Micro/nano-machining using metal assisted chemical etching for micro/nano systems

2018 Fiscal Year Annual Research Report

• Project/Area Number: 17K14095
• Research Institution: Tohoku University
• Principal Investigator: グエン・ヴァン トゥアン 東北大学, マイクロシステム融合研究開発センター, 特任助教 (30795117)
• Project Period (FY): 2017-04-01 – 2019-03-31
• Keywords: MACE / Nano-pillars / Nanopores

Outline of Annual Research Achievements

This research focuses on metal-assisted chemical etching method for micro/nano device fabrication. Research achievements can be summarized, as following: 1. High aspect ratio silicon structures produced via metal assisted chemical etching and assembly technology for cantilever fabrication. 2. Cantilever with high aspect ratio nano pillars on its surface for moisture detection in electronic products. 3. Ion transportation by gating voltage to nanopores produced via metal assisted chemical etching method. 4. Low cost and high-aspect ratio micro/nano device fabrication by using innovative metal-assisted chemical etching method.

Research Products

• [Journal Article] Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method (2018)
  • Author(s): Van Toan Nguyen、Inomata Naoki、Toda Masaya、Ono Takahito
  • Journal Title: Nanotechnology Volume: 29 Pages: 195301～195301
  • DOI: 10.1088/1361-6528/aab1d3
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Logic gates based on electrically driven nanoelectromechanical switches (2018)
  • Author(s): Van Toan Nguyen、Zhao Dong、Inomata Naoki、Ono Takahito
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Volume: 14 Pages: 335～336
  • DOI: 10.1002/tee.22814
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping (2018)
  • Author(s): Van Toan Nguyen、Inomata Naoki、Trung Nguyen Huu、Ono Takahito
  • Journal Title: Journal of Micromechanics and Microengineering Volume: 28 Pages: 055001～055001
  • DOI: https://doi.org/10.1088/1361-6439/aaae26
  • Peer Reviewed / Int'l Joint Research
• [Presentation] Electrolyte based thermal to electric energy conversion utilising on 10 nm diameter of Al2O3 nanochannles (2019)
  • Author(s): Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, and Takahito Ono
  • Organizer: The 32nd IEEE international conference on Micro Electro Mechanical Systems
  • Int'l Joint Research
• [Presentation] Metal-assisted chemical etching method subjected to Micro/Nano device fabrication (2019)
  • Author(s): Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu and Takahito Ono
  • Organizer: The 20th International conference on solid-state sensors, actuators and microsystems
  • Int'l Joint Research
• [Presentation] Nanoelectromechanical logical gates utilising selective tungsten chemical vapor deposition (2019)
  • Author(s): Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, and Takahito Ono
  • Organizer: The 20th International conference on solid-state sensors, actuators and microsystems
  • Int'l Joint Research
• [Presentation] Capacitive silicon nanomechanical resonators capable of selective vibration of high-order mode (2018)
  • Author(s): Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Masaya Toda and Takahito Ono
  • Organizer: Asia-Pacific Conference of Transducers and Micro-Nano Technology
  • Int'l Joint Research
• [Book] Advances in Glass Science and Technology (2018)
  • Author(s): Nguyen Van Toan, Naoki Inomata, Masaya Toda and Takahito Ono
  • Total Pages: 22
  • Publisher: Intechopen
  • ISBN: 978-1-78923-177-9