Fabrication of semiconducting carbon nanotube arrays by direct growth and post-growth processing

2019 Fiscal Year Annual Research Report

• Project/Area Number: 17K14601
• Research Institution: The University of Tokyo
• Principal Investigator: 井ノ上 泰輝 東京大学, 大学院工学系研究科(工学部), 助教 (00748949)
• Project Period (FY): 2017-04-01 – 2020-03-31
• Keywords: カーボンナノチューブ / CNT / 半導体 / 電界効果トランジスタ / 六方晶窒化ホウ素 / BNNT / ヘテロナノチューブ

Outline of Annual Research Achievements

カーボンナノチューブ（CNT）の半導体デバイス応用に向けては，その構造制御合成技術およびデバイス構築技術の確立が必要とされている．本年度は，13C同位体エタノールを炭素源に用いたラベリング合成およびラマンマッピング測定による単一単層CNTの成長過程分析において，成長途中での炭素源の一時的停止と各種ガスの添加効果を調べた．一時停止中に水素を導入しない場合はその後の再成長が生じなかったのに対して，水素を導入した場合は再成長が生じた．さらに水蒸気を導入した場合は，単層CNTが成長とは逆方向に動きながらエッチングされるとともに，再成長時に単層CNTの成長速度が向上することが示された．これは半導体CNTの長尺・高密度合成の実現に向けて有用な知見といえる．また，直接合成において単層CNTの構造を制御することが半導体デバイス応用に向けて望まれている．合成中および合成前に添加ガスを用いることで，単層CNTの直径が小さくなり，カイラリティにおいては大きなカイラル角のものが選択的に合成されることを見出した．さらに，架橋した孤立単層CNTをテンプレートとして窒化ホウ素ナノチューブ（BNNT）を同心状に合成し，単層CNTとBNNTの複合構造であるヘテロナノチューブを作製した．架橋状態から平面基板にヘテロナノチューブを転写する方法を確立し，電極の形成により電界効果トランジスタ（FET)を作製した．FETの電流電圧特性を測定し，半導体CNTに由来する高いスイッチング性能が確認された．

