FeドープInAs/GaSbヘテロ接合による新規物性現象と次世代デバイスの創製

2019 Fiscal Year Annual Research Report

• Project/Area Number: 17H04922
• Research Institution: The University of Tokyo
• Principal Investigator: Le DucAnh 東京大学, 大学院工学系研究科(工学部), 助教 (50783594)
• Project Period (FY): 2017-04-01 – 2020-03-31
• Keywords: スピントロニクス / 強磁性半導体 / 非相反伝導現象 / 量子情報デバイス / 磁気異方性 / 巨大磁気抵抗効果

Outline of Annual Research Achievements

①　(Ga,Fe)Sb（Fe濃度30%）の磁気異方性の温度依存性を強磁性共鳴で調べた。膜厚が40nmの試料では温度降下に連れて磁化容易軸が面内から面直へ切り替える現象を観測し、その起源を明らかにした。この結果をJ. Appl. Phys.に発表した。またP型(Ga,Fe)Sb（Fe濃度5%）のバンド構造を角度分解光電子分光(ARPES)で、価電子帯頂上にp-d軌道混成によって不純物バンドが生成され、Fermi準位がその中に存在する描像が明瞭に観測された。この結果をPhys. Rev. Bに発表した。
③　(Ga,Fe)Sb/InAs/(Ga,Fe)Sbの3層構造でFe系強磁性半導体で初めて巨大磁気抵抗効果（GMR）の実現に成功した。また電界効果トランジスタ構造を作製して、伝導特性と磁気抵抗の制御を実現した。本成果はAppl. Phys. Lett.へ投稿中。
④　InAsにFeをδドープして単結晶構造が保ったままでInAs/FeAs超格子構造の成長を初めて成功した。この超格子の強磁性転移温度がFeAs層間距離の3乗に反比例し、急増する結果が得られた。また低温で500%も巨大磁気抵抗効果を観測し、ゲート電圧でも制御可能。本成果はNature Commun.へ投稿中。
⑤　(Ga,Fe)Sb /InAs二層構造で、InAs2次元チャネルの左右エッジに面直磁場をかけ、磁場に線形かつ奇関数的に依存する27%の大きな磁気抵抗を観測した。この現象は時間反転対称と空間反転対称性が破れることによって電気伝導特性がOnsager相反定理を反し非常に稀な現象である。本成果はNature Phys.へ投稿中。
⑥　Nb/(In,Fe)As/Nb構造でACジョセフソン効果によって、シャピロステップを観測した。マジョラナフェルミオンを誘起と検出するための基盤技術を確立した。

Research Progress Status

令和元年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

令和元年度が最終年度であるため、記入しない。

Research Products

• [Journal Article] Magnetization process of the insulating ferromagnetic semiconductor (Al,Fe)Sb (2020)
  • Author(s): S. Sakamoto, Y. Nonaka, K. Ikeda, Zh. Chi, Y. Wan, M. Suzuki, A. Fujimori, L. D. Anh, P. N. Hai, Y. Takeda, Y. Saitoh, M. Kobayashi, M. Tanaka, Y. K. Wakabayashi, and H. Yamagami
  • Journal Title: Physical Review B Volume: 101 Pages: 075204
  • DOI: https://doi.org/10.1103/PhysRevB.101.075204
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Efficient intrinsic spin-to-charge current conversion in an all-epitaxial single-crystal perovskite-oxide heterostructure of La0.67Sr0.33MnO3/LaAlO3/SrTiO3 (2020)
  • Author(s): S. Ohya, D. Araki, L. D. Anh, S. Kaneta, M. Seki, H. Tabata, and M. Tanaka
  • Journal Title: Physical Review Research Volume: 2 Pages: 012014 (R)
  • DOI: https://doi.org/10.1103/PhysRevResearch.2.012014
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Temperature dependence of magnetic anisotropy in heavily Fe-doped ferromagnetic semiconductor (Ga,Fe)Sb (2020)
  • Author(s): S. Goel, L. D. Anh, S. Ohya, and M. Tanaka
  • Journal Title: Journal of Applied Physics Volume: 127 Pages: 023904
  • DOI: https://doi.org/10.1063/1.5127583
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] High‐Mobility 2D Hole Gas at a SrTiO3 Interface (2020)
  • Author(s): Le Duc Anh, Shingo Kaneta, Masashi Tokunaga, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, Shinobu Ohya
  • Journal Title: Advanced Materials Volume: 7 Pages: 1906003
  • DOI: https://doi.org/10.1002/adma.201906003
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Hybridization between the ligand p band and Fe-3d orbitals in the p-type ferromagnetic semiconductor (Ga,Fe)Sb (2020)
  • Author(s): T. Takeda, M. Suzuki, Le Duc Anh , N. T. Tu, T. Schmitt, S. Yoshida, M. Sakano, K. Ishizaka, Y. Takeda, S. Fijimori, M. Seki, H. Tabata, A. Fujimori, V. N. Strocov, M. Tanaka, and M. Kobayashi
