Fabrication of 3-dimensional metal structure with sub-100 nm resolution using optical potential

2020 Fiscal Year Final Research Report

• Project/Area Number: 17H04900
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: Michihata Masaki 東京大学, 大学院工学系研究科(工学部), 准教授 (70588855)
• Project Period (FY): 2017-04-01 – 2020-03-31
• Keywords: 光圧 / 付加製造 / インプロセス / ベッセルビーム

Outline of Final Research Achievements

In this study, we proposed a novel micro-scale additive manufacturing method based on the optical potential. The basic principle of the proposed method involves accumulating and stacking particles dispersed in air by using optical radiation pressure. In this project, the water droplet of several μm in diameter containing particles suspended in space were successfully trapped in the optical potential of Bessel beam and then the only particles were deposited on the substrate. As a result of processing experiment, the silica particles with a diameter of 1 μm could be three dimensionally structured on the axis of the Bessel beam. The trajectory of the accumulated particles was numerically estimated and experimentally observed. The numerical and experimental results agreed well; specifically, the background flow carried the particles to the optical axis of the Bessel beam, and then the particles were localized at the bottom of the optical potential valley on the substrate.

Free Research Field

加工計測学

Academic Significance and Societal Importance of the Research Achievements

光放射圧を用いた集積加工技術はこれまでに提案されておらず、このような空気中でマイクロ/ナノスケールの複雑構造を加工できる技術が構築されれば、これまでにない機能を持った製品製造が期待できる。本研究では、その加工原理の検証を行うことができ、今後の新しい加工技術の発展に向け貢献が期待できる。