Research Products

• [Journal Article] One-dimensional van der Waals heterostructures (2020)
  • Author(s): R. Xiang, T. Inoue, Y. Zheng, A. Kumamoto, Y. Qian, Y. Sato, M. Liu, D. Tang, D. Gokhale, J. Guo, K. Hisama, S. Yotsumoto, T. Ogamoto, H. Arai, Y. Kobayashi, H. Zhang, B. Hou, A. Anissimov, M. Maruyama, Y. Miyata, S. Okada, S. Chiashi, Y. Li, J. Kong, E. I. Kauppinen, Y. Ikuhara, K. Suenaga, S. Maruyama
  • Journal Title: Science Volume: 367 Pages: 537-542
  • DOI: 10.1126/science.aaz2570
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Regrowth and catalytic etching of individual single-walled carbon nanotubes studied by isotope labeling and growth interruption (2019)
  • Author(s): B. Koyano, T. Inoue, S. Yamamoto, K. Otsuka, R.Xiang, S. Chiashi, S. Maruyama
  • Journal Title: Carbon Volume: 155 Pages: 635-642
  • DOI: 10.1016/j.carbon.2019.09.031
  • Peer Reviewed
• [Journal Article] Atomic-scale structural identification and evolution of Co-W-C ternary SWCNT catalytic nanoparticles: High-resolution STEM imaging on SiO2 (2019)
  • Author(s): H. An, A. Kumamoto, R. Xiang, T. Inoue, K. Otsuka, S. Chiashi, C. Bichara, A. Loiseau, Y. Li, Y. Ikuhara, S. Maruyama
  • Journal Title: Science Advances Volume: 5 Pages: eaat9459
  • DOI: 10.1126/sciadv.aat9459
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Molecular Dynamics of Chirality Definable Growth of Single-Walled Carbon Nanotubes (2019)
  • Author(s): R. Yoshikawa, K. Hisama, H. Ukai, Y. Takagi, T. Inoue, S. Chiashi, S. Maruyama
  • Journal Title: ACS Nano Volume: 13 Pages: 6506-6512
  • DOI: 10.1021/acsnano.8b09754
  • Peer Reviewed
• [Journal Article] Growth of single-walled carbon nanotubes by alcohol chemical vapor deposition with water vapor addition: Narrowing the diameter and chiral angle distributions (2019)
  • Author(s): H. Takezaki, T. Inoue, R. Xiang, S. Chiashi, S. Maruyama
  • Journal Title: Diamond and Related Materials Volume: 96 Pages: 160-166
  • DOI: 10.1016/j.diamond.2019.05.009
  • Peer Reviewed
• [Journal Article] In situ observation of dewetting-induced deformation of vertically aligned single-walled carbon nanotubes (2019)
  • Author(s): Y. Yoshimoto, K. Isomura, S. Sugiyama, H. An, T. Hori, T. Inoue, S. Chiashi, S. Takagi, S. Maruyama, I. Kinefuchi
  • Journal Title: Diamond and Related Materials Volume: 95 Pages: 115-120
  • DOI: 10.1016/j.diamond.2019.04.011
  • Peer Reviewed
• [Presentation] 単層CNT成長における添加ガスの効果の同位体ラベル分析 (2020)
  • Author(s): 小矢野 文章, 山元 隼, 小林 明香里, 石丸 亮哉, 大塚 慶吾, 井ノ上 泰輝, 項 栄, 千足 昇平, 丸山 茂夫
  • Organizer: 第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] Synthesis of Boron Nitride Nanotubes and MoS2@BNNTs Heteronanotubes (2020)
  • Author(s): Ming Liu, Yongjia Zheng, Yang Qian, Rong Xiang, Taiki Inoue, Shohei Chiashi, Esko I. Kauppinen, Shigeo Maruyama
  • Organizer: 第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] In-Plane Thermal Conductance of Thin Films Composed of Coaxially Combined Single-Walled Carbon Nanotubes and Boron Nitride Nanotubes (2020)
  • Author(s): Pengyingkai Wang, Yongjia Zheng, Taiki Inoue, Rong Xiang, Ahmed Shawky, Makoto Watanabe, Anton Anisimov, Esko I. Kauppinen, Shohei Chiashi, Shigeo Maruyama
  • Organizer: 第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] h-BN上へのガス流配向CNTの合成とラマン分光測定 (2020)
  • Author(s): 佐藤 周, 四元 聡, 番場 雅典, 井ノ上 泰輝, 丸山 茂夫, 千足 昇平
  • Organizer: 第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] Chemical vapor deposition of one-dimensional heterostructures (2020)
  • Author(s): Yongjia Zheng, Yang Qian, Ming Liu, Akinito Kumamoto, Yuichi Ikuhara, Esko I. Kauppinen, Shohei Chiashi, Taiki Inoue, Rong Xiang, Shigeo Maruyama
  • Organizer: 第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] Rayleigh scattering measurement of suspended SWCNTs coaxially wrapped with BNNTs (2020)
  • Author(s): Satoshi Yotsumoto, Hayato Arai, Yongjia Zheng, Taiki Inoue, Rong Xiang, Shigeo Maruyama, Shohei Chiashi
  • Organizer: 第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] 炭素/窒化ホウ素/二硫化モリブデンで構成されたヘテロナノチューブの合成と転写 (2020)
  • Author(s): 村上 大巧, 松下 覚, 荒井 隼人, 鄭 永嘉, 銭 洋, 井ノ上 泰輝, 項 栄, 千足 昇平, 丸山 茂夫
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] Synthesis of MoS2 nanotubes based on boron nitride nanotubes (2020)