  • Journal Title: Physical Review B Volume: 101 Pages: 155142
  • DOI: https://doi.org/10.1103/PhysRevB.101.155142
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Observation of quantum size effect at the conduction band bottom of n-type ferromagnetic semiconductor (In,Fe)As thin films (2019)
  • Author(s): Shingo Kaneta, Le Duc Anh, Karumuri Sriharsha, and Masaaki Tanaka
  • Journal Title: Applied Physics Express Volume: 12 Pages: 073001/1-4
  • DOI: https://doi.org/10.7567/1882-0786/ab25c8
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Electronic structure of the high-TC ferromagnetic semiconductor (Ga,Fe)Sb: X-ray magnetic circular dichroism and resonance photoemission spectroscopy studies (2019)
  • Author(s): Shoya Sakamoto, Nguyen Thanh Tu, Yukiharu Takeda, Shin-ichi Fujimori, Pham Nam Hai, Le Duc Anh, Yuki K. Wakabayashi, Goro Shibata, Masafumi Horio, Keisuke Ikeda, Yuji Saitoh, Hiroshi Yamagami, Masaaki Tanaka, and Atsushi Fujimori.
  • Journal Title: Physical Review B Volume: 100 Pages: 035204
  • DOI: https://doi.org/10.1103/PhysRevB.100.035204
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] In-plane to perpendicular magnetic anisotropy switching in heavily-Fe-doped ferromagnetic semiconductor (Ga,Fe)Sb with high Curie temperature (2019)
  • Author(s): Shobhit Goel, Le Duc Anh, Nguyen Thanh Tu, Shinobu Ohya, and Masaaki Tanaka
  • Journal Title: Physical Review Materials Volume: 3 Pages: 084417
  • DOI: https://doi.org/10.1103/PhysRevMaterials.3.084417
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Heavily Fe-doped ferromagnetic semiconductor (In,Fe)Sb with high Curie temperature and large magnetic anisotropy (2019)
  • Author(s): Nguyen Thanh Tu, Pham Nam Hai, Le Duc Anh, Masaaki Tanaka
  • Journal Title: Applied Physics Express Volume: 12 Pages: 103004
  • DOI: https://doi.org/10.7567/1882-0786/ab3f4b
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Giant gate-controlled proximity magnetoresistance in semiconductor-based ferromagnetic/non-magnetic bilayers (2019)
  • Author(s): Kosuke Takiguchi, Le Duc Anh, Takahiro Chiba, Tomohiro Koyama, Daichi Chiba, Masaaki Tanaka
  • Journal Title: Nature Physics Volume: 15 Pages: 1134
  • DOI: https://doi.org/10.1038/s41567-019-0621-6
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Ultralow-Power Orbital-Controlled Magnetization Switching Using a Ferromagnetic Oxide Interface (2019)
  • Author(s): Le Duc Anh, Takashi Yamashita, Hiroki Yamasaki, Daisei Araki, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, and Shinobu Ohya
  • Journal Title: Physical Review Applied Volume: 12 Pages: 041001
  • DOI: https://doi.org/10.1103/PhysRevApplied.12.041001
  • Peer Reviewed / Int'l Joint Research
• [Presentation] Efficient intrinsic spin-to-charge current conversion in an all-epitaxial single-crystal perovskite-oxide heterostructure of La0.67Sr0.33MnO3/LaAlO3/SrTiO3 (2020)
  • Author(s): S. Ohya, D. Araki, L. D. Anh, S. Kaneta, M. Seki, H. Tabata, and M. Tanaka
  • Organizer: American Physical Society (APS) March Meeting 2020
