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2017 Fiscal Year Annual Research Report

Investigation of novel methods of controlling output power with stable wavelength operation and modulation bandwidth enhancement by long-wavelength transistor lasers

Research Project

Project/Area Number 17H03247
Research InstitutionTokyo Institute of Technology

Principal Investigator

西山 伸彦  東京工業大学, 工学院, 准教授 (80447531)

Project Period (FY) 2017-04-01 – 2020-03-31
Keywords半導体レーザ / InP / トランジスタレーザ / フォトニックネットワーク
Outline of Annual Research Achievements

平成29年度は、長波長帯トランジスタレーザの高速電圧変調動作に向けて計算と実際の作製の両面から取り組んだ。まず計算においては、これまで光の観点と電気の観点のそれぞれから理論計算を行ってきたが、この2つを同時に考慮することにより、より正確な理論性能の検証を目指した。その結果、コレクタ/ベース間の接合容量が、速度の律則となるとともに、著しく光出力特性に影響を与えることが分かった。これは、接合容量のため、キャリアの充放電が過渡的に発生し、活性層に注入されるキャリアの量を多く変えるためであると予想され、接合容量を低減した構造での計算結果では良好な特性を得ることができることが分かった。次に実際に素子を作製し、電圧変調構造を測定した。この段階では接合容量の低減は行わず、理論との比較を目的として行った。高周波特性の向上を目的として金ワイヤではなく直接高速プローブを素子に落とす形とした結果、7GHz以上の小信号帯域を得ることができた。一方で大信号測定では、大きなパルス遅延などが見られたが、計算による結果と完全に一致することが確認されたため、接合容量の低減を行うことで、改善が得られることに強い自信を持つことが可能となった。
また、これまでの素子は動作温度として40°Cまでしか動作しなかったが、メッキの導入などを行うことによって長波長帯トランジスタレーザでは最高温度となる80°C以上の発振を得ることに成功した。
来年度以降は接合容量の低減素子を作製していく予定である。

Current Status of Research Progress
Current Status of Research Progress

2: Research has progressed on the whole more than it was originally planned.

Reason

当初の予定である変調特性に関する理論と実測の一致を完全にみることができた。また、世界最高動作温度を実現することができたため。

Strategy for Future Research Activity

接合容量低減素子の作製のため、関連する装置(端面反射膜形成装置、スクライバ装置)の早期の立ち上げを行うことによって、素子作製を短期に行うことを目指したいと考えている。

  • Research Products

    (76 results)

All 2018 2017 Other

All Journal Article (12 results) (of which Peer Reviewed: 12 results,  Open Access: 4 results) Presentation (63 results) (of which Int'l Joint Research: 33 results,  Invited: 8 results) Remarks (1 results)

  • [Journal Article] 20-Gbit/s direct modulation of GaInAsP/InP membrane distributed-reflector laser with an energy cost of less than 100 fJ/bit2018

    • Author(s)
      Takahiro Tomiyasu, Takuo Hiratani, Daisuke Inoue, Kai Fukuda, Nagisa Nakamura, Tatsuya Uryu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Journal Title

      Applied Physics Express

      Volume: 11 Pages: 12704

    • DOI

      10.7567/APEX.11.012704

    • Peer Reviewed / Open Access
  • [Journal Article] 20-Gbps operation of membrane-based GaInAs/InP waveguide-type p-i-n photodiode bonded on Si substrate2018

    • Author(s)
      Zhichen Gu, Daisuke Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Applied Physics Express

      Volume: 11 Pages: 22102

    • DOI

      10.1364/AO.56.007841

    • Peer Reviewed / Open Access
  • [Journal Article] Analysis of the slow-light effect in silicon wire waveguides with metamaterials2018

    • Author(s)
      Satoshi Yamasaki, Tomohiro Amemiya, Zhichen Gu, Junichi Suzuki, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Journal of Optical Society of America B

      Volume: 35 Pages: 797~804

    • DOI

      10.1364/JOSAB.35.000797

    • Peer Reviewed
  • [Journal Article] Optically-driven Terahertz Wave ModulaT.sing Ring-shaped Microstripline with GaInAs Photoconductive Mesa Structure2017

    • Author(s)
      S. Yamasaki, A. Yasui, T. Amemiya, K. Furusawa, S. Hara, I. Watanabe, A. Kanno, N. Sekine, Z. Gu, N. Nishiyama, A. Kasamatsu, S. Arai
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 23 Pages: 3400408

