Sub-10nm hard X-ray focusing and application to nanoscopy/spectroscopy

2008 Fiscal Year Self-evaluation Report

• Project/Area Number: 18002009
• Research Category: Grant-in-Aid for Specially Promoted Research
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering; Engineering
• Research Institution: Osaka University
• Principal Investigator: YAMAUCHI Kazuto Osaka University, 大学院工学研究科, 教授 (10174575)
• Project Period (FY): 2006 – 2010
• Keywords: 超精密加工 / X 線光学 / 波面光学 / ナノ集光

Research Abstract

SPring-8 に代表される第3 世代放射光X 線源が実用に供され,高輝度X 線光源を利用したナノスケール分析への期待が急速に高まっている.波長1Å以下の硬X 線のナノビームが形成できれば,分子サイズの分解能での物質機能のイメージングや単一分子回折による構造解析などが可能となり,また,更なる高輝度化と単パルス化が実現できれば,化学反応の実時間計測や生きたままの細胞の観察も可能とされている.
本研究では,Sub-10nm サイズの硬X 線ナノ集光をめざし,これに求められる波面精度を実現する集光光学系を開発する.このために,ビームウエスト近傍のX 線干渉縞の強度情報をもとに,位相回復によってX 線の波面を評価する「At-wavelength 干渉計測」,その計測結果に基づく「波面補正」等,従来にない概念の導入によって,ミラー集光光学系の高機能化を達成する.これによって,電子顕微鏡に迫る分解能を有する「Sub-10nm 分解能硬X 線顕微鏡システム」を実現する.

Research Products

• [Journal Article] Trace element mapping of a single cell using a hard x-ray nanobeam focused by a Kirkpatrick-Baez mirror system (2009)
  • Author(s): S. Matsuyama, M. Shimura, H. Mimura, M. Fujii, H. Yumoto, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa and K. Yamauchi
  • Journal Title: X-ray Spectrometry 38 Pages: 89-94
• [Journal Article] Direct Determination of the Wave Field of an X-ray Nanobeam (2008)
  • Author(s): H.Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi
  • Journal Title: Physical Review A 77(1) Pages: 015812-1-4
• [Journal Article] Highly accurate differential deposition for X-ray reflective optics (2008)
  • Author(s): S. Handa, H. Mimura, H. Yumoto, T. Kimura, S. Matsuyama, Y. Sano and K. Yamauchi
  • Journal Title: Surface and Interface Analysis 40 Pages: 1019-1022
• [Journal Article] At-wavelength figure metrology of hard x-ray focusing mirrors (2006)
  • Author(s): H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi
  • Journal Title: Review of Scientific Instruments 77 Pages: 063712-1-6
  • Peer Reviewed
• [Presentation] Synchrotron-radiation-based hard-X-ray nanoprobe (2009)
  • Author(s): K. Yamauchi
  • Organizer: JST Symposium on "Micro and Trace X-ray Analysis
  • Place of Presentation: Osaka City Univ. Media Center, Osaka, Japan
  • Year and Date: 20090212-14
• [Presentation] Fabrication of 400mm long X-ray mirror by Electrolytic In-process Dressing Grinding and Elastic Emission Machining (2008)
  • Author(s): H. Mimura
  • Organizer: The 6^<th> CHINA-JAPAN, International Conference on Ultraprecision Machining, Extended Abstract 22-26
  • Place of Presentation: Hunan Univ., Changsha, China
  • Year and Date: 20081124-25
• [Presentation] Wavefront control for hard X-ray nanofocusing (2008)
  • Author(s): K. Yamauchi
  • Organizer: ACTOP2008
  • Place of Presentation: Trieste, Italy
  • Year and Date: 20081011-14
• [Presentation] X-ray focusing with Kirkpatrick-Baez optics (2008)
  • Author(s): K. Yamauchi
  • Organizer: SPIE Optics + Photonics 2008
  • Place of Presentation: San Diego, California, USA
  • Year and Date: 20080811-14
• [Presentation] Hard X-ray nanobeam for X-ray nanoscopy/spectroscopy (2008)
  • Author(s): K. Yamauchi
  • Organizer: European Conference on X-ray Spectrometry
  • Place of Presentation: Cavtat, Dubrovnik, CROATIA
  • Year and Date: 20080600
• [Presentation] Recent achievements and next strategies in hard-X-ray nano-focusing (2007)
  • Author(s): K. Yamauchi
  • Organizer: ALS user meeting
  • Place of Presentation: USA, Lawrence Berkeley National Lab
  • Year and Date: 2007-10-05
• [Presentation] Elastic Emission Machining for the Fabrication of X-ray and EUV Mirrors (2006)
  • Author(s): K. Yamauchi
  • Organizer: OSA Optical Fabrication and Testing Topical Meeting
  • Place of Presentation: Rochester USA
  • Year and Date: 20061009-11
• [Remarks] 研究室ホームページ
  • URL: http://www-up.prec.eng.osaka-u.ac.jp/