  • Int'l Joint Research
• [Presentation] High-mobility two-dimensional hole gas at the SrTiO3 interface formed by depositing an ultrathin metal film at room temperature (2020)
  • Author(s): Shingo Kaneta, Le Duc Anh, Masashi Tokunaga, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, Shinobu Ohya
  • Organizer: American Physical Society (APS) March Meeting 2020
  • Int'l Joint Research
• [Presentation] Efficient bias-driven magnetization control by orbital selection at a La0.67Sr0.33MnO3 interface (2020)
  • Author(s): Le Duc Anh, T. Yamashita, N. Okamoto, H. Yamasaki, D. Araki, M. Seki, H. Tabata, M. Tanaka, S. Ohya
  • Organizer: APS March Meeting 2020
  • Int'l Joint Research / Invited
• [Presentation] LaSrMnO3/LaAlO3/SrTiO3 ヘテロ構造における真性高効率スピン流電流変換とその理論的理解 (2020)
  • Author(s): S. Ohya, D. Araki, Le Duc Anh, S. Kaneta, M. Seki, H. Tabata, M. Tanaka
  • Organizer: The 10th seminar of Ferroic-Ordering and Their Manipulation Study Group
• [Presentation] SrTiO3 界面における高移動度二次元正孔ガスの実現 (2020)
  • Author(s): Shingo Kaneta, Le Duc Anh, Masahi Tokunaga, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, Shinobu Ohya
  • Organizer: The 10th seminar of Ferroic-Ordering and Their Manipulation Study Group
• [Presentation] SrTiO3 界面における高移動度二次元正孔ガスの実現 (2020)
  • Author(s): Shingo Kaneta, Le Duc Anh, Masahi Tokunaga, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, Shinobu Ohya
  • Organizer: 67th Spring Meeting of the Japan Society of Applied Physics
• [Presentation] Fe concentration dependence of the Fe 3d electronic states in p-type ferromagnetic semiconductor (Ga1-x,Fex)Sb (2020)
  • Author(s): Takahito Takeda, Kohsei Araki, Yuita Fujisawa, Le Duc Anh, Nguyen Thanh Tu, Tukiharu Takeda, Shin-ichi Fujimori, Atsushi Fujimori, Masaaki Tanaka, and Masaki Kobayashi
  • Organizer: 67th Spring Meeting of the Japan Society of Applied Physics
• [Presentation] Epitaxial growth and characterizations of quaternary alloy ferromagnetic semiconductor (In,Ga,Fe)Sb (2020)
  • Author(s): Kengo Takase, Tomoki Hotta, Kosuke Takiguchi, Sriharsha Karumuri, Le Duc Anh, Masaaki Tanaka
  • Organizer: 67th Spring Meeting of the Japan Society of Applied Physics
• [Presentation] Carrier type switching in quaternary alloy ferromagnetic semiconductor (In,Ga,Fe)Sb by controlling the composition of In and Ga (2020)
  • Author(s): Tomoki Hotta, Kengo Takase, Kosuke Takiguchi, Sriharsha Karumuri, Le Duc Anh, Masaaki Tanaka
  • Organizer: 67th Spring Meeting of the Japan Society of Applied Physics
• [Presentation] Current-perpendicular-to-plane giant magnetoresistance in ferromagnetic semiconductor (Ga Fe)Sb heterostructures with high Curie temperature (2020)
  • Author(s): Takaoki Kido, Kengo Takase, Le Duc Anh, Kosuke Takiguchi, Masaaki Tanaka
  • Organizer: 67th Spring Meeting of the Japan Society of Applied Physics
• [Presentation] Heavily Fe-doped n-type ferromagnetic semiconductor (In,Fe)Sb with high Curie temperature and large magnetic (2019)
  • Author(s): Nguyen Thanh Tu, Pham Nam Hai, Le Duc Anh, and Masaaki Tanaka
  • Organizer: Compound Semiconductor Week (CSW2019)
  • Int'l Joint Research