    • DOI

      10.1109/JSTQE.2017.2662660

    • Peer Reviewed
  • [Journal Article] High differential quantum efficiency operation of GaInAsP/InP membrane distributed-reflector laser on Si2017

    • Author(s)
      Takahiro Tomiyasu, Takuo Hiratani, Daisuke Inoue, Nagisa Nakamura, Kai Fukuda, Tatsuya Uryu, Tomohiro Amemiya, Nobuhiko Nishiyama, and Shigehisa Arai
    • Journal Title

      Applied Physics Express

      Volume: 10 Pages: 62702

    • DOI

      10.7567/APEX.10.062702

    • Peer Reviewed / Open Access
  • [Journal Article] Introduction of AlInAs-oxide Current Confinement Structure into GaInAsP/SOI Hybrid Fabry-Perot Laser2017

    • Author(s)
      Junichi Suzuki, Yusuke Hayashi, Satoshi Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Pages: 62103

    • DOI

      10.7567/JJAP.56.062103

    • Peer Reviewed
  • [Journal Article] High Efficiency Operation of Membrane Distributed-Reflector Lasers on Silicon Substrate2017

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Kai Fukuda, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 23 Pages: 3700108

    • DOI

      10.1109/JSTQE.2017.2704289

    • Peer Reviewed
  • [Journal Article] Integrated Optical Link on Si Substrate Using Membrane Distributed-Feedback Laser and p-i-n Photodiode2017

    • Author(s)
      Daisuke Inoue, Takuo Hiratani, Kai Fukuda, Takahiro Tomiyasu, Zhichen Gu, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 23 Pages: 3700208

    • DOI

      10.1109/JSTQE.2017.2716184

    • Peer Reviewed
  • [Journal Article] Metamaterial Waveguide Devices for Integrated Optics2017

    • Author(s)
      Tomohiro Amemiya, Toru Kanazawa, Satoshi Yamasaki, Shigehisa Arai
    • Journal Title

      Materials

      Volume: 10 Pages: 1037

    • DOI

      10.3390/ma10091037

    • Peer Reviewed / Open Access
  • [Journal Article] On-chip membrane-based GaInAs/InP waveguide-type p-i-n photodiode fabricated on silicon substrate2017

    • Author(s)
      Zhichen Gu, Tatsuya Uryu, Nagisa Nakamura, Daisuke Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Applied Optics

      Volume: 56 Pages: 7841~7848

    • DOI

      10.1364/AO.56.007841

    • Peer Reviewed
  • [Journal Article] High Efficiency Operation of GaInAsP/InP Membrane Distributed-Reflector Laser on Si2017

    • Author(s)
      Takuo Hiratani, Daisuke Inoue, Takahiro Tomiyasu, Kai Fukuda, Nagisa Nakamura, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 29 Pages: 1832~1835

    • DOI

      10.1109/LPT.2017.2753263

    • Peer Reviewed
  • [Journal Article] Lasing characteristics of 1.3-μm npn-AlGaInAs transistor-laser with narrower-bandgap p-GaInAsP base layer on semi-insulating InP substrate2017

    • Author(s)
      S. Yoshitomi, S. Tadano, K. Yamanaka, N. Nishiyama, S. Arai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Pages: 12102

    • DOI

      10.7567/JJAP.57.012102

    • Peer Reviewed
  • [Presentation] III-V/Siハイブリッド集積技術を利用した光デバイスの展開2018

    • Author(s)
      西山 伸彦
    • Organizer
      第65回応用物理会春季学術講演会
    • Invited
  • [Presentation] Membrane DFB and DR lasers for low-power consumption and high-speed operation2018

    • Author(s)
      Shigehisa Arai
    • Organizer
      SPIE Photonics Europe 2018
    • Int'l Joint Research / Invited
  • [Presentation] 1.3 um transistor lasers with AlGaInAs buried hetero-regrowth structure2018

    • Author(s)
      Nobuhiko Nishiyama
    • Organizer
      SPIE Photonics Europe 2018
    • Int'l Joint Research / Invited
  • [Presentation] Slow-light Si-wire Waveguide with Metamaterial2018

    • Author(s)
      山﨑 理司
    • Organizer
      The Conference on Lasers and Electro-Optics 2018 (CLEO 2018)
    • Int'l Joint Research
  • [Presentation] Investigation of Thermo-Optic Wavelength Tuning Techniques of Hybrid III-V/SOI DFB Lasers for LiDAR Applications2018

