Sub-10nm hard X-ray focusing and application to nanoscopy/spectroscopy

2010 Fiscal Year Final Research Report

• Project/Area Number: 18002009
• Research Category: Grant-in-Aid for Specially Promoted Research
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering; Engineering
• Research Institution: Osaka University
• Principal Investigator: YAMAUCHI Kazuto Osaka University, 大学院・工学研究科, 教授 (10174575)
• Co-Investigator(Kenkyū-buntansha): MIMURA Hidekazu 東京大学, 大学院・工学系研究科, 准教授 (30362651)
• Co-Investigator(Renkei-kenkyūsha): YAMAMURA Kazuya 大阪大学, 大学院・工学研究科, 准教授 (60240074) ; SANO Yasuhisa 大阪大学, 大学院・工学研究科, 准教授 (40252598) ; TAKAHASHI Yukio 大阪大学, 大学院・工学研究科, 准教授 (00415217) ; INAGAKI Kouji 大阪大学, 大学院・工学研究科, 助教 (50273579) ; MATSUYAMA Satoshi 大阪大学, 大学院・工学研究科, 助教 (10423196)
• Project Period (FY): 2006 – 2010
• Keywords: 超精密加工 / X線光学 / 波面光学 / ナノ集光

Research Abstract

In order to further improve the spatial resolution in X-ray microscopy, a sub-10nm hard X-ray focusing system was developed. In situ hard X-ray wavefront error measurement and error compensation methods were completed, following wave-optical theory. The world-first sub-10nm beam was realized at SPring-8. Then, the focusing system was upgraded to X-ray nanoscopy/spectroscopy. A nanometer-thickness films made of Pt was successfully observed with better than 10nm spatial resolution.

Research Products

• [Journal Article] One-dimensional sub-10-nm hard X-ray focusing using laterally graded multilayer mirror (2011)
  • Author(s): H.Mimura, S.Handa, T.Kimura, H.Yumoto, D.Yamakawa, H.Yokoyama, S.Matsuyama, K.Inagaki, K.Yamamura, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi,T.Ishikawa, K.Yamauchi
  • Journal Title: Nucl.Instrum.Meth.A 616 Pages: S16-S18
• [Journal Article] Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm (2010)
  • Author(s): T.Kimura, H.Mimura, S.Handa, H.Yumoto, H.Yokoyam, S.Imai, S.Matsuyama, Y.Sano, K.Tamasaku, Y.Kohmura, Y.Nishino, M.Yabashi, T.Ishikawa, K.Yamauchi
  • Journal Title: Rev.Sci.Instrum. 81 Pages: 123704
• [Journal Article] Extended knife-edge method for characterizing Sub-10-nm X-ray beams (2010)
  • Author(s): S.Handa, H.Mimura, H.Yumoto, T.Kimura, S.Matsuyama, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi , T.Ishikawa, K.Yamauchi
  • Journal Title: Nucl.Instrum.Meth. 616 Pages: 246-250
• [Journal Article] Stitching angle measurable microscopic interferometer : surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature (2010)
  • Author(s): H.Yumoto, H.Mimura, S.Handa, T.Kimura, S.Matsuyama, Y.Sano, H.Ohashi, K.Yamauchi, T.Ishikawa
  • Journal Title: Nucl.Instrum.Meth. 616 Pages: 203-206
• [Journal Article] Breaking the 10 nm barrier in hard-X-ray focusing (2010)
  • Author(s): H.Mimura, S.Handa, T.Kimura, H.Yumoto, D.Yamakawa, H.Yokoyama, S.Matsuyama, K.Inagaki, K.Yamamura, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi,T.Ishikawa, K.Yamauchi
  • Journal Title: Nature Physics 6 Pages: 122-125
• [Journal Article] Focusing mirror for x-ray free-electron lasers (2008)
  • Author(s): H.Mimura, S.Morita, T.Kimura, D.Yamakawa, W.Lin, Y.Uehara, S.Matsuyama, H.Yumoto, H.Ohashi, K.Tamasaku, Y.Nishino, M.Yabashi, T.Ishikawa, H.Ohmori, K.Yamauchi
  • Journal Title: Rev.Sci.Instum. 79 Pages: 083104
• [Journal Article] Direct determination of the wave field of an x-ray nanobeam (2008)
  • Author(s): H.Mimura, H.Yumoto, S.Matsuyama, S.Handa, T.Kimura, Y.Sano, M.Yabashi, Y.Nishino, K.Tamasaku, T.Ishikawa, K.Yamauchi
  • Journal Title: Phys.Rev.A 77 Pages: 15812
• [Journal Article] Efficient focusing of hard x rays to 25 nm by a total reflection mirror (2007)
  • Author(s): H.Mimura, H.Yumoto, S.Matsuyama, Y.Sano, K.Yamamura, Y.Mori, M.Yabashi, Y.Nishino, K.Tamasaku, T.Ishikawa, K.Yamauchi
  • Journal Title: Appl.Phys.Lett. vol.90 Pages: 051903
• [Presentation] Sub‐10‐nm Focusing of Hard X‐rays Using Mirror Optics (2010)
  • Author(s): K.Yamauchi
  • Organizer: The 10th International Conference of X-ray Microscopy(invited)
  • Place of Presentation: Chicago, Illinois, U.S.A.
  • Year and Date: 2010-08-16
• [Presentation] A Novel On-site Wavefront Correction Method for Ultimate Focusing of Hard X-Rays (2010)
  • Author(s): K.Yamauchi
  • Organizer: APS/EMC Users Meeting(invited)
  • Place of Presentation: Chicago, Illinois,U.S.A.
  • Year and Date: 2010-05-04
• [Presentation] 10nm-Level Focusing of Hard X-Rays by KB Mirrors OSA'S 93rd ANNUAL MEETING FThG3 (2009)
  • Author(s): K.Yamauchi
  • Organizer: (invited)
  • Place of Presentation: San Jose, California, USA.
  • Year and Date: 2009-10-11
• [Presentation] Mirror Optics for Coherent X-rays and Overview of the Osaka International Workshop on X-ray Mirror Design, Fabrication and Metrology (2009)
  • Author(s): K.Yamauchi
  • Organizer: The 10th international conference on synchrotron radiation instrumentation,(invited)
  • Place of Presentation: Melbourne, Australia.
  • Year and Date: 2009-10-01
• [Remarks] ホームページ
  • URL: http://www-up.prec.eng.osaka-u.ac.jp/
• [Patent(Industrial Property Rights)] 反射面形状制御ミラー装置及び反射面形状制御ミラーの製造方法 (2009)
  • Inventor(s): 山内和人・木村隆史・津村尚史
  • Industrial Property Rights Holder: ジェイテック・大阪大学
  • Industrial Property Number: 国内優先出願,特願2009-297734
  • Filing Date: 2009-12-28