• [Presentation] Magnetic anisotropy switching in heavily-Fe-doped high-Curie-temperature ferromagnetic semiconductor (2019)
  • Author(s): Shobhit Goel, Le Duc Anh, Nguyen Thanh Tu, Shinobu Ohya, and Masaaki Tanaka
  • Organizer: Compound Semiconductor Week (CSW2019)
  • Int'l Joint Research
• [Presentation] Gate-controlled proximity magnetoresistance in an InAs / (Ga,Fe)Sb quantum well heterostructure (2019)
  • Author(s): Kosuke Takiguchi, Le Duc Anh, Takahiro Chiba, Tomohiro Koyama, Daichi Chiba, and Masaaki Tanaka
  • Organizer: Compound Semiconductor Week (CSW2019)
  • Int'l Joint Research
• [Presentation] Spin-valve magnetoresistance in ferromagnetic semiconductor (Ga,Fe)Sb heterostructures with high Curie (2019)
  • Author(s): Kengo Takase, Le Duc Anh, Kosuke Takiguchi, Nguyen Thanh Tu, and Masaaki Tanaka
  • Organizer: Compound Semiconductor Week (CSW2019)
  • Int'l Joint Research
• [Presentation] Giant gate-controlled proximity magnetoresistance in semiconductor-based ferromagnetic/nonmagnetic bilayers (2019)
  • Author(s): K. Takiguchi, L. D. Anh, T. Chiba, T. Koyama, D. Chiba, and M. Tanaka
  • Organizer: 10th International School and Conference on Spintronics and Quantum Information Technology
  • Int'l Joint Research
• [Presentation] Unveiling the electronic band structure of n-type ferromagnetic semiconductor (In,Fe)As (2019)
  • Author(s): Masaki Kobayashi, Le Duc Anh, Jan Minar, Walayat Khan, Pham Nam Hai, Yoshihisa Harada, Thorsten Schmitt, Atsushi Fujimori, Masaharu Oshima, Masaaki Tanaka, and Vladimir N. Strocov
  • Organizer: 40th International Conference on Vacuum Ultraviolet and X-ray Physics (VUVX19)
  • Int'l Joint Research
• [Presentation] In-plane to perpendicular magnetic anisotropy switching in heavily-Fe-doped ferromagnetic semiconductor (Ga,Fe)Sb with high Curie temperature (2019)
  • Author(s): Shobhit Goel, Le Duc Anh, Shinobu Ohya, and Masaaki Tanaka
  • Organizer: International Conference on Solid State Devices and Materials (SSDM2019)
  • Int'l Joint Research
• [Presentation] Efficient bias-driven magnetic-field-free magnetization switching by orbital selection at a La0.67Sr0.33MnO3/SrTiO3 interface (2019)
  • Author(s): Le Duc Anh, Takashi Yamashita, Hiroki Yamasaki, Daisei Araki, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka, and Shinobu Ohya
  • Organizer: 26th International Workshop on Oxide Electronics (iWOE26)
  • Int'l Joint Research
• [Presentation] Gate-controllable Spin Splitting and Giant Proximity Magnetoresistance in InAs Induced by a Magnetic Proximity Effect (2019)
  • Author(s): Le Duc Anh, Kosuke Takiguchi, Takahiro Chiba, Tomohiro Koyama, Daichi Chiba, and Masaaki Tanaka
  • Organizer: Materials Research Society (MRS) 2019 Fall Meeting
  • Int'l Joint Research
• [Presentation] Ferromagnetic resonance and magnetic anisotropy control in high-Tc ferromagnetic semiconductor (Ga,Fe)Sb (2019)
  • Author(s): [70].Shobhit Goel, Le Duc Anh, Nguyen Thanh Tu, Shinobu Ohya, and Masaaki Tanaka
  • Organizer: EU-USA-Japan International Symposium on Quantum Technology (EU-US-JPN ISQT)
  • Int'l Joint Research