    • Author(s)
      M. Eissa
    • Organizer
      Compound Semiconductor Week 2018
    • Int'l Joint Research
  • [Presentation] Photoluminescence Properties of GaInAs/InP Layers by Ar Fast Atom Beam for Room Temperature Surface Activated Bonding Toward Hybrid PIC2018

    • Author(s)
      Yuning Wang
    • Organizer
      Compound Semiconductor Week 2018
    • Int'l Joint Research
  • [Presentation] High Efficiency Optical Mode Coupling Between Si Waveguide and III-V/Si Hybrid Sections by Double Taper-Type Coupler Structure2018

    • Author(s)
      Takehiko Kikuchi
    • Organizer
      Compound Semiconductor Week 2018
    • Int'l Joint Research
  • [Presentation] Reduction of Lasing Wavelength Variation Due to Injection Current into GaInAsP/InP Membrane Distributed-Reflector Laser Bonded on Si2018

    • Author(s)
      Weicheng Fang
    • Organizer
      Compound Semiconductor Week 2018
    • Int'l Joint Research
  • [Presentation] Introduction of Ridge-Waveguide Structure for Low-Power Operation of GaInAsP/InP Membrane Distributed-Reflector Laser2018

    • Author(s)
      Nagisa Nakamura
    • Organizer
      Compound Semiconductor Week 2018
    • Int'l Joint Research
  • [Presentation] Broadband Infrared Refractive Index Measurement Using Plasmonic Antenna Resonance2018

    • Author(s)
      各務 響
    • Organizer
      the 9th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META2018)
    • Int'l Joint Research
  • [Presentation] 1.3 um帯トランジスタレーザにおける電流増幅率と 温度安定性の向上2018

    • Author(s)
      吉冨 翔一
    • Organizer
      電子情報通信学会 光エレクトロニクス(OPE)研究会 2018年度1月研究会
  • [Presentation] Si上GaInAs/InP p-i-n薄膜光検出器の20 Gbps動作2018

    • Author(s)
      Z. Gu
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] 分布反射器を有する半導体薄膜光検出器の構造設計2018

    • Author(s)
      鄭 叙
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] 有機薄膜光集積回路に向けた入出力グレーティングカプラの解析2018

    • Author(s)
      増田 佳祐
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] 光アンテナを用いた赤外屈折率測定法: 原理と理論2018

    • Author(s)
      各務 響
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] 光アンテナを用いた赤外屈折率測定法: 実証実験2018

    • Author(s)
      各務 響
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] 1.3-um帯npn-AlGaInAs/InP トランジスタレーザにおける 電気的応答を考慮した大信号特性の解析2018

    • Author(s)
      後藤 優征
    • Organizer
      第65回応用物理学会春季学術講演会
  • [Presentation] III-V/Siハイブリッド部分直接接合における非破壊接合状況確認法の提案2018

    • Author(s)
      白 柳
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] III-V/SOI ハイブリッドデバイス/Si 細線導波路間テーパ型モード変換器の構造評価2018

    • Author(s)
      鈴木 純一
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] GaInAsP/InP半導体薄膜レーザの低消費電力動作に向けた構造検討2018

    • Author(s)
      中村 なぎさ
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] Thermal Resistance Investigation of GaInAsP/InP Membrane Lasers2018

    • Author(s)
      Fang Weicheng
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] ハイブリッド集積に向けたAr-FAB表面活性化接合法のInP/Si接合特性の検討2018

    • Author(s)
      永坂 久美
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] メタマテリアル光導波路におけるスローライト効果の観測2018

    • Author(s)
      山﨑 理司
    • Organizer
      第65回応用物理会春季学術講演会
  • [Presentation] GRIN-SCH構造を有する1.3 um帯npn-AlGaInAs/InP トランジスタレーザの静特性2018

    • Author(s)
      吉冨 翔一
    • Organizer
      電子情報通信学会 2018年総合大会
  • [Presentation] III-V/Si ハイブリッドSOA 多機能集積に向けたハイブリッド領域/シリコン領域2 段テーパ構造の結合特性評価2018

    • Author(s)
      立花 文人
    • Organizer
      電子情報通信学会 2018年総合大会
  • [Presentation] N2-Plasma Activated Bonding for GaInAsP/SOI Hybrid Lasers2017

    • Author(s)
      Nobuhiko Nishiyama
    • Organizer
      5th International Workshop on Low Tempereature Bondning for 3D Integration
    • Int'l Joint Research / Invited
  • [Presentation] プラズマ活性化接合法のシリコン基板上半導体レーザへの応用展開2017

