Fabrication Process for Self Assembled Nano Structure

2008 Fiscal Year Self-evaluation Report

• Project/Area Number: 18063015
• Research Category: Grant-in-Aid for Scientific Research on Priority Areas
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Nara Institute of Science and Technology
• Principal Investigator: URAOKA Yukiharu Nara Institute of Science and Technology, 物質創成科学研究科, 教授 (20314536)
• Project Period (FY): 2006 – 2009
• Keywords: 半導体 / 微細加工 / 生体超分子 / 自己組織化 / ボトムアップ

Research Abstract

生体超分子や有機分子など、自己組織化能力をもつ新しい材料を導入し、新しい半導体デバイスプロセスを提案する。従来の無機材料では得られないナノメートルスケールでの均一性、位置制御性を有効に活用した、新機能デバイスプロセスを検討する。

Research Products

• [Journal Article] Non-volatile flash memory with discrete bionanodt floating gate assembled by protein template (2008)
  • Author(s): A. Miura, R.Tsukamoto, S.Yoshii, I. Ymashita, Y.Uraoka, (他1名、5番目)
  • Journal Title: Nanotechnology 19 Pages: 255201
  • Peer Reviewed
• [Journal Article] Floating nanodot gate memory fabrication with biomineralized nanodot as charge storage node (2008)
  • Author(s): A.Miura, Y.Uraoka,(他5名、2番目)
  • Journal Title: Journal of Applied Physics Vol.103,No.7 Pages: 074503-1〜10
  • Peer Reviewed
• [Journal Article] Low-temperature poly-Si TFT flash memory with ferritin (2007)
  • Author(s): K. Ichikawa, Y. Uraoka, (他5名、2番目)
  • Journal Title: Jpn. J. Appl. Phys. Vol.46, No.34 Pages: L804-L806
  • Peer Reviewed
• [Journal Article] bionaodot mmonolayer array fabrication for nonvolatile memory application (2007)
  • Author(s): A.Miura, Y.Uraoka, (他5名、2番目)
  • Journal Title: Surface Science Letters 601 Pages: L.81-L85
  • Peer Reviewed
• [Journal Article] Effects of Dot Density and Dot Size on Charge Injection Characteristics in Nanodot Array Produced by Protein Supramolecules (2007)
  • Author(s): K.Yamada, S.Yoshii, S.Kumagai, A. Miura, Y.Uraoka, (他2名、4番目)
  • Journal Title: Jpn J. Appl. Phys Vol. 46, No. 11 Pages: 7549-7553
  • Peer Reviewed
• [Presentation] Characterization of electronic properties of single bionanodot (2007)
  • Author(s): R.Tanaka, A.Miura, Y.Uraoka, (他2名、3番目)
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Year and Date: 20070000
• [Presentation] Low Temperature poly-Si TFT Flash memory with Si nano crystal dot (2007)
  • Author(s): K.Ichikawa, H.Yano, T.Hatayama, Y.Uraoka(他1名、4番目)
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Year and Date: 20070000
• [Presentation] Enlargement of Grain size poly-Si suing Ferritin Protein with Ni Nano particles (2007)
  • Author(s): Y.Nanjo, Y.Uraoka, (他3名、2番目)
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Year and Date: 20070000
• [Presentation] Enhancement of crystal growth rate of Bio-Nano Crystallization by Pulsed Rapid Thermal Annealing (2007)
  • Author(s): M.Ochi, Y.Nanjo, Y.Sugawara, Y.Uraoka,(他3名、3番目)
  • Organizer: SSDM, Tsukuba
  • Year and Date: 20070000
• [Presentation] Reduction of a Ferritin Core Embedded in Silicon Oxide Film for An Application to Floating Gate Memory (2007)
  • Author(s): akashi Matsumura, Atsushi Miura, Yukiharu Uraoka, Takashi Fuyuki, Shigeo Yoshii, Ichiro Yamashita
  • Organizer: SSDM
  • Place of Presentation: Tsukuba
  • Year and Date: 2007-09-18
• [Book] システムオンパネルを目指した薄膜トランジスタ
  • Author(s): 浦岡行治監修
  • Publisher: CMC出版
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