• [Presentation] Ultra-low power bias-driven magnetization switching by quasi-Fermi level control at an interface of a perovskite-oxide-based magnetic tunnel junction (2019)
  • Author(s): S. Ohya, Le Duc Anh, T. Yamashita, H. Yamasaki, D. Araki, M. Seki, H. Tabata, and M. Tanaka
  • Organizer: 15th International Conferece on Computational Methods in Science (ICCMS 2019)
  • Int'l Joint Research / Invited
• [Presentation] High Curie temperature and Electrical Control of Magnetic Properties in Fe-based Narrow-gap III-V Ferromagnetic Semiconductor Heterostructures (2019)
  • Author(s): Le Duc Anh, Nguyen Thanh Tu, Pham Nam Hai, Masaaki Tanaka
  • Organizer: 2019 Joint MMM-Intermag Conference
  • Int'l Joint Research / Invited
• [Presentation] Fe-based Narrow-gap ferromagnetic Semiconductors: New approach to spin-based electronics (2019)
  • Author(s): Le Duc Anh, Nguyen Thanh Tu, Pham Nam Hai, and Masaaki Tanaka
  • Organizer: Vietnam - Japan Science and Technology Symposium 2019 (VJST2019)
  • Int'l Joint Research / Invited
• [Presentation] Novel gate-controlled magnetotransport phenomena in Fe-doped III-V ferromagnetic semiconductor heterostructures (2019)
  • Author(s): Le Duc Anh
  • Organizer: SPIE Spintronics Symposium, Spintronics XII
  • Int'l Joint Research / Invited
• [Presentation] Fe-doped III-V based ferromagnetic semiconductors and heterostructures (2019)
  • Author(s): Masaaki Tanaka, Le Duc Anh, Nguyen Thanh Tu, and Pham Nam Hai
  • Organizer: SPIE Spintronics Symposium, Spintronics XII
  • Int'l Joint Research / Invited
• [Presentation] New n-type and p-type Fe-doped III-V ferromagnetic semiconductors with high TC (2019)
  • Author(s): Masaaki Tanaka, Le Duc Anh, Nguyen Thanh Tu, and Pham Nam Hai
  • Organizer: 14th Asia-Pacific Physics Conference (APPC14)
  • Int'l Joint Research / Invited
• [Presentation] Fe-doped narrow-gap III-V ferromagnetic semiconductors and related heterostructures with high Curie temperature (2019)
  • Author(s): Masaaki Tanaka, Le Duc Anh, Kosuke Takiguchi, Shobhit Goel, S. Ohya, Nguyen Thanh Tu, and Pham Nam Hai
  • Organizer: 2nd Kavli ITS Workshop on Magnetic Semiconductors
  • Int'l Joint Research / Invited
• [Presentation] N-type and p-type ferromagnetic semiconductors: High Curie temperature and heterostructure devices (2019)
  • Author(s): Le Duc Anh, Nguyen Thanh Tu, Kosuke Takiguchi, Pham Nam Hai, and Masaaki Tanaka
  • Organizer: Symposium on 'New spintronic materials and their physical properties', 2019 Fall Meeting of the Japan Society of Applied Physics
  • Invited
• [Presentation] 強磁性半導体(GaFeSb)/非磁性半導体(InAs) 二層ヘテロ構造における巨大な近接磁気抵抗効果とゲート電圧による制御 (2019)
  • Author(s): Kousuke Takiguchi, Le Duc Anh, Nguyen Thanh Tu, Pham Nam Hai, Masaaki Tanaka
  • Organizer: The 3rd Workshop of Center for Spintronics Research Network（CSRN）on New Spintronic Functional Materials and Giant Physical Response)
  • Invited
• [Presentation] 強磁性酸化物界面における超低消費電力磁化スイッチング (2019)
  • Author(s): Shinobu Ohya, Le Duc Anh, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka
  • Organizer: The 3rd Workshop of Center for Spintronics Research Network（CSRN）on New Spintronic Functional Materials and Giant Physical Response)
  • Invited
• [Presentation] 高品質エピタキシャル単結晶酸化物ヘテロ界面による高効率真性スピン流電流変換 (2019)
  • Author(s): Shinobu Ohya, Daisei Araki, Le Duc Anh, Shingo Kaneta, Munetoshi Seki, Hitoshi Tabata, Masaaki Tanaka
  • Organizer: 24th Meeting on Physics and Applications of Spin-related Phenomena in Semiconductors (PASPS-24)
  • Invited
• [Presentation] Efficient spin-to-charge current conversion in a La0.67Sr0.33MnO3/LaAlO3/SrTiO3 epitaxial single-crystal heterostructure (2019)
  • Author(s): D. Araki, L. D. Anh, S. Kaneta, M. Tanaka, and S. Ohya
  • Organizer: 66th Spring Meeting of the Japan Society of Applied Physics
• [Presentation] Electronic structure of p-type ferromagnetic semiconductor (Ga,Fe)Sb: Valence band and impurity band (2019)
  • Author(s): T. Takeda, M. Suzuki, L. D. Anh, Y. Nonaka, T. Schmitt, S. Yoshida, M. Sakano, K. Ishizaka, Y. Takeda, S.-I. Fujimori, M. Seki, H. Tabata, A. Fujimori, M. Tanaka, V. N. Strocov, and M. Kobayashi
  • Organizer: 74th Spring Meeting of the Physical Society of Japan
• [Presentation] Theoretical understanding of the efficient intrinsic spin-to-charge current conversion in La0.67Sr0.33MnO3/LaAlO3/SrTiO3 (2019)
  • Author(s): Shinobu Ohya, Daisei Araki, Le Duc Anh, Shingo Kaneta, Munetoshi Seki, Hitoshi Tabata, and Masaaki Tanaka
  • Organizer: 2019 Fall Meeting of the Japan Society of Applied Physics
• [Presentation] Magnetic anisotropy switching from perpendicular to in-plane with temperature in heavily-Fe-doped ferromagnetic semiconductor (Ga,Fe)Sb (2019)
  • Author(s): Shobhit Goel, Le Duc Anh, Shinobu Ohya, and Masaaki Tanaka
  • Organizer: 2019 Fall Meeting of the Japan Society of Applied Physics
• [Presentation] Giant rectification effect in semiconductor-based non-magnetic InAs / ferromagnetic (Ga,Fe)Sb bilayer heterostructures (2019)
  • Author(s): K. Takiguchi, L. D. Anh, and M. Tanaka
  • Organizer: 2019 Fall Meeting of the Japan Society of Applied Physics
• [Presentation] オールエピタキシャルペロブスカイト酸化物ヘテロ構造を用いた新しいスピン機能の創製 (2019)
  • Author(s): S. Ohya, Le Duc Anh, D. Araki, S. Kaneta, M. Seki, H. Tabata, M. Tanaka
  • Organizer: Spin-RJN Symposium
• [Presentation] 磁気近接効果を有する１次元チャネルにおける巨大磁気非相反現象 (2019)
  • Author(s): K. Takiguchi, Le Duc Anh, T. Chiba, M. Tanaka
  • Organizer: Spin-RJN Symposium
• [Presentation] p型強磁性半導体 (Ga,Fe)Sbのspバンドと不純物バンド (2019)
  • Author(s): T. Takeda, M. Suzuki, L. D. Anh, Y. Nonaka, T. Schmitt, S. Yoshida, M. Sakano, K. Ishizaka, Y. Takeda, N. Fujimori, M. Seki, H. Tabata, A. Fujimori, V. N. Strocov, M. Tanaka, M. Kobayashi
  • Organizer: Spin-RJN Symposium
• [Presentation] Giant linear non-reciprocal charge transport in one-dimensional channels with the magnetic proximity effect (2019)
  • Author(s): Kosuke Takiguchi, Le Duc Anh, Takahiro Chiba, and Masaaki Tanaka
  • Organizer: 24th Meeting on Physics and Applications of Spin-related Phenomena in Semiconductors (PASPS-24)
• [Patent(Industrial Property Rights)] 半導体デバイスおよびその製造方法 (2019)
  • Inventor(s): レデゥックアイン、他5名
  • Industrial Property Rights Holder: レデゥックアイン、他5名
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 特願2019-205568