    • Author(s)
      西山 伸彦
    • Organizer
      日本学術振興会 接合界面創成技術第191委員会
    • Invited
  • [Presentation] Progress of Hybrid III-V Lasers on Si and SOI substrates2017

    • Author(s)
      Nobuhiko Nishiyama
    • Organizer
      The 78th JSAP Autumn Annual Meeting
    • Int'l Joint Research / Invited
  • [Presentation] 直接接合技術の進展と光デバイス・集積応用2017

    • Author(s)
      西山 伸彦
    • Organizer
      電子情報通信学会 2017年ソサイエティ大会
    • Invited
  • [Presentation] Current States of Hybrid III-V Lasers on Si and SOI substrate2017

    • Author(s)
      Nobuhiko Nishiyama
    • Organizer
      The 39th Progress In Electromagnetics Research Symposium
    • Int'l Joint Research / Invited
  • [Presentation] Temperature Dependence of Threshold Current off GaInAsP/InP Membrane Lasers with Bragg Wavelength Detuning2017

    • Author(s)
      D. Inoue
    • Organizer
      Compound Semiconductor Week 2017: 29th International Conference on Indium Phosphide and Related Materials (IPRM 2017)
    • Int'l Joint Research
  • [Presentation] Novel Optical-mode Converter Between III-V/SOI Hybrid Devices2017

    • Author(s)
      J. Suzuki
    • Organizer
      Compound Semiconductor Week 2017: 29th International Conference on Indium Phosphide and Related Materials (IPRM 2017)
    • Int'l Joint Research
  • [Presentation] Waveguide Loss Reduction of GaInAsP/InP Membrane Lasers by Reduction of Doping Concentration of p-InP Cladding Layer2017

    • Author(s)
      T. Tomiyasu
    • Organizer
      Compound Semiconductor Week 2017: 29th International Conference on Indium Phosphide and Related Materials (IPRM 2017)
    • Int'l Joint Research
  • [Presentation] High Efficiency Operation Of Membrane Distributed-Reflector Laser With Reduced Index Coupling Coefficient Structure2017

    • Author(s)
      T. Tomiyasu
    • Organizer
      Compound Semiconductor Week 2017: 29th International Conference on Indium Phosphide and Related Materials (IPRM 2017)
    • Int'l Joint Research
  • [Presentation] Double taper-type mode convertor for direct bonded III-V/SOI hybrid photonic devices2017

    • Author(s)
      S. Inoue
    • Organizer
      5th International Workshop on Low Tempereature Bondning for 3D Integration
    • Int'l Joint Research
  • [Presentation] High Efficiency Operation Of Membrane Distributed-Reflector Laser With Reduced Index Coupling Coefficient Structure2017

    • Author(s)
      T. Hiratani
    • Organizer
      The Pacific Rim Conference on Lasers and Electro-Optics 2017 (CLEO-Pacific Rim 2017)
    • Int'l Joint Research
  • [Presentation] Lasing Characteristics of 1.3-um npn-AlGaInAs/InP Transistor Laser with Reduced Base Bandgap Structure2017

    • Author(s)
      S. Yoshitomi
    • Organizer
      The Pacific Rim Conference on Lasers and Electro-Optics 2017 (CLEO-Pacific Rim 2017)
    • Int'l Joint Research
  • [Presentation] Base Layer Design for Voltage Modulation in 1.3-μm Wavelength npn-AlGaInAs/InP Transistor Lasers2017

    • Author(s)
      K. Yamanaka
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Design of Low-power-consumption Membrane Photodiode toward On-chip Optical Interconnection2017

    • Author(s)
      Z. Gu
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Resistance Reduction of GaInAsP/InP Membrane DR Lasers on Si2017

    • Author(s)
      N. Nakamura
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Design of Coupling Structure between RSOA and SiN Waveguide2017

    • Author(s)
      J. Suzuki
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Metamaterial Optical Buffer Based on Slow-light Effect2017

    • Author(s)
      S. Yamasaki
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Bragg Wavelength Detuning Effect on Temperature Dependences of GaInAsP/InP Membrane Lasers2017

    • Author(s)
      D. Inoue
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Assessment of PL Characteristics of GaInAsP/InP by Ar-FAB Irradiation for Surface Activated Bonding2017

    • Author(s)
      K. Nagasaka
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Thermal Characteristics of 1.3-μm npn-AlGaInAs/InP Transistor Laser with Au Plating2017

