブロック共重合体の合成とフッ素系液晶分子の末端基導入2019

    • Author(s)
      桑村悠一郎、難波江裕太、早川晃鏡
    • Organizer
      第68回高分子討論会
  • [Presentation] Enhanced Self-Assembly of Poly(Styrene-block-Methyl Methacrylate) by Introducing a Short Functional Middle Block2019

    • Author(s)
      Kevin Wylie, Lei Dong, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      第68回高分子討論会
  • [Presentation] Tailored microphase separation of poly(styrene)-b-poly(methyl methacrylate) by introducing a functional middle block2019

    • Author(s)
      Kevin Wylie, Lei Dong, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      Korea-Japan Joint Symposium on Polymer Science 2019
    • Int'l Joint Research
  • [Presentation] Chemical Modification of Poly(Styrene-block-Methyl Methacrylate) for Increased Self Assembly Performance in Thin Films2019

    • Author(s)
      Kevin Wylie, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      The 36th International Conference of Photopolymer Science and Technology
    • Int'l Joint Research
  • [Presentation] Fabrication of Well-ordered Mesoporous Polyimide Films using Block Copolymer Self-Assembly Template2019

    • Author(s)
      Takahiro Komamura, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      2019 Southeast Polymer Forum
    • Int'l Joint Research
  • [Presentation] Anionic polymerization of PS-b-P2VP modified with fluoroalkylated chains at the junction point2019

    • Author(s)
      Yoshihiro Agata, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      Japan-Taiwan Bilateral Polymer Symposium 2019
    • Int'l Joint Research
  • [Presentation] Development of Designed Block Copolymers for Perpendicularly Oriented Nanostructures in Thin Films by Thermal Annealing2019

    • Author(s)
      Alvin Chandra, Ryuichi Nakatani, Yasunari Yoshimura, Takumi Uchiyama, Lei Dong, Kevin Wylie, Yoshihiro Agata, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      5th International Symposium on DSA
    • Int'l Joint Research / Invited
  • [Presentation] Chemically-tailored Block Copolymers For Domain Orientation and Morphology Control in Thin Films2019

    • Author(s)
      Teruaki Hayakawa, Yasunari Yoshimura, Ryuichi Nakatani, Alvin Chandra, Kevin Wylie, Seina Yamazaki, Yuta Nabae
    • Organizer
      The 6th Federation of Asian Polymer Societies Polymer Congress (FAPS 2019)
    • Int'l Joint Research / Invited
  • [Presentation] Designed Block Copolymers For Directed Self-Assembly and Nanofabrication2019

    • Author(s)
      Teruaki Hayakawa
    • Organizer
      The 36th International Conference of Photopolymer Science and Technology
    • Int'l Joint Research / Invited
  • [Presentation] Designed Block Copolymers For Nanostructured Thin Films2019

    • Author(s)
      Teruaki Hayakawa
    • Organizer
      PITTCON 2019
    • Int'l Joint Research / Invited
  • [Presentation] 分子構造設計に基づくブロック共重合体薄膜の構造制御と微細加工2019

    • Author(s)
      早川晃鏡
    • Organizer
      第163回 ラドテック研究会講演会
    • Invited
  • [Presentation] 次世代リソグラフィのための材料開発 sub-10 nm幅を目指す 高分子ブロック共重合体材料の開発2019

    • Author(s)
      早川晃鏡
    • Organizer
      大阪ニュークリアサイエンス協会 第73回UV/EB研究会
    • Invited
  • [Presentation] Surface Fabrication of Block Copolymer Films based on Poly(fluorinated ethyl methacrylate)s2019

    • Author(s)
      Sho Kurimoto, Yuta Nabae,Teruaki Hayakawa
    • Organizer
      Korea-Japan Joint Symposium on Polymer Science 2019
    • Int'l Joint Research / Invited
  • [Presentation] Substituent Effect of Polymethacrylate Block Copolymers For Perpendicular Orientation of Domains2019

    • Author(s)
      Takumi Uchiyama, Alvin Chandra, Ryuichi Nakatani, Yuta Nabae, Teruaki Hayakawa
    • Organizer
      Japan-Taiwan Bilateral Polymer Symposium 2019
    • Int'l Joint Research / Invited
  • [Presentation] ブロック共重合体リソグラフィ材料の開発と構造制御2019

    • Author(s)
      早川晃鏡
    • Organizer
      2019 高分子学会東北支部講演会
    • Invited
  • [Presentation] 多様な微細加工を指向したブロック共重合体材料の創成2019

    • Author(s)
      早川晃鏡
    • Organizer
      第93回 高分子若手研究会【関西】
    • Invited
  • [Presentation] 分子構造設計に基づく高分子ミクロ相分離構造の創成と微細加工2019

    • Author(s)
      早川晃鏡
    • Organizer
      19-1 高分子基礎物性研究会「精密重合・精密構造解析の新展開」
    • Invited
  • [Presentation] フッ素含有ポリメタクリル酸エステルを基盤としたブロック共重合体の合成と表面多孔膜の創成2019

    • Author(s)
      栗本憧,難波江裕太,早川晃鏡
    • Organizer
      第68回高分子討論会
  • [Patent(Industrial Property Rights)] Block copolymer and producing the block copolymer, and producing structure containing phase-separated structure2019

    • Inventor(s)
      T. Hayakawa, L. Dong, et al
    • Industrial Property Rights Holder
      T. Hayakawa, L. Dong, et al
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      US20190270852 A1 20190905
    • Overseas

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Published: 2021-01-27  

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