2017 Fiscal Year Research-status Report
Micro/nano-machining using metal assisted chemical etching for micro/nano systems
| Project/Area Number |
17K14095
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| Research Institution | Tohoku University |
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Principal Investigator |
グエン・ヴァン トゥアン 東北大学, 工学研究科, 助教 (30795117)
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| Project Period (FY) |
2017-04-01 – 2019-03-31
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| Keywords | MACE / Nanochannels |
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| Outline of Annual Research Achievements |
This research topic focuses on metal-asssisted chemical etching (MACE) method which is realistic potential to replace dry etching technology for a large range of applications in micro/nano fabrication. MACE process is performed in the wet etching solution but it can enable a formation of an anisotropic silicon structure at low temperature and atmospheric pressure.Ultra-high aspect ratio trenches and pillars of 400 and 80, respectively have been achieved.A commercial AFM (atomic force microscopy) cantilever with high aspect ratio nanopillars on its top surface for moisture detection in electronic products was demonstrated. Ion transport by gating voltage to nanopores produced via MACE was reported.
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| Current Status of Research Progress |
Current Status of Research Progress
1: Research has progressed more than it was originally planned.
Reason
Our laboratory has around 30 members and discussions on experimental results are hold frequently (one time per week). Under advices of Prof. Takahito Ono, I performed experiences and achieved a good results. I has published 11 Journal papers in 2017 (1st author:7, co-authors: 4)
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| Strategy for Future Research Activity |
My previous works related to MACE have been successfully developed. Ultra-high aspect ratio trenches and pillars of 400 and 80, respectively have been achieved. A commercial AFM (atomic force microscopy) cantilever with high aspect ratio nanopillars on its top surface for moisture detection in electronic products was demonstrated. Ion transport by gating voltage to nanopores produced via MACE was reported. In short-term research proposal, MEMS and other high aspect ratio devices, including micro-supercapacitors, gas sensor, capacitive silicon resonator and micro Knudsen pump, will be investigated by using MACE. For long-term direction and carrier planning, opening a way to the mass production based on MACE for high performance devices and low-cost productions will be targeted.
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