    • Author(s)
      S. Yoshitomi
    • Organizer
      The 24th Congress of the International Commission for Optics (ICO-24)
    • Int'l Joint Research
  • [Presentation] Membrane-based GaInAs/InP waveguide-type p-i-n photodetector fabricated on Si substrate using Benzocyclobutene bonding2017

    • Author(s)
      Z. Gu
    • Organizer
      2017 International Conference on Solid State Devices and Materials (SSDM 2017)
    • Int'l Joint Research
  • [Presentation] Analysis of Slow-light Effect in Metamaterial Optical Waveguide2017

    • Author(s)
      S. Yamasaki
    • Organizer
      7th International Symposium on Photonics and Electronics Convergence (ISPEC 2017)
    • Int'l Joint Research
  • [Presentation] Effect of Ar-FAB irradiation to PL Characteristics of GaInAs/InP toward room temperature surface activated bonding2017

    • Author(s)
      K. Nagasaka
    • Organizer
      7th International Symposium on Photonics and Electronics Convergence (ISPEC 2017)
    • Int'l Joint Research
  • [Presentation] PAM-4 direct modulation of GaInAsP/InP membrane DR laser on Si substrate2017

    • Author(s)
      T. Uryu
    • Organizer
      7th International Symposium on Photonics and Electronics Convergence (ISPEC 2017)
    • Int'l Joint Research
  • [Presentation] Low Power Operation of Membrane Distributed-Reflector Lasers on Si2017

    • Author(s)
      N. Nakamura
    • Organizer
      7th International Symposium on Photonics and Electronics Convergence (ISPEC 2017)
    • Int'l Joint Research
  • [Presentation] Wavelength Tuning of III-V/SOI Hybrid Lasers by Direct Heating of Si waveguide2017

    • Author(s)
      M. Eissa
    • Organizer
      7th International Symposium on Photonics and Electronics Convergence (ISPEC 2017)
    • Int'l Joint Research
  • [Presentation] ブラッグ波長離調を用いた半導体薄膜DFB/DRレーザのしきい値電流温度依存性2017

    • Author(s)
      井上 大輔
    • Organizer
      電子情報通信学会 レーザ・量子エレクトロニクス研究会(LQE)
  • [Presentation] 多層光回路に向けた曲線テーパ型層間結合器の設計2017

    • Author(s)
      伊東 憲人
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
  • [Presentation] III-V/SOIハイブリッドデバイスのSi導波路結合器部のテーパ先端幅許容度向上に向けた検討2017

    • Author(s)
      鈴木 純一
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
  • [Presentation] Si基板上薄膜分布反射型レーザのNRZ及びPAM-4直接変調2017

    • Author(s)
      瓜生 達也
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
  • [Presentation] Si上半導体薄膜DR レーザの高効率・高速変調特性2017

    • Author(s)
      中村 なぎさ
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
  • [Presentation] 表面活性化接合に向けたAr-FAB照射によるGaInAs/InPウェハのPL特性への影響評価2017

    • Author(s)
      永坂 久美
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
  • [Presentation] Si上GaInAs/InP p-i-n 薄膜光検出器の感度特性の評価2017

    • Author(s)
      Z. Gu
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
  • [Presentation] 平面型メタマテリアル光バッファの特性解析と基礎検討2017

    • Author(s)
      山﨑 理司
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
  • [Presentation] 薄膜分布反射型レーザの高電力変換効率動作2017

    • Author(s)
      平谷 拓生
    • Organizer
      電子情報通信学会 2017年ソサイエティ大会
  • [Presentation] Si導波路上金属メタマテリアルを利用した光バッファ用遅延構造の設計2017

    • Author(s)
      山﨑 理司
    • Organizer
      電子情報通信学会 レーザ・量子エレクトロニクス研究会(LQE)
  • [Presentation] III-V/SOIハイブリッドデバイスとSi導波路接続用テーパ型モード変換器構造の検討2017

    • Author(s)
      鈴木 純一
    • Organizer
      電子情報通信学会 レーザ・量子エレクトロニクス研究会(LQE)
  • [Presentation] Si上半導体薄膜DRレーザの低電流・高速動作化について2017

    • Author(s)
      中村 なぎさ
    • Organizer
      電子情報通信学会 レーザ・量子エレクトロニクス研究会(LQE)
  • [Remarks] 荒井・西山研究室HP

    • URL

      http://www.pe.titech.ac.jp/AraiLab/

URL: 

Published: 2018-12-17  

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