  • Author(s): Ming Liu, Yongjia Zheng, Yang Qian, Rong Xiang, Taiki Inoue, Shohei Chiashi, Esko Kauppinen, Shigeo Maruyama
  • Organizer: IWEPNM2020, XXXIVth International Winterschool on Electronic Properties of Novel Materials
  • Int'l Joint Research
• [Presentation] Growth of Monolayer Hexagonal Boron Nitride Single-Crystals on Exfoliated Graphite (2019)
  • Author(s): Hayato Arai, Taiki Inoue, Rong Xiang, Shohei Chiashi, Shigeo Maruyama
  • Organizer: 32nd International Microprocesses and Nanotechnology Conference (MNC2019)
  • Int'l Joint Research
• [Presentation] グラファイト上での単層六方晶窒化ホウ素単結晶の化学気相成長 (2019)
  • Author(s): 荒井 隼人, 井ノ上 泰輝, 項 栄, 千足 昇平, 丸山 茂夫
  • Organizer: 第80回応用物理学会秋季学術講演会
• [Presentation] Growth of single-crystalline MoS2 on 1D and 2D boron nitride systems (2019)
  • Author(s): Taikou Murakami, Hayato Arai, Yongjia Zheng, Yang Qian, Taiki Inoue, Rong Xiang, Shohei Chiashi, Shigeo Maruyama
  • Organizer: 第57回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] Growth, etching, and regrowth of individual single-walled carbon nanotubes: Isotope labeling study (2019)
  • Author(s): Taiki Inoue, Bunsho Koyano, Shun Yamamoto, Keigo Otsuka, Rong Xiang, Shohei Chiashi, Shigeo Maruyama
  • Organizer: 第57回フラーレン・ナノチューブ・グラフェン総合シンポジウム
• [Presentation] Chemical vapor deposition of one-dimensional heterostructures (2019)
  • Author(s): Yongjia Zheng, Rong Xiang, Taiki Inoue, Yang Qian, Ming Liu, Shohei Chiashi, Esko I. Kauppinen, Shigeo Maruyama
  • Organizer: ChinaNano 2019
  • Int'l Joint Research
• [Presentation] Enhanced in-plane thermal conductance of single-walled carbon nanotube/boron nitride nanotube composite films (2019)
  • Author(s): Pengyingkai Wang, Yongjia Zheng, Taiki Inoue, Rong Xiang, Shohei Chiashi, Shigeo Maruyama
  • Organizer: ChinaNano 2019
  • Int'l Joint Research
• [Presentation] Photoluminescence Spectra from Single-Walled Carbon Nanotubes on hexagonal Boron Nitride (2019)
  • Author(s): Satoshi Yotsumoto, Tatsuro Ogamoto, Tatsuya Murai, Hayato Arai, Taiki Inoue, Rong Xiang, Shigeo Maruyama, Shohei Chiashi
  • Organizer: 20th International Conference on the Science and Application of Nanotubes and Low-dimensional Materials (NT19)
  • Int'l Joint Research
• [Presentation] Application of one-dimensional van der Waals heterostructures coaxially wrapped around single-walled carbon nanotubes (2019)
  • Author(s): Shigeo Maruyama, Rong Xiang, Taiki Inoue, Yongjia Zheng, Ming Liu, Yuta Sato, Akihito Kumamoto, Yan Li, Shohei Chiashi, Esko Kauppinen, Kazu Suenaga, Yuichi Ikuhara
  • Organizer: 20th International Conference on the Science and Application of Nanotubes and Low-dimensional Materials (NT19)
  • Int'l Joint Research
• [Presentation] Synthesis of Boron Nitride Wrapped Vertically-Aligned Single-Walled Carbon Nanotubes and Boron Nitride Nanotubes Array (2019)
  • Author(s): Ming Liu, Yongjia Zheng, Taiki Inoue, Shohei Chiashi, Rong Xiang, Shigeo Maruyama
  • Organizer: 20th International Conference on the Science and Application of Nanotubes and Low-dimensional Materials (NT19)
  • Int'l Joint Research
• [Presentation] Growth process of individual single-walled carbon nanotubes analyzed by isotope labelling (2019)
  • Author(s): Taiki Inoue, Bunsho Koyano, Shun Yamamoto, Shota Hiraoka, Keigo Otsuka, Rong Xiang, Shohei Chiashi, Shigeo Maruyama
  • Organizer: 20th International Conference on the Science and Application of Nanotubes and Low-dimensional Materials (NT19)
  • Int'l Joint Research
• [Presentation] ヘテロ多層ナノチューブの合成と転写 (2019)
  • Author(s): 村上 大巧, 荒井 隼人, 鄭 永嘉, 銭 洋, 井ノ上 泰輝, 項 栄, 千足 昇平, 丸山 茂夫
  • Organizer: 第 56 回日本伝熱シンポジウム
• [Presentation] In-plane thermal conductivity of thin films composed of single-walled carbon nanotubes coaxially coated with boron nitride nanotubes (2019)
  • Author(s): Pengyingkai Wang, Yongjia Zheng, Taiki Inoue, Rong Xiang, Makoto Watanabe, Shohei Chiashi, Shigeo Maruyama
  • Organizer: 第 56 回日本伝熱シンポジウム
• [Presentation] One Dimensional Van Der Waals Heterostructures Wrapped Around Single-Walled Carbon Nanotubes (2019)
  • Author(s): Rong Xiang, Taiki Inoue, Shigeo Maruyama
  • Organizer: 235th ECS meeting
  • Int'l Joint Research
• [Remarks] Taiki Inoue
  • URL: http://www.photon.t.u-tokyo.ac.jp/~inoue/index.html