2019 Fiscal Year Final Research Report
Laser Assisted Plasma Etching Technique for Micro Ball-Endmill Made of Nano-Polycrystalline Diamond
| Project/Area Number |
17K06099
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Fukuoka Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
仙波 卓弥 福岡工業大学, 工学部, 教授 (30154678)
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| Project Period (FY) |
2017-04-01 – 2020-03-31
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| Keywords | 超精密加工 / レーザ加工 / イオンエッチング / ナノ多結晶ダイヤモンド / 切削工具 |
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| Outline of Final Research Achievements |
A research project was conducted to develop a laser scanning machining and dry etching techniques that enables to form the Nano-Polycrystalline Diamond (NPD) radius cutting tool with a radius of round edge are less than 1 μm. Micro ball-endmill with a frank face of free formed shape and combined shape made up of conical face and hemispherical face was fabricated conducting laser machining to the NPD. Also, it has been clarified that by performing dry etching to the NPD micro ball-endmill, the radius of the cutting edge can be formed to less than 1 nm.
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| Free Research Field |
生産工学・加工学
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| Academic Significance and Societal Importance of the Research Achievements |
マイクロ機械加工という加工概念が提案されて以降，同概念を具現化できる工作機械や工具の開発が行われてきた．その結果，工作機械の制御分解能は現時点で1 nmに達している．1nmの制御分解能で動く工作機械を最大限に活用するためには，切削工具の刃先の丸み半径を少なくとも1nm以下に成形する必要がある．しかし，市販されている工具刃先の丸み半径は20 nm程度である．切削工具の刃先の丸み半径を少なくとも1nm以下に成形できれば，加工中に切りくずをせん断変形させるために消費されているエネルギーのロスがない理想的加工法を実現できる可能性がある．
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