Measurement of absolute displacement in an ultra-compact crystal mirror surface oscillator using the laser speckle method

2021 Fiscal Year Final Research Report

• Project/Area Number: 17K06466
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: Tokyo Metropolitan University
• Principal Investigator: Watanabe Yasuaki 東京都立大学, システムデザイン研究科, 教授 (60175130)
• Project Period (FY): 2017-04-01 – 2022-03-31
• Keywords: Laser Speckle / 鏡面 / 紫外線レーザ

Outline of Final Research Achievements

It is higher and, based on the piezoelectric vibration device oscillation mode visualization system which applicants developed, improves on the two dimensions vibration displacement measuring system of the untrod den micro-miniature polished surface piezoelectric vibration device so far.
In accuracy and absolute vibration displacement quantity are controlled with nano meter (nm) resolution order with a polished surface piezoelectric vibration device by using using the laser wavelength that is a near ultra violet light and a pico-second pulse laser light source, and, using the technique called the laser speckle method and the synchronization laser method, ultimate two dimensions vibration displacement distribution is demanded. Reflectance ratio of the polished surface was found using a close ultraviolet laser, and the system which measured absolute vibration quantity was built, and, in addition to the conventional laser speckle method, it improved on the device.

Free Research Field

電子回路

Academic Significance and Societal Importance of the Research Achievements

精度良く高感度の部分を見つけるために新たに製作したレーザドップラ干渉計とレーザスペックル法を結合したシステムを構成するためのスキームを統合する．まずイメージ転送では1度ではCCDカメラの感度が不足するので平均20回程度に分けて転送する．比測定対象である水晶振動子であるがここでは当初100MHzであったが10MHzまで測ることとした．従って任意波形ジェネレータには正弦波での規格値20 MHzを使用し，同様に近紫外レーザには50ピコセカンド(同10 MHz)を有しているものを使用する．周波数標準はセシウム原子発振器（10-13の絶対精度）を用い,周波数のずれを抑える．