Development of low-flow pump for constant flow water hydro-static bearing

2019 Fiscal Year Final Research Report

• Project/Area Number: 17K06107
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Kanagawa University (2019); 防衛大学校(総合教育学群、人文社会科学群、応用科学群、電気情報学群及びシステム工学群) (2017-2018)
• Principal Investigator: Yui Akinori 神奈川大学, 工学部, 教授 (70532000)
• Co-Investigator(Kenkyū-buntansha): 北嶋 孝之 防衛大学校(総合教育学群、人文社会科学群、応用科学群、電気情報学群及びシステム工学群), システム工学群, 准教授 (50546174)
• Project Period (FY): 2017-04-01 – 2020-03-31
• Keywords: 静圧軸受 / 水道水 / 定流量軸受 / シリンダポンプ

Outline of Final Research Achievements

We developed a simple structureworking fluid supply system that can be driven at low flow rates with a constant flow rate and low flow rate for mounting on static pressure bearings of rotary grinders for wafer processing, and evaluated its performance. Within the scope of this experiment, it was clarified that the cylinder pump had a higher constant flow rate performance than the gear pump. In this experimental device, the table static rigidity when equipped with a mass of 56.2 kg was 28.456N/μm.

Free Research Field

工学

Academic Significance and Societal Importance of the Research Achievements

高精度加工が要求される半導体製造分野では，ウエハの汚染を嫌う．一方，半導体加工機の案内面には静圧軸受の採用が必要となり，近年の大口径化，ウエハの難削化に伴い高剛性な静圧軸受が求められている．本研究では，シリンダポンプを用いた定流量水静圧システムを試作・評価し，今後の実用化の道を開いた．