Preparation of H2-permselective SiC Membrane by Innovative Chemical Vapor Deposition

2019 Fiscal Year Final Research Report

• Project/Area Number: 17K06901
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Properties in chemical engineering process/Transfer operation/Unit operation
• Research Institution: Japan Fine Ceramics Center
• Principal Investigator: Takayuki Nagano 一般財団法人ファインセラミックスセンター, その他部局等, 主任研究員 (70450848)
• Co-Investigator(Kenkyū-buntansha): 佐藤 功二 一般財団法人ファインセラミックスセンター, その他部局等, 技師 (20552590)
• Project Period (FY): 2017-04-01 – 2020-03-31
• Keywords: 炭化ケイ素 / アルミナ / CVD / 水素 / 二酸化炭素 / 分離 / XPS / EDS

Outline of Final Research Achievements

An amorphous silicon carbide (SiC) membrane with a H2 permeance of 1.2 × 10-7 mol・m-2・s-1・Pa-1 and an excellent H2/CO2 selectivity of 2600 at 673 K was successfully synthesized on a Ni-γ-alumina (Al2O3)-coated α-Al2O3 porous support by counter-diffusion chemical vapor deposition (CDCVD) using silacyclobutane (SCB) at 788 K. The dominant permeation mechanism for He and H2 in the temperature range of 323-673 K was activated diffusion. An SiC active layer was formed inside the Ni-γ-Al2O3 intermediate layer. The thermal expansion coefficient mismatch between the SiC active layer and Ni-γ-Al2O3-coated α-Al2O3 porous support was eased by the low decomposition temperature of the SiC source and the membrane structure.

Free Research Field

無機材料工学

Academic Significance and Societal Importance of the Research Achievements

コストの安価なアルミナ多孔質基材を利用して、耐熱性、耐久性に優れた炭化ケイ素膜を合成することが可能となったことで、過酷環境下における化学プロセスへの応用、化学プロセスの省エネルギー